Pōkole:Ua hoʻomohala mākou i kahi waveguide lithium tantalate i hoʻokumu ʻia i ka insulator 1550 nm me ka pohō o 0.28 dB/cm a me kahi kumu maikaʻi resonator apo o 1.1 miliona. Ua aʻo ʻia ka hoʻohana ʻana o ka χ(3) nonlinearity i nā photonics nonlinear. ʻO nā pono o ka lithium niobate ma ka insulator (LNoI), kahi e hōʻike ana i nā waiwai nonlinear χ(2) a me χ(3) maikaʻi loa me ka hoʻopaʻa optical ikaika ma muli o kona ʻano "insulator-on", ua alakaʻi i nā holomua koʻikoʻi i ka ʻenehana waveguide no nā modulators ultrafast a me nā photonics nonlinear i hoʻohui ʻia [1-3]. Ma waho aʻe o LN, ua noiʻi ʻia hoʻi ka lithium tantalate (LT) ma ke ʻano he mea photonic nonlinear. Ke hoʻohālikelike ʻia me LN, ʻoi aku ka kiʻekiʻe o ka paepae hōʻino optical o LT a me ka puka makani transparency optical ākea [4, 5], ʻoiai ʻo kāna mau ʻāpana optical, e like me ka refractive index a me nā coefficients nonlinear, ua like ia me nā mea o LN [6, 7]. No laila, kū ʻo LToI ma ke ʻano he mea moho ikaika ʻē aʻe no nā noi photonic nonlinear mana optical kiʻekiʻe. Eia kekahi, ke lilo nei ʻo LToI i mea mua no nā mea kānana nalu acoustic surface (SAW), e pili ana i nā ʻenehana kelepona wikiwiki a me nā ʻenehana uea ʻole. Ma kēia ʻano, hiki i nā wafers LToI ke lilo i mea maʻamau no nā noi photonic. Eia nō naʻe, a hiki i kēia lā, ua hōʻike ʻia kekahi mau mea photonic e pili ana iā LToI, e like me nā resonators microdisk [8] a me nā mea hoʻololi pae electro-optic [9]. Ma kēia pepa, hōʻike mākou i kahi waveguide LToI haʻahaʻa-pohō a me kāna noi i loko o kahi resonator apo. Eia kekahi, hāʻawi mākou i nā ʻano nonlinear χ(3) o ka waveguide LToI.
Nā Manaʻo Koʻikoʻi:
• Ke hāʻawi nei i nā wafers LToI 4-'īniha a i 6-'īniha, nā wafers lithium tantalate lahilahi-ʻili, me nā mānoanoa o ka papa luna mai 100 nm a 1500 nm, me ka hoʻohana ʻana i ka ʻenehana kūloko a me nā kaʻina hana oʻo.
• SINOI: Nā wafer ʻili lahilahi silicon nitride pohō haʻahaʻa loa.
• SICOI: Nā substrates ʻili lahilahi semi-insulating silicon carbide kiʻekiʻe-maʻemaʻe no nā kaapuni hoʻohui photonic silicon carbide.
• LTOI: He mea hoʻokūkū ikaika i ka lithium niobate, nā wafers lithium tantalate ʻili lahilahi.
• LNOI: LNOI 8-'īniha e kākoʻo ana i ka hana nui ʻana o nā huahana lithium niobate ʻili lahilahi nui aʻe.
Hana ʻana ma nā Waveguides Insulator:Ma kēia haʻawina, ua hoʻohana mākou i nā wafers LToI 4-'īniha. ʻO ka papa LT luna he substrate LT ʻoki Y i hoʻohuli ʻia he 42° no nā mea SAW, kahi i hoʻopaʻa pololei ʻia i kahi substrate Si me kahi papa oxide thermal mānoanoa 3 µm, e hoʻohana ana i kahi kaʻina hana ʻoki akamai. Hōʻike ka Kiʻi 1(a) i kahi hiʻohiʻona luna o ka wafer LToI, me ka mānoanoa o ka papa LT luna he 200 nm. Ua loiloi mākou i ka ʻili o ka papa LT luna me ka hoʻohana ʻana i ka microscopy ikaika atomika (AFM).
Kiʻi 1.(a) ʻIke luna o ka wafer LToI, (b) Kiʻi AFM o ka ʻili o ka papa LT luna, (c) Kiʻi PFM o ka ʻili o ka papa LT luna, (d) ʻĀpana keʻa schematic o ka waveguide LToI, (e) ʻIke kumu TE i helu ʻia, a me (f) Kiʻi SEM o ke kumu waveguide LToI ma mua o ka waiho ʻana o ka SiO2 overlayer. E like me ka mea i hōʻike ʻia ma ke Kiʻi 1 (b), ʻoi aku ka liʻiliʻi o ka ʻili ma mua o 1 nm, a ʻaʻohe laina ʻōpala i ʻike ʻia. Eia kekahi, ua nānā mākou i ke kūlana polarization o ka papa LT luna me ka hoʻohana ʻana i ka piezoelectric response force microscopy (PFM), e like me ka mea i hōʻike ʻia ma ke Kiʻi 1 (c). Ua hōʻoia mākou ua mālama ʻia ka polarization like ma hope o ke kaʻina hana hoʻopili.
Ma ka hoʻohana ʻana i kēia substrate LToI, ua hana mākou i ke alakaʻi nalu penei. ʻO ka mua, ua waiho ʻia kahi papa uhi metala no ka etching maloʻo o ka LT. A laila, ua hana ʻia ka lithography electron beam (EB) e wehewehe i ke ʻano kumu waveguide ma luna o ka papa uhi metala. A laila, ua hoʻoili mākou i ke ʻano kū'ē EB i ka papa uhi metala ma o ka etching maloʻo. Ma hope iho, ua hoʻokumu ʻia ke kumu waveguide LToI me ka hoʻohana ʻana i ka etching plasma electron cyclotron resonance (ECR). ʻO ka hope, ua wehe ʻia ka papa uhi metala ma o kahi kaʻina hana pulu, a ua waiho ʻia kahi SiO2 overlay me ka hoʻohana ʻana i ka plasma-enhanced chemical vapor deposition. Hōʻike ka Kiʻi 1 (d) i ka ʻāpana keʻa o ka waveguide LToI. ʻO ke kiʻekiʻe kumu holoʻokoʻa, ke kiʻekiʻe o ka pā, a me ka laulā o ke kumu he 200 nm, 100 nm, a me 1000 nm, kēlā me kēia. E hoʻomaopopo e hoʻonui ka laulā o ke kumu i 3 µm ma ka lihi waveguide no ka hoʻopili ʻana o ka fiber optical.
Hōʻike ka Kiʻi 1 (e) i ka hoʻolaha ʻana o ka ikaika optical i helu ʻia o ke ʻano uila transverse kumu (TE) ma 1550 nm. Hōʻike ka Kiʻi 1 (f) i ke kiʻi microscope electron scanning (SEM) o ke kumu waveguide LToI ma mua o ka waiho ʻana o ka SiO2 overlayer.
Nā ʻano o ke alakaʻi nalu:Ua loiloi mua mākou i nā ʻano pohō linear ma ka hoʻokomo ʻana i ka mālamalama TE-polarized mai kahi kumu hoʻokuʻu kūlohelohe i hoʻonui ʻia i ka nalu 1550 nm i loko o nā waveguides LToI o nā lōʻihi like ʻole. Ua loaʻa ka pohō hoʻolaha mai ka pali o ka pilina ma waena o ka lōʻihi o ka waveguide a me ka hoʻouna ʻana ma kēlā me kēia nalu. ʻO nā pohō hoʻolaha i ana ʻia he 0.32, 0.28, a me 0.26 dB/cm ma 1530, 1550, a me 1570 nm, e like me ka mea i hōʻike ʻia ma ke Kiʻi 2 (a). Ua hōʻike nā waveguides LToI i hana ʻia i ka hana haʻahaʻa haʻahaʻa like me nā waveguides LNoI state-of-the-art [10].
ʻO ka mea aʻe, ua loiloi mākou i ka nonlinearity χ(3) ma o ka hoʻololi ʻana o ka nalu i hana ʻia e kahi kaʻina hana hoʻohuihui ʻehā nalu. Hoʻokomo mākou i kahi kukui pamu nalu hoʻomau ma 1550.0 nm a me kahi kukui hōʻailona ma 1550.6 nm i loko o kahi alakaʻi nalu 12 mm ka lōʻihi. E like me ka mea i hōʻike ʻia ma ke Kiʻi 2 (b), ua hoʻonui ʻia ka ikaika o ka hōʻailona nalu māmā phase-conjugate (idler) me ka hoʻonui ʻana i ka mana hoʻokomo. Hōʻike ka inset ma ke Kiʻi 2 (b) i ka spectrum output maʻamau o ka hoʻohuihui ʻana o nā nalu ʻehā. Mai ka pilina ma waena o ka mana hoʻokomo a me ka pono o ka hoʻololi ʻana, ua manaʻo mākou i ka parameter nonlinear (γ) ma kahi o 11 W^-1m.
Kiʻi 3.(a) Kiʻi microscope o ka resonator apo i hana ʻia. (b) Nā spectra hoʻoili o ka resonator apo me nā ʻano hakahaka like ʻole. (c) ʻO ke ana ʻana a me ka spectrum hoʻoili Lorentzian o ka resonator apo me kahi hakahaka o 1000 nm.
ʻO ka mea aʻe, ua hana mākou i kahi resonator apo LToI a loiloi i kona mau ʻano. Hōʻike ka Kiʻi 3 (a) i ke kiʻi microscope optical o ka resonator apo i hana ʻia. Hōʻike ka resonator apo i kahi hoʻonohonoho "racetrack", nona kahi ʻāpana piʻo me ka radius o 100 µm a me kahi ʻāpana pololei o 100 µm ka lōʻihi. ʻOkoʻa ka laulā o ka hakahaka ma waena o ke apo a me ke kumu waveguide bus ma nā ʻāpana o 200 nm, ʻoi aku hoʻi ma 800, 1000, a me 1200 nm. Hōʻike ka Kiʻi 3 (b) i nā spectra hoʻoili no kēlā me kēia hakahaka, e hōʻike ana e loli ka lakio extinction me ka nui o ka hakahaka. Mai kēia mau spectra, ua hoʻoholo mākou e hāʻawi ka hakahaka 1000 nm i nā kūlana hoʻopili koʻikoʻi, ʻoiai e hōʻike ana i ka lakio extinction kiʻekiʻe loa o -26 dB.
Ma ka hoʻohana ʻana i ka resonator i hoʻopili koʻikoʻi ʻia, ua kuhi mākou i ka mea maikaʻi (Q factor) ma ke kau ʻana i ka spectrum hoʻoili linear me kahi piʻo Lorentzian, e loaʻa ana kahi Q factor kūloko o 1.1 miliona, e like me ka mea i hōʻike ʻia ma ke Kiʻi 3 (c). I ko mākou ʻike, ʻo kēia ka hōʻike mua o kahi resonator apo LToI i hoʻopili ʻia e ka waveguide. ʻIke ʻia, ʻoi aku ka kiʻekiʻe o ka waiwai Q factor a mākou i loaʻa ai ma mua o nā resonators microdisk LToI i hoʻopili ʻia e ka fiber [9].
Hopena:Ua hoʻomohala mākou i kahi alakaʻi nalu LToI me ka pohō o 0.28 dB/cm ma 1550 nm a me kahi kumu Q resonator apo o 1.1 miliona. Ua like ka hana i loaʻa me nā alakaʻi nalu LNoI haʻahaʻa-pohō hou loa. Eia kekahi, ua noiʻi mākou i ka nonlinearity χ(3) o ka alakaʻi nalu LToI i hana ʻia no nā noi nonlinear ma ka chip.
Ka manawa hoʻouna: Nowemapa-20-2024