Nā Mea Maka Koʻikoʻi no ka Hana ʻana o Semiconductor: Nā ʻAno o nā Substrates Wafer

ʻO nā Substrates Wafer ma ke ʻano he mau mea koʻikoʻi i nā hāmeʻa Semiconductor

ʻO nā substrates wafer nā mea lawe kino o nā mea semiconductor, a ʻo kā lākou mau waiwai mea e hoʻoholo pololei i ka hana o ka mea hana, ke kumukūʻai, a me nā kahua noi. Aia ma lalo nā ʻano nui o nā substrates wafer me ko lākou mau pono a me nā hemahema:

1.Silika (Si)

• Māhele Kūʻai:ʻOi aku ma mua o 95% o ka mākeke semiconductor honua.

• Nā Pōmaikaʻi:

  • Kumukūʻai haʻahaʻa:Nui nā mea maka (silicon dioxide), nā kaʻina hana makua, a me nā hoʻokele waiwai ikaika o ka unahi.

  • Hoʻohālikelike kiʻekiʻe o ke kaʻina hana:He ʻelemakule loa ka ʻenehana CMOS, e kākoʻo ana i nā kikowaena holomua (e laʻa, 3nm).

  • ʻAno kristal maikaʻi loa:Hiki ke ulu ʻia nā wafers nui ke anawaena (ʻo ka hapa nui he 12-ʻīniha, 18-ʻīniha ke hoʻomohala ʻia nei) me ka nui o nā kīnā haʻahaʻa.

  • Nā waiwai mechanical paʻa:Maʻalahi e ʻoki, poli, a lawelawe.

• Nā hemahema:

  • Ka hakahaka bandgap haiki (1.12 eV):Ke kahe ʻana o ke au i nā mahana kiʻekiʻe, e kaupalena ana i ka pono o ka hāmeʻa mana.

  • Ka ʻāpana bandgap ʻaʻole pololei:Haʻahaʻa loa ka hoʻokuʻu ʻana o ke kukui, ʻaʻole kūpono no nā mea optoelectronic e like me nā LED a me nā lasers.

  • Ka neʻe ʻana o ka electron i kaupalena ʻia:Hana alapine kiʻekiʻe haʻahaʻa i hoʻohālikelike ʻia me nā semiconductors hui.
    

2.ʻAseniuma ʻAsenaida (GaAs)

• Nā noi:Nā hāmeʻa RF alapine kiʻekiʻe (5G/6G), nā hāmeʻa optoelectronic (laser, cell solar).

• Nā Pōmaikaʻi:

  • Ka neʻe ʻana o nā electrons kiʻekiʻe (5–6× o ke silicon):Kūpono no nā noi wikiwiki kiʻekiʻe, alapine (frequency) kiʻekiʻe e like me ke kamaʻilio ʻana o ka nalu millimeter.

  • Ka hakahaka bandage pololei (1.42 eV):ʻO ka hoʻololi photoelectric kiʻekiʻe-kūpono, ke kumu o nā lasers infrared a me nā LED.

  • Ke kū'ē ʻana i ka mahana kiʻekiʻe a me ka radiation:He kūpono no nā ʻano aerospace a me nā ʻano ʻino.

• Nā hemahema:

  • Kumukūʻai kiʻekiʻe:Kakaikahi ka mea, paʻakikī ka ulu ʻana o ke kristal (hiki ke neʻe koke), palena ka nui o ka wafer (ʻo 6-ʻīniha ka nui).

  • Nā mīkini palupalu:Maʻalahi i ka haki, e hopena ana i ka haʻahaʻa o ka hana ʻana.

  • ʻAkika:Pono ka Arsenic i ka lawelawe koʻikoʻi a me nā kaohi o ke kaiapuni.

3. ʻO ke kalapona silika (SiC)

• Nā noi:Nā mana uila wela kiʻekiʻe a me ke kiʻekiʻe (nā mea hoʻohuli EV, nā kikowaena hoʻouka), aerospace.

• Nā Pōmaikaʻi:

  • Ka laulā ākea (3.26 eV):Ikaika haki kiʻekiʻe (10× o ka silicon), hoʻomanawanui wela kiʻekiʻe (mahana hana >200 °C).

  • Ke alakaʻi wela kiʻekiʻe (≈3 × silicon):Hoʻopuehu wela maikaʻi loa, e hiki ai ke hoʻonui i ka mana o ka ʻōnaehana.

  • Pohō hoʻololi haʻahaʻa:Hoʻomaikaʻi i ka pono o ka hoʻololi mana.

• Nā hemahema:

  • Ka hoʻomākaukau ʻana i ka substrate paʻakikī:Ka ulu lohi ʻana o ke kristal (>1 pule), ka paʻakikī o ka kaohi ʻana i nā hemahema (nā micropipe, nā dislocations), ke kumukūʻai kiʻekiʻe loa (5–10× silicon).

  • Ka nui o ka wafer liʻiliʻi:ʻO ke kumu, he 4–6 ʻīniha; 8 ʻīniha ke hoʻomohala ʻia nei.

  • Paʻakikī ke kaʻina hana:Paʻakikī loa (Mohs 9.5), e hoʻopau ai i ka manawa no ka ʻoki ʻana a me ka wili ʻana.

4. ʻO Gallium Nitride (GaN)

• Nā noi:Nā mea hana mana alapine kiʻekiʻe (hoʻouka wikiwiki, nā kikowaena kahua 5G), nā LED/laser polū.

• Nā Pōmaikaʻi:

  • Ka neʻe ʻana o ka electron kiʻekiʻe loa + ka bandgap ākea (3.4 eV):Hoʻohui i ka hana alapine kiʻekiʻe (>100 GHz) a me ke voltage kiʻekiʻe.

  • Haʻahaʻa ke kū'ē:Hoʻemi i ka pohō mana o ka hāmeʻa.

  • Hoʻohālikelike ʻia me ka Heteroepitaxy:Hoʻoulu pinepine ʻia ma luna o nā mea silicon, sapeiro, a i ʻole SiC, e hoʻemi ana i ke kumukūʻai.

• Nā hemahema:

  • Paʻakikī ka ulu ʻana o ka kristal hoʻokahi nui:He mea maʻamau ka Heteroepitaxy, akā hoʻolauna ka lattice mismatch i nā hemahema.

  • Kumukūʻai kiʻekiʻe:He pipiʻi loa nā substrates GaN maoli (hiki ke kumukūʻai i kahi wafer 2-'īniha i kekahi mau tausani USD).

  • Nā pilikia hilinaʻi:Pono ka hoʻonui ʻana i nā mea e like me ka hiolo ʻana o kēia manawa.

5. ʻO Indium Phosphide (InP)

• Nā noi:Nā kamaʻilio optical wikiwiki (nā lasers, nā photodetectors), nā hāmeʻa terahertz.

• Nā Pōmaikaʻi:

  • Ka neʻe ʻana o ka uila kiʻekiʻe loa:Kākoʻo i ka hana >100 GHz, e ʻoi aku ka maikaʻi ma mua o nā GaAs.

  • Ka bandgap pololei me ka hoʻohālikelike ʻana o ka nalu:Mea kumu no ke kamaʻilio ʻana o ka fiber optical 1.3–1.55 μm.

• Nā hemahema:

  • Pālahalaha a pipiʻi loa:ʻOi aku ke kumukūʻai o ka substrate ma mua o 100 × silicon, palena nā nui wafer (4-6 ʻīniha).

6. Sapeiro (Al₂O₃)

• Nā noi:Kukui LED (GaN epitaxial substrate), aniani uhi uila mea kūʻai.

• Nā Pōmaikaʻi:

  • Kumukūʻai haʻahaʻa:ʻOi aku ka haʻahaʻa ma mua o nā substrates SiC/GaN.

  • Paʻa kemika maikaʻi loa:Kūpaʻa i ka palaho, hoʻokaʻawale nui.

  • Ka moakāka:He kūpono no nā ʻano LED kū pololei.

• Nā hemahema:

  • ʻAʻole kūlike ka lattice nui me GaN (>13%):Hoʻokumu i ka nui o nā kīnā, e koi ana i nā papa buffer.

  • ʻO ke alakaʻi wela haʻahaʻa (~1/20 o ka silicon):Hoʻemi i ka hana o nā LED mana kiʻekiʻe.

7. Nā Papahana Keramika (AlN, BeO, a pēlā aku)

• Nā noi:Nā mea hohola wela no nā modula mana kiʻekiʻe.

• Nā Pōmaikaʻi:

  • Hoʻokaʻawale + alakaʻi wela kiʻekiʻe (AlN: 170–230 W/m·K):Kūpono no ka ʻōpala paʻapū kiʻekiʻe.

• Nā hemahema:

  • ʻAʻole kristal hoʻokahi:ʻAʻole hiki ke kākoʻo pololei i ka ulu ʻana o ka hāmeʻa, hoʻohana wale ʻia ma ke ʻano he mau mea hoʻopili.

8. Nā Substrates Kūikawā

• SOI (Silicon ma luna o ka Insulator):

  • ʻAno:Sāniwika Silika/SiO₂/silika.

  • Nā Pōmaikaʻi:Hoʻemi i ka capacitance parasitic, radiation-hardened, leakage suppression (hoʻohana ʻia ma RF, MEMS).

  • Nā hemahema:30–50% ʻoi aku ke kumukūʻai ma mua o ka silicon nui.

• Kuasa (SiO₂):Hoʻohana ʻia i nā photomasks a me MEMS; kūpaʻa i ka mahana kiʻekiʻe akā palupalu loa.

• Daimana:ʻO ke kumu hoʻoili wela kiʻekiʻe loa (>2000 W/m·K), ma lalo o R&D no ka hoʻopuehu wela nui loa.

Papa Hōʻuluʻulu Manaʻo Hoʻohālikelike

Nā Kumu Koʻikoʻi no ke Koho ʻana i ka Substrate

• Nā koi hana:ʻO GaAs/InP no ke alapine kiʻekiʻe; ʻO SiC no ke anakahi uila kiʻekiʻe, mahana kiʻekiʻe; ʻO GaAs/InP/GaN no ka optoelectronics.

• Nā palena kumukūʻai:Makemake nā mea uila mea kūʻai aku i ka silicon; hiki i nā kahua kiʻekiʻe ke hoʻāpono i nā uku SiC/GaN.

• Paʻakikī o ka hoʻohui ʻana:ʻAʻole hiki ke hoʻololi ʻia ʻo Silicon no ka launa pū ʻana o CMOS.

• Hoʻokele wela:Makemake nā polokalamu mana kiʻekiʻe iā SiC a i ʻole GaN i hoʻokumu ʻia i ka daimana.

• Ka oʻo ʻana o ke kaulahao lako:Si > Sapphire > GaAs > SiC > GaN > InP.

ʻAno Hou

E kaulike ka hoʻohui ʻana o nā ʻano like ʻole (e laʻa, GaN-on-Si, GaN-on-SiC) i ka hana a me ke kumukūʻai, e hoʻokele ana i nā holomua ma 5G, nā kaʻa uila, a me ka helu quantum.