ʻO kahi ʻike piha o nā ʻenehana Deposition Film Thin: MOCVD, Magnetron Sputtering, a me PECVD

I ka hana semiconductor, ʻoiai ʻo photolithography a me etching nā kaʻina hana i ʻōlelo pinepine ʻia, epitaxial a i ʻole nā ​​kiʻi ʻoniʻoni ʻoniʻoni ʻoniʻoni he koʻikoʻi like. Hōʻike kēia ʻatikala i nā ʻano hana hoʻoheheʻe kiʻiʻoniʻoni maʻamau i hoʻohana ʻia i ka hana ʻana i ka chip, meMOCVD, ka hoʻoheheʻe ʻana o magnetron, aPECVD.

No ke aha he mea koʻikoʻi nā kaʻina hana kiʻiʻoniʻoni ma ka hana chip?

No ka hōʻike ʻana, e noʻonoʻo ʻoe i kahi palaoa paʻa maʻamau. Ma kāna iho, ʻono paha ka ʻono. Eia nō naʻe, ma ke kāhili ʻana i ka ʻili me nā mea ʻono like ʻole-e like me ka paʻi pīni ʻono a i ʻole ka syrup malt momona-hiki iā ʻoe ke hoʻololi i kona ʻono. ʻO kēia mau mea hoʻonani ʻono e like menā kiʻiʻoniʻoni lahilahii nā kaʻina semiconductor, ʻoiai ʻo ka berena palahalaha e hōʻike ana i kapani.

I ka hana ʻana i nā puʻupuʻu, lawelawe nā kiʻi ʻoniʻoni lahilahi i nā hana hana he nui-ka hoʻokaʻawale, conductivity, passivation, absorption māmā, a me nā mea ʻē aʻe.

1. Metala-Organic Chemical Vapor Deposition (MOCVD)

ʻO MOCVD kahi ʻenehana kiʻekiʻe loa a pololei i hoʻohana ʻia no ka waiho ʻana i nā kiʻi ʻoniʻoni semiconductor kiʻekiʻe a me nā nanostructures. He kuleana koʻikoʻi ia i ka hana ʻana o nā mea like me nā LED, lasers, a me nā uila uila.

Nā mea nui o kahi ʻōnaehana MOCVD:

• Pūnaehana hoʻouna kinoea
  Ke kuleana no ka hoʻokomo pololei ʻana o nā mea hoʻoheheʻe i loko o ke keʻena pane. Aia kēia me ka mana kahe o:

• Nā kinoea lawe

• Metala-organic precursors

• Nā kinoea Hydride
  Hōʻike ka ʻōnaehana i nā kīwī ala he nui no ka hoʻololi ʻana ma waena o nā ʻano ulu a me nā ʻano hoʻomaʻemaʻe.

• Keena Manaʻo
  ʻO ka puʻuwai o ka ʻōnaehana kahi e ulu ai nā mea maoli. Aia nā ʻāpana:

  • Ka mea hoʻopaʻa palapala

  • ʻO nā mea ʻike wela a me ka wela

  • Nā awa ʻōpika no ka nānā ʻana i loko

  • Nā lima lopako no ka hoʻouka ʻana a me ka wehe ʻana i ka wafer

• Pūnaehana Mana Hoʻoulu
  Loaʻa i nā mea hoʻoponopono logic programmable a me kahi kamepiula hoʻokipa. Hōʻoia kēia i ka nānā pono ʻana a me ka hoʻihoʻi ʻana i ke kaʻina hana deposition.

• Ka nānā ʻana i loko
  ʻO nā mea hana e like me nā pyrometers a me nā reflectometers e ana:

  • Kiʻiʻoniʻoni mānoanoa

  • Ka wela o ka ʻili

  • Kūleʻa lepo
    Hāʻawi kēia mau mea i ka manaʻo manawa maoli a me ka hoʻoponopono.

• Pūnaehana Hoʻomaʻamaʻa Exhaust
  Mālama i nā huahana ʻona me ka hoʻohana ʻana i ka thermal decomposition a i ʻole catalysis chemical e hōʻoia i ka palekana a me ka hoʻokō ʻana i ke kaiapuni.

Paʻa-Hoʻohui Paʻa (CCS) Hoʻonohonoho:

I loko o nā reactors MOCVD kūpaʻa, hiki i ka hoʻolālā CCS ke hoʻokuʻi like ʻia i nā kinoea ma o nā nozzles ʻē aʻe i loko o kahi hale ʻauʻau. Hoʻemi kēia i nā hopena mua a hoʻonui i ka hui pū ʻana.

• ʻO kagraphite susceptore kōkua hou i ka homogenize i ka papa palena o nā kinoea, e hoʻomaikaʻi i ka like ʻana o ke kiʻiʻoniʻoni ma waena o ka wafer.

2. Mākēneki Sputtering

ʻO ka Magnetron sputtering kahi ʻano hoʻoheheʻe kino kino (PVD) i hoʻohana nui ʻia no ka waiho ʻana i nā kiʻiʻoniʻoni ʻoniʻoni a me nā uhi, ʻo ia hoʻi i nā mea uila, optics, a me nā seramika.

Kuʻuna Hana:

1. Mea Pahuhi
   ʻO ke kumu kumu e waiho ai—metala, oxide, nitride, etc—ua paʻa i ka cathode.

2. Keena Momi
   Hana ʻia ke kaʻina hana ma lalo o ka ʻūhā kiʻekiʻe e pale aku i ka hoʻohaumia ʻana.

3. Hoʻoulu ʻana i ka plasma
   Hoʻopili ʻia ke kinoea inert, ʻo ka argon maʻamau, e hana i ka plasma.

4. Ka hoʻohana ʻana i ke kahua mākēneki
   Hoʻopaʻa ke kahua magnetic i nā electrons kokoke i ka pahuhopu e hoʻonui i ka pono o ka ionization.

5. Kaʻina Sputtering
   Pahū nā Ion i ka pahu hopu, wehe i nā ʻātoma e hele ana i loko o ke keʻena a waiho ma luna o ka substrate.

Nā pōmaikaʻi o ka Magnetron Sputtering:

• Waihona Kiʻiʻoniʻoni Kaulikema nā wahi nui.

• Hiki ke hoʻopaʻa i nā hui paʻakikī, me nā huila a me nā seramika.

• Nā ʻāpana kaʻina hana kanino ka mana pololei o ka mānoanoa, haku mele, a me ka microstructure.

• Kiʻiʻoniʻoni Kiʻekiʻeme ka adhesion ikaika a me ka ikaika mechanical.

• Pākuʻi Mea Nui, mai nā metala i nā oxides a me nā nitrides.

• Hana Haʻahaʻa Haʻahaʻa, kūpono no nā substrate pili i ka wela.

3. ʻO ka hoʻopaʻa ʻana o ka mahu kemika i hoʻonui ʻia i ka plasma (PECVD)

Hoʻohana nui ʻia ʻo PECVD no ka waiho ʻana i nā kiʻiʻoniʻoni lahilahi e like me ke silicon nitride (SiNx), silicon dioxide (SiO₂), a me ka silika amorphous.

Kumu:

I loko o kahi ʻōnaehana PECVD, hoʻokomo ʻia nā kinoea precursor i loko o kahi keʻena momi kahi aplasma hoʻokuʻu ʻanahana ʻia me ka hoʻohana ʻana i:

• RF hauʻoli

• DC uila uila

• Microwave a i ʻole nā ​​kumu pulsed

Hoʻoikaika ka plasma i nā hopena o ka gas-phase, e hana ana i nā ʻano reactive e waiho ana ma ka substrate e hana i kahi kiʻiʻoniʻoni lahilahi.

Nā ʻanuʻu Deposition:

1. Hoʻokumu Plasma
   Hoʻoliʻoli ʻia e nā māla electromagnetic, hoʻoheheʻe ʻia nā kinoea precursor e hana i nā radical reactive a me nā ion.

2. Pane a me ka lawe ʻana
   Loaʻa kēia mau ʻano i nā hopena lua ke neʻe lākou i ka substrate.

3. Pane ʻili
   I ka hiki ʻana i ka substrate, hoʻopili lākou, hana a hana i kahi kiʻiʻoniʻoni paʻa. Hoʻokuʻu ʻia kekahi mau huahana e like me ke kinoea.

Nā Pōmaikaʻi PECVD:

• Hoʻolikelike maikaʻi loai ka haku mele a me ka mānoanoa.

• Hoʻopili ikaikaʻoiai ma nā mahana waiho haʻahaʻa haʻahaʻa.

• Uku Kiekie Deposition, kūpono ia no ka hana ʻenehana.

4. Nā ʻenehana hōʻike kiʻiʻoniʻoni lahilahi

ʻO ka hoʻomaopopo ʻana i nā waiwai o nā kiʻiʻoniʻoni lahilahi he mea nui ia no ka mālama ʻana i ka maikaʻi. Aia nā ʻenehana maʻamau:

(1) Hōʻikeʻike X-ray (XRD)

• Ke kumu: E noʻonoʻo i nā hale aniani, nā lattice mau, a me nā kuhikuhi.

• Kumukānāwai: Ma muli o ke Kānāwai a Bragg, e ana i ka ʻokoʻa ʻana o nā hihi X ma o kekahi mea crystalline.

• Nā noi: Crystallography, ka nānā ʻana i ka māhele, ke ana ʻana, a me ka loiloi kiʻiʻoniʻoni lahilahi.

(2) Ke nānā 'ana i ka Electron Microscopy (SEM)

• Ke kumu: E nānā i ka morphology a me ka microstructure.

• Kumukānāwai: Hoʻohana i ke kukui uila e nānā i ka ʻili o ka hāpana. Hōʻike nā hōʻailona i ʻike ʻia (e laʻa, nā electrons lua a me backscattered) i nā kikoʻī o ka ʻili.

• Nā noi: ʻepekema waiwai, nanotech, biology, a me ka nānā ʻana i ka hāʻule.

3

• Ke kumu: Nā ʻili kiʻi ma ka hoʻonā atomic a i ʻole nanometer.

• Kumukānāwai: Ke nānā nei ka ʻimi ʻoi i ka ʻili me ka mālama mau ʻana i ka ikaika pili; ʻO ka hoʻoneʻe ʻana i ke kūpaʻa e hoʻopuka i kahi topography 3D.

• Nā noi: Ka noiʻi Nanostructure, ana ʻinoʻino o ka ʻili, nā haʻawina biomolecular.