Ke puka mai nei nā mea liʻiliʻi kiʻiʻoniʻoni lithium tantalate (LTOI) ma ke ʻano he ikaika hou i loko o ke kahua optics integrated. I kēia makahiki, ua paʻi ʻia kekahi mau hana kiʻekiʻe ma luna o nā modulators LTOI, me nā wafers LTOI kiʻekiʻe i hāʻawi ʻia e Profesor Xin Ou mai ka Shanghai Institute of Microsystem and Information Technology, a me nā kaʻina hana etching waveguide kiʻekiʻe i hoʻomohala ʻia e ka hui o Professor Kippenberg ma EPFL , Kuikilana. Ua hōʻike ko lākou hoʻoikaika ʻana i nā hopena kupaianaha. Eia hou, ua hōʻike pū nā hui noiʻi mai Zhejiang University i alakaʻi ʻia e Professor Liu Liu a me Harvard University i alakaʻi ʻia e Professor Loncar i nā modulators LTOI kiʻekiʻe-wikiwiki.
Ma ke ʻano he pili pili o ka lithium niobate kiʻiʻoniʻoni lahilahi (LNOI), mālama ʻo LTOI i ka modulation kiʻekiʻe a me nā hiʻohiʻona haʻahaʻa o ka lithium niobate me ka hāʻawi pū ʻana i nā pono e like me ke kumu kūʻai haʻahaʻa, birefringence haʻahaʻa, a me nā hopena photorefractive hoʻemi. Hōʻike ʻia ma lalo nei kahi hoʻohālikelike o nā ʻano nui o nā mea ʻelua.
◆ Nā mea like ma waena o Lithium Tantalate (LTOI) a me Lithium Niobate (LNOI)
①Hōʻike Hōʻikeʻike:2.12 vs 2.21
ʻO kēia ka manaʻo o nā ana alakaʻi nalu o ke ʻano hoʻokahi, ka radius bending, a me ka nui o nā mīkini passive maʻamau e pili ana i nā mea ʻelua he like loa, a ua like pū kā lākou hana hoʻohui fiber. Me ka hawewe alakaʻi hawewe maikaʻi, hiki i nā mea ʻelua ke hoʻokō i kahi poho hoʻokomo<0.1 dB/cm. Hōʻike ʻo EPFL i kahi poho alakaʻi nalu o 5.6 dB/m.
②Electro-optic Coefficient:30.5 pm/V vs 30.9 pm/V
Hoʻohālikelike ka pono modulation no nā mea ʻelua, me ka modulation e pili ana i ka hopena Pockels, e ʻae ana i ka bandwidth kiʻekiʻe. I kēia manawa, hiki i nā modulators LTOI ke hoʻokō i ka hana 400G no kēlā me kēia alahele, me ka bandwidth ma mua o 110 GHz.
③Bandgap:3.93 eV vs 3.78 eV
He puka aniani ākea nā mea ʻelua, e kākoʻo ana i nā noi mai ka ʻike ʻia a hiki i nā lōʻihi nalu infrared, me ka ʻole o ka absorption i nā kaula kamaʻilio.
④Ka helu lua ole laina (d33):21 pm/V vs 27 pm/V
Inā hoʻohana ʻia no nā noi laina ʻole e like me ka lua o ka harmonic generation (SHG), ka ʻokoʻa-frequency generation (DFG), a i ʻole ka sum-frequency generation (SFG), pono e like ka hoʻololi ʻana o nā mea ʻelua.
◆ ʻO ke kumu kūʻai o LTOI vs LNOI
①Uku Hoomakaukau Wafer Haahaa
Pono ʻo LNOI i ka hoʻokomo ʻana i ka ion no ka hoʻokaʻawale ʻana o ka papa, kahi haʻahaʻa ionization pono. I ka hoʻokaʻawale ʻana, hoʻohana ʻo LTOI i ka implantation H ion no ka hoʻokaʻawale ʻana, e like me SOI, me ka maikaʻi o ka delamination ma luna o 10 mau manawa kiʻekiʻe ma mua o LNOI. Loaʻa kēia i kahi ʻokoʻa kumu kūʻai nui no nā wafers 6-inch: $ 300 vs. $ 2000, he 85% ka ho'ēmi kumu.
②Ua hoʻohana nui ʻia i ka mākeke uila uila no nā kānana acoustic(750,000 mau ʻāpana i kēlā me kēia makahiki, hoʻohana ʻia e Samsung, Apple, Sony, etc.).
◆ Nā Pono Hana o LTOI vs LNOI
①ʻOi aku ka liʻiliʻi o nā hemahema waiwai, ʻoi aku ka nāwaliwali o ka hopena Photorefractive, ʻoi aku ka paʻa
I ka hoʻomaka ʻana, hōʻike pinepine ʻia nā modulators LNOI i ka hoʻoheheʻe ʻana o ke kuhi, ma muli o ka hōʻiliʻili ʻana o ka uku i hoʻokumu ʻia e nā hemahema ma ka interface alakaʻi nalu. Inā ʻaʻole mālama ʻia, hiki i kēia mau mea hana ke hoʻopaʻa i hoʻokahi lā. Eia nō naʻe, ua hoʻomohala ʻia nā ʻano hana like ʻole e hoʻoponopono ai i kēia pilikia, e like me ka hoʻohana ʻana i ka pale ʻana o ka metala oxide, polarization substrate, a me ka annealing, e hiki ai ke hoʻoponopono i kēia pilikia i kēia manawa.
I ka hoʻokaʻawale ʻana, liʻiliʻi nā hemahema o ka LTOI, e alakaʻi ana i ka hōʻemi nui ʻana i nā ʻano ʻano drift. ʻOiai me ka ʻole o ka hana hou ʻana, ua paʻa mau kona wahi hana. Ua hōʻike ʻia nā hopena like e EPFL, Harvard, a me Zhejiang University. Eia naʻe, hoʻohana pinepine ka hoʻohālikelike i nā modulators LNOI i mālama ʻole ʻia, ʻaʻole paha i kūpono loa; me ka hana ʻana, ʻano like ka hana o nā mea ʻelua. Aia ka ʻokoʻa nui i ka LTOI e koi ana i nā kaʻina hana hou aʻe.
②ʻO ka Birefringence Haʻahaʻa: 0.004 vs 0.07
Hiki ke paʻakikī ka birefringence kiʻekiʻe o ka lithium niobate (LNOI) i kekahi manawa, ʻoi aku ka nui o ka piʻo ʻana o ke alakaʻi nalu hiki ke hoʻohui i ke ʻano a me ke ʻano hybridization. Ma ka LNOI lahilahi, hiki i ka piko o ka nalu ke hoʻololi i ke kukui TE i ke kukui TM, e hoʻopiʻi i ka hana ʻana o kekahi mau mea passive, e like me nā kānana.
Me LTOI, hoʻopau ka birefringence haʻahaʻa i kēia pilikia, hiki ke maʻalahi i ka hoʻomohala ʻana i nā mea hana passive kiʻekiʻe. Ua hōʻike pū ʻo EPFL i nā hopena kaulana, me ka hoʻohana ʻana i ka birefringence haʻahaʻa o LTOI a me ka ʻole o ka mode-crossing e loaʻa ai ka ultra-wide-spectrum electro-optic frequency comb generation me ka mana dispersion flat ma kahi ākea ākea. ʻO kēia ka hopena i kahi bandwidth comb comb 450 nm me nā laina comb 2000, ʻoi aku ka nui ma mua o ka mea hiki ke loaʻa me ka lithium niobate. Hoʻohālikelike ʻia me Kerr optical frequency combs, hāʻawi nā electro-optic combs i ka pōmaikaʻi o ka paepae ʻole a ʻoi aku ka paʻa, ʻoiai makemake lākou i kahi hoʻokomo microwave mana kiʻekiʻe.
③Paepae Poino Optical Kiʻekiʻe
ʻO ka paepae pōʻino o LTOI he ʻelua ʻelua ko LNOI, e hāʻawi ana i ka pono ma nā noi laina ʻole (a me nā noi Coherent Perfect Absorption (CPO) e hiki mai ana). ʻAʻole hiki ke hoʻopōʻino i ka lithium niobate nā pae mana module optical o kēia manawa.
④Haahaa Raman hopena
Pili kēia i nā noi laina ʻole. He hopena Raman ikaika ka Lithium niobate, i loko o Kerr optical frequency comb applications hiki ke alakaʻi i ka hana kukui Raman makemake ʻole a loaʻa ka hoʻokūkū, e pale ana i ka x-cut lithium niobate optical frequency combs mai ka hiki ʻana i ka mokuʻāina soliton. Me LTOI, hiki ke hoʻopaʻa ʻia ka hopena Raman ma o ka hoʻolālā orientation crystal, e ʻae iā LTOI x-cut e hoʻokō i ka soliton optical frequency comb generation. Hiki i kēia ke hoʻohui monolithic o soliton optical frequency combs me nā modulators kiʻekiʻe, kahi mea hiki ʻole ke loaʻa me LNOI.
◆ No ke aha i ʻōlelo ʻole ʻia ai ka Thin-Film Lithium Tantalate (LTOI)?
He haʻahaʻa haʻahaʻa ka mahana Curie Lithium tantalate ma mua o ka lithium niobate (610 ° C vs. 1157 ° C). Ma mua o ka hoʻomohala ʻana o ka ʻenehana heterointegration (XOI), ua hana ʻia nā modulators lithium niobate me ka hoʻohana ʻana i ka titanium diffusion, e koi ana i ka annealing ma luna o 1000 ° C, e hana ana i ka LTOI i kūpono ʻole. Eia nō naʻe, me ka neʻe ʻana o kēia lā i ka hoʻohana ʻana i nā substrate insulator a me ke kahakaha ʻana i nā alakaʻi nalu no ka hoʻokumu ʻana i ka modulator, ʻoi aku ka nui o ka mahana o 610 ° C Curie.
◆ E hoʻololi anei ʻo Thin-Film Lithium Tantalate (LTOI) i ka Thin-Film Lithium Niobate (TFLN)?
Ma muli o ka noiʻi o kēia manawa, hāʻawi ʻo LTOI i nā mea maikaʻi i ka hana passive, kūpaʻa, a me ke kumukūʻai hana nui, me ka ʻike ʻole o nā drawbacks. Eia naʻe, ʻaʻole ʻoi aku ka LTOI ma mua o ka lithium niobate i ka hana modulation, a ua ʻike nā pilikia paʻa me LNOI. No nā modula DR kamaʻilio, he liʻiliʻi ke koi no nā ʻāpana passive (a hiki ke hoʻohana ʻia ka silicon nitride inā pono). Hoʻohui hou, koi ʻia nā hoʻopukapuka hou e hoʻokumu hou i nā kaʻina hana wafer-level etching, heterointegration techniques, and reliability testing (ʻo ka paʻakikī me ka lithium niobate etching ʻaʻole ia ke alakaʻi nalu akā e loaʻa ana ke kiʻekiʻe wafer-level etching). No laila, no ka hoʻokūkū me ka lithium niobate i hoʻokumu ʻia, pono paha ʻo LTOI e wehe i nā pono hou aʻe. Akā, ma ke kula, hāʻawi ʻo LTOI i ka hiki ke noiʻi nui no nā ʻōnaehana ma-chip i hoʻohui ʻia, e like me ka octave-spanning electro-optic combs, PPLT, soliton a me AWG hawewe hawewe, a me nā modulators array.
Ka manawa hoʻouna: Nov-08-2024