Me ka hoʻomau mau ʻana o ka ʻenehana semiconductor, i ka ʻoihana semiconductor a me ka ʻoihana photovoltaic, ʻoi aku ka koʻikoʻi o nā koi no ka maikaʻi o ka ʻili o ka substrate wafer a i ʻole epitaxial sheet.No laila, he aha nā pono kūpono no nā wafers?ʻO ka lawe ʻana i nā wafers sapphire ma ke ʻano he laʻana, he aha nā hōʻailona hiki ke hoʻohana ʻia e loiloi i ka maikaʻi o ka ʻili o nā wafers?
He aha nā hōʻailona loiloi wafers?
ʻO nā hōʻailona ʻekolu
No nā wafers sapphire, ʻo kona mau hōʻailona loiloi ʻo ia ka huina mānoanoa deviation (TTV), piko (Bow) a me Warp (Warp).Hōʻike kēia mau ʻāpana ʻekolu i ka palahalaha a me ka mānoanoa like ʻole o ka wafer silika, a hiki ke ana i ke degere o ka ripple o ka wafer.Hiki ke hoʻohui ʻia ka corrugation me ka palahalaha e loiloi i ka maikaʻi o ka ʻili wafer.
He aha ka TTV, BOW, Warp?
TTV (Hoʻololi Mānoanoa Hui Pū ʻIa)
ʻO TTV ka ʻokoʻa ma waena o ka mānoanoa kiʻekiʻe a me ka liʻiliʻi o ka wafer.He kuhikuhi koʻikoʻi kēia ʻāpana no ke ana ʻana i ka like ʻana o ka mānoanoa wafer.Ma ke kaʻina hana semiconductor, pono ka mānoanoa o ka wafer ma luna o ka ʻili holoʻokoʻa.Hana ʻia nā ana ma nā wahi ʻelima ma ka wafer a helu ʻia ka ʻokoʻa.ʻO ka hope loa, he kumu nui kēia waiwai no ka hoʻoholo ʻana i ka maikaʻi o ka wafer.
Kakaka
ʻO ke kakaka i ka hana semiconductor e pili ana i ka piko o kahi wafer, e hoʻokuʻu ana i ka mamao ma waena o ka waena waena o kahi wafer i hoʻopaʻa ʻole ʻia a me ka mokulele kuhikuhi.No ka wehewehe ʻana paha i ke ʻano o kekahi mea ke piʻo ʻia, e like me ke ʻano o ke kakaka.Ua wehewehe ʻia ka waiwai Bow ma ke ana ʻana i ka ʻokoʻa ma waena o ke kikowaena a me ka lihi o ka wafer silika.Hōʻike pinepine ʻia kēia waiwai ma nā micrometers (µm).
Warp
ʻO Warp kahi waiwai honua o nā wafers e ana i ka ʻokoʻa ma waena o ka lōʻihi loa a me ka mamao liʻiliʻi ma waena o ka waena o kahi wafer manuahi ʻole a me ka mokulele kuhikuhi.Hōʻike i ka mamao mai ka ʻili o ka wafer silika a i ka mokulele.
He aha ka ʻokoʻa ma waena o TTV, Bow, Warp?
Ke nānā aku nei ʻo TTV i nā loli o ka mānoanoa a ʻaʻole pili i ka piʻo ʻana a i ʻole ka haʻalulu o ka wafer.
Kūleʻa ʻo Bow i ka piko holoʻokoʻa, e noʻonoʻo nui ana i ka piko o ke kiko waena a me ka lihi.
ʻOi aku ka laulā o Warp, me ke kuʻi a me ka wili ʻana o ka ʻili wafer holoʻokoʻa.
ʻOiai ua pili kēia mau palena ʻekolu i ke ʻano a me nā waiwai geometric o ka wafer silicon, ua ana ʻia lākou a wehewehe ʻokoʻa, a ʻokoʻa hoʻi ko lākou hopena i ke kaʻina semiconductor a me ka hana wafer.
ʻO ka liʻiliʻi o nā ʻāpana ʻekolu, ʻoi aku ka maikaʻi, a me ka nui o ka ʻāpana, ʻoi aku ka nui o ka hopena maikaʻi ʻole i ke kaʻina semiconductor.No laila, ma ke ʻano he semiconductor practitioner, pono mākou e ʻike i ke koʻikoʻi o nā ʻāpana profile wafer no ke kaʻina hana holoʻokoʻa, e hana i ke kaʻina semiconductor, pono e hoʻolohe i nā kikoʻī.
（ka hoʻopaʻa ʻana）
Ka manawa hoʻouna: Iune-24-2024