Puhi:Ua hoʻomohala mākou i ka 1550 nm insulator-based lithium tantalate waveguide me ka nalowale o 0.28 dB/cm a me kahi kumu hoʻohālike o ka resonator ring o 1.1 miliona. Ua aʻo ʻia ka hoʻohana ʻana o χ(3) nonlinearity i nā photonics nonlinear. ʻO nā mea maikaʻi o ka lithium niobate ma ka insulator (LNoI), e hōʻike ana i ka maikaʻi χ(2) a me χ(3) mau waiwai nonlinear me ka hoʻopaʻa optical ikaika ma muli o kāna ʻano "insulator-on", ua alakaʻi i ka holomua nui i ka ʻenehana alakaʻi nalu no ka ultrafast. modulators a me nā kiʻi kiʻi nonlinear i hoʻohui ʻia [1-3]. Ma waho aʻe o LN, ua noiʻi ʻia ka lithium tantalate (LT) ma ke ʻano he mea photonic nonlinear. Hoʻohālikelike ʻia me LN, ʻoi aku ka kiʻekiʻe o ka paepae hōʻino optical a me ka puka aniani ākea ākea [4, 5], ʻoiai ʻo kona mau hiʻohiʻona optical, e like me ka refractive index a me nā coefficients nonlinear, ua like ia me ka LN [6, 7]. No laila, ke kū nei ʻo LToI ma ke ʻano he mea moho ikaika no nā noi kiʻi kiʻekiʻe optical mana nonlinear photonic. Eia kekahi, ke lilo nei ʻo LToI i mea kumu mua no nā mea kānana hawewe acoustic surface (SAW), pili i nā ʻenehana kelepona a me nā ʻenehana uila. Ma kēia pōʻaiapili, hiki ke lilo nā wafers LToI i mau mea maʻamau no nā noi photonic. Eia naʻe, i kēia lā, ua hōʻike ʻia he mau mea photonic wale nō e pili ana i ka LToI, e like me nā microdisk resonators [8] a me nā electro-optic phase shifters [9]. Ma kēia pepa, hōʻike mākou i kahi alakaʻi nalu LToI haʻahaʻa a me kāna noi ʻana i kahi resonator apo. Eia hou, hāʻawi mākou i nā hiʻohiʻona χ(3) nonlinear o ke alakaʻi nalu LToI.
Nā mea nui:
• Ke hāʻawi nei i nā wafers LToI 4-inch a hiki i ka 6-inch, nā wafers lithium tantalate kiʻiʻoniʻoni lahilahi, me ka mānoanoa o ka papa luna mai ka 100 nm a 1500 nm, me ka hoʻohana ʻana i ka ʻenehana kūloko a me nā kaʻina hana makua.
• SINOI: ʻO nā wafers kiʻiʻoniʻoni ʻoniʻoni liʻiliʻi loa.
• SICOI: Kiʻekiʻe-maʻemaʻe semi-insulating silicon carbide kiʻiʻoniʻoni ʻoniʻoni no nā kaapuni kiʻi kiʻi kiʻi kiʻekiʻe.
• LTOI: He mea hoʻokūkū ikaika i ka lithium niobate, nā wafers lithium tantalate kiʻiʻoniʻoni lahilahi.
• LNOI: 8-inch LNOI e kākoʻo ana i ka hana nui o nā huahana lithium niobate kiʻi lahilahi nui.
Hana ʻia ma nā alakaʻi nalu insulator:Ma kēia noiʻi ʻana, ua hoʻohana mākou i nā wafers LToI 4 iniha. ʻO ka papa luna LT kahi pāpaʻi pāʻoihana 42 ° rotated Y-cut LT substrate no nā mea SAW, i hoʻopaʻa pololei ʻia i kahi substrate Si me kahi ʻāpana thermal oxide 3 µm mānoanoa, e hoʻohana ana i kahi kaʻina ʻoki akamai. Hōʻike ka Kiʻi 1 (a) i kahi ʻike kiʻekiʻe o ka wafer LToI, me ka mānoanoa o ka papa LT luna o 200 nm. Ua loiloi mākou i ka ʻili o ka ʻili o ka papa luna LT me ka hoʻohana ʻana i ka microscopy atomic force (AFM).
Helu 1.(a) Nānā kiʻekiʻe o ka wafer LToI, (b) Kiʻi AFM o ka ʻili o ka papa LT luna, (c) kiʻi PFM o ka ʻili o ka papa LT luna, (d) ʻO ka ʻaoʻao schematic o ke alakaʻi nalu LToI, (e) Ka helu ʻana i ka moʻo kikoʻī TE mode kumu, a me (f) kiʻi SEM o ke kumu alakaʻi nalu LToI ma mua o ka waiho ʻana o SiO2 overlayer. E like me ka mea i hōʻike ʻia ma ke Kiʻi 1 (b), ʻoi aku ka liʻiliʻi o ka ʻili ma lalo o 1 nm, ʻaʻole i ʻike ʻia nā laina ʻōpala. Eia kekahi, ua nānā mākou i ke kūlana polarization o ka papa LT kiʻekiʻe e hoʻohana ana i ka microscopy pane piezoelectric pane (PFM), e like me ka mea i hōʻike ʻia ma ke Kiʻi 1 (c). Ua hōʻoia mākou ua mālama ʻia ka polarization like ʻole ma hope o ke kaʻina hana paʻa.
Me ka hoʻohana ʻana i kēia substrate LToI, ua hana mākou i ke alakaʻi nalu e like me kēia. ʻO ka mea mua, ua waiho ʻia kahi papa mask metala no ka etching maloʻo hope o ka LT. A laila, hana ʻia ka lithography electron beam (EB) no ka wehewehe ʻana i ke ʻano kumu alakaʻi nalu ma luna o ka papa huna metala. Ma hope aʻe, ua hoʻololi mākou i ke kumu kū'ē EB i ka papa mask metala ma o ka etching maloʻo. Ma hope iho, ua hoʻokumu ʻia ke kumu nalu LToI me ka hoʻohana ʻana i ka electron cyclotron resonance (ECR) plasma etching. ʻO ka hope, ua hoʻoneʻe ʻia ka papa mask metala ma kahi kaʻina wai, a ua waiho ʻia kahi overlayer SiO2 me ka hoʻohana ʻana i ka hoʻoheheʻe ʻana i ka mahu kemika i hoʻonui ʻia i ka plasma. Hōʻike ka kiʻi 1 (d) i ka ʻāpana keʻa o ka hawewe LToI. ʻO ka nui o ke kiʻekiʻe kumu, ke kiʻekiʻe o ka pā, a me ka laula kumu he 200 nm, 100 nm, a me 1000 nm. E hoʻomaopopo i ka hoʻonui ʻana o ka laula kumu i 3 µm ma ka ʻaoʻao alakaʻi nalu no ka hoʻopili ʻana i ka fiber optical.
Hōʻike ka Kiʻi 1 (e) i ka puʻunaue ʻana i ka ikaika opipika i helu ʻia o ka mode transverse electric (TE) ma 1550 nm. Hōʻike ka Figure 1 (f) i ke kiʻi scanning electron microscope (SEM) o ke kumu alakaʻi hawewe LToI ma mua o ka waiho ʻana o ka SiO2 overlayer.
Nā ʻano alakaʻi nalu:Ua loiloi mua mākou i nā hiʻohiʻona pohō laina ma o ka hoʻokomo ʻana i ke kukui TE-polarized mai kahi hawewe 1550 nm i hoʻonui ʻia i ke kumu hoʻokuʻu ʻole i loko o nā alakaʻi nalu LToI o nā lōʻihi like ʻole. Loaʻa ka poho hoʻolaha mai ka pali o ka pilina ma waena o ka lōʻihi o ka nalu a me ka lawe ʻana i kēlā me kēia nalu. ʻO nā poho hoʻolaha i ana ʻia he 0.32, 0.28, a me 0.26 dB/cm ma 1530, 1550, a me 1570 nm, e like me ka mea i hōʻike ʻia ma ke Kiʻi 2 (a). Ua hōʻike ʻia nā alakaʻi nalu LToI i hana ʻia i ka hana haʻahaʻa haʻahaʻa haʻahaʻa i nā alakaʻi nalu LNoI hou loa [10].
Ma hope aʻe, ua loiloi mākou i ka χ(3) nonlinearity ma o ka hoʻololi ʻana o ka nalu i hana ʻia e kahi kaʻina hui ʻehā hawewe. Hoʻokomo mākou i kahi kukui pahū nalu mau ma 1550.0 nm a me kahi kukui hōʻailona ma 1550.6 nm i kahi alakaʻi nalu lōʻihi 12 mm. E like me ka mea i hōʻike ʻia ma ke Kiʻi 2 (b), ua hoʻonui ʻia ka ikaika o ka hōʻailona hawewe māmā o ka phase-conjugate (idler) me ka hoʻonui ʻana i ka mana hoʻokomo. Hōʻike ka hoʻokomo ʻana ma ke Kiʻi 2 (b) i ke kikoʻī puka maʻamau o ka hui ʻana o nā nalu ʻehā. Mai ka pilina ma waena o ka mana hoʻokomo a me ka maikaʻi o ka hoʻololi ʻana, ua manaʻo mākou i ka palena laina ʻole (γ) ma kahi o 11 W^-1m.
Helu 3.(a) Kiʻi microscope o ka resonator apo i hana ʻia. (b) Transmission spectra o ke apo resonator me nā ʻāpana āpau. (c) Ana a me Lorentzian i hoʻokomo ʻia i ke kiko hoʻouna o ka resonator apo me kahi āpau o 1000 nm.
A laila, hana mākou i kahi LToI ring resonator a loiloi i kona ʻano. Hōʻike ka Figure 3 (a) i ke kiʻi microscope optical o ka resonator apo i hana ʻia. Hōʻike ʻia ka resonator ring i kahi hoʻonohonoho "racetrack", i loko o kahi ʻāpana curved me kahi radius o 100 µm a me kahi ʻāpana pololei o 100 µm ka lōʻihi. ʻO ka laulā ākea ma waena o ke apo a me ke kumu nalu alakaʻi kaʻa e ʻokoʻa i ka hoʻonui ʻana o 200 nm, kikoʻī ma 800, 1000, a me 1200 nm. Hōʻike ka Figure 3 (b) i ke kiko kikoʻī no kēlā me kēia āpau, e hōʻike ana i ka loli ʻana o ka lākiō hoʻopau me ka nui o ke āwaha. Mai kēia mau hiʻohiʻona, ua hoʻoholo mākou e hāʻawi ka 1000 nm gap i nā kūlana hoʻohui koʻikoʻi, ʻoiai e hōʻike ana i ka ratio extinction kiʻekiʻe loa o -26 dB.
Me ka hoʻohana ʻana i ka resonator hoʻopili koʻikoʻi, ua manaʻo mākou i ke kumu maikaʻi (Q factor) ma ka hoʻopili ʻana i ka spectrum transmission linear me kahi pihi Lorentzian, e loaʻa ai kahi helu Q kūloko o 1.1 miliona, e like me ka hōʻike ʻana ma ke Kiʻi 3 (c). I ko mākou ʻike, ʻo kēia ka hōʻike mua loa o kahi resonator ring LToI i hoʻohui ʻia i ka nalu. ʻO ka mea nui, ʻoi aku ka kiʻekiʻe o ka waiwai Q factor i loaʻa iā mākou ma mua o ka fiber-coupled LToI microdisk resonators [9].
Ka hopena:Ua hoʻomohala mākou i kahi alakaʻi hawewe LToI me ka nalowale o 0.28 dB/cm ma 1550 nm a me kahi helu Q resonator ring o 1.1 miliona. Hoʻohālikelike ka hana i loaʻa me nā alakaʻi haʻahaʻa haʻahaʻa LNoI. Eia hou, ua noiʻi mākou i ka χ(3) nonlinearity o ke alakaʻi nalu LToI i hana ʻia no nā noi nonlinear on-chip.
Ka manawa hoʻouna: Nov-20-2024