He aha ka manaʻo o TTV, BOW, WARP, a me TIR i nā Wafers?

Ke nānā nei mākou i nā wafers silicon semiconductor a i ʻole substrates i hana ʻia i nā mea ʻē aʻe, ʻike pinepine mākou i nā hōʻailona ʻenehana e like me: TTV, BOW, WARP, a me TIR, STIR, LTV, a me nā mea ʻē aʻe. He aha nā ʻāpana e hōʻike nei kēia?

TTV — Hoʻololi Mānoanoa Hui Pū ʻIa
BOW — Kakaka
WARP — Warp
TIR — Heluhelu i hoikeia
STIR — Heluhelu i hoikeia ma ka Paena
LTV — Hoʻololi Mānoanoa Kūloko

1. Huina Manoanoa — TTV

ʻO ka ʻokoʻa ma waena o ka mānoanoa kiʻekiʻe a me ka liʻiliʻi o ka wafer pili i ka mokulele kuhikuhi i ka wā e hoʻopili ʻia ai ka wafer a pili kokoke. Hōʻike maʻamau ia i nā micrometers (μm), hōʻike pinepine ʻia e like me: ≤15 μm.

2. Kakaka — BOW

ʻO ka hoʻokaʻawale ʻana ma waena o ka palena liʻiliʻi a me ka mamao loa mai ke kikowaena o ka ʻili wafer a i ka mokulele kuhikuhi i ka wā o ka wafer i kahi kūlana manuahi (ʻaʻole i hoʻopaʻa ʻia). Loaʻa kēia i nā hihia concave (negative bow) a me convex (positive bow). Hōʻike maʻamau ia i nā micrometers (μm), hōʻike pinepine ʻia e like me: ≤40 μm.

3. PALAPALA — WARP

ʻO ka hoʻokaʻawale ʻana ma waena o ka liʻiliʻi a me ka mamao loa mai ka ʻili wafer a i ka mokulele kuhikuhi (maʻamau ka ʻili hope o ka wafer) ke kū ka wafer i kahi kūlana manuahi (ʻaʻole i hoʻopaʻa ʻia). Aia kēia me nā hihia concave (negative warp) a me convex (positive warp). Hōʻike maʻamau ia i nā micrometers (μm), hōʻike pinepine ʻia e like me: ≤30 μm.

4. Huina Heluhelu — TIR

Ke hoʻopaʻa ʻia ka wafer a pili kokoke, me ka hoʻohana ʻana i kahi mokulele kuhikuhi e hōʻemi i ka huina o nā intercepts o nā helu āpau i loko o ka ʻāpana maikaʻi a i ʻole kahi ʻāpana kūloko i ʻōlelo ʻia ma ka ʻili wafer, ʻo ka TIR ka ʻokoʻa ma waena o ka palena kiʻekiʻe a me ka liʻiliʻi loa mai ka ʻili wafer a i kēia mokulele kuhikuhi.

Hoʻokumu ʻia ma ka ʻike hohonu i nā kikoʻī semiconductor waiwai e like me TTV, BOW, WARP, a me TIR, hāʻawi ʻo XKH i nā lawelawe hana wafer maʻamau i kūpono i nā kūlana ʻoihana paʻa. Hāʻawi mākou a kākoʻo i kahi ākea o nā mea hana kiʻekiʻe e like me ka sapphire, silicon carbide (SiC), silicon wafers, SOI, a me quartz, e hōʻoiaʻiʻo ana i ka pālahalaha ʻokoʻa, ka mānoanoa o ka mānoanoa, a me ka maikaʻi o ka ʻili no nā noi kiʻekiʻe i nā optoelectronics, nā mana mana, a me MEMS. E hilinaʻi iā mākou e hāʻawi i nā hoʻonā waiwai hilinaʻi a me ka mīkini pololei e kūpono i kāu mau koi hoʻolālā koi nui.