He aha ka manaʻo o TTV, BOW, WARP, a me TIR ma nā Wafers?

I ka nānā ʻana i nā wafers silicon semiconductor a i ʻole nā ​​​​​​substrates i hana ʻia me nā mea ʻē aʻe, ʻike pinepine mākou i nā ʻōkuhi loea e like me: TTV, BOW, WARP, a me TIR, STIR, LTV paha, a me nā mea ʻē aʻe. He aha nā palena e hōʻike nei kēia mau mea?

TTV — Ka ʻokoʻa o ka mānoanoa holoʻokoʻa
KAKAU — KAKAU
WARP — Warp
TIR - Huina Heluhelu i Hōʻike ʻia
HUI - Ka Heluhelu ʻAna i Hōʻike ʻia ma ka Pūnaewele
LTV — ʻOkoʻa Mānoanoa Kūloko

1. ʻOkoʻa o ka mānoanoa holoʻokoʻa — TTV

ʻO ka ʻokoʻa ma waena o ka mānoanoa kiʻekiʻe a me ka liʻiliʻi o ka wafer e pili ana i ka mokulele kuhikuhi i ka wā e hoʻopaʻa ʻia ai ka wafer a pili pono. Hōʻike pinepine ʻia ia ma nā micrometer (μm), i hōʻike pinepine ʻia e like me: ≤15 μm.

2. Kakaka — KAAKA

ʻO ka ʻokoʻa ma waena o ka mamao liʻiliʻi a me ka mamao kiʻekiʻe loa mai ke kikowaena o ka ʻili wafer a i ka mokulele kuhikuhi i ka wā e noho ai ka wafer i kahi kūlana manuahi (ʻaʻole i hoʻopaʻa ʻia). Hoʻokomo pū kēia me nā hihia concave (kakaka maikaʻi ʻole) a me convex (kakaka maikaʻi). Hōʻike pinepine ʻia ia ma nā micrometer (μm), i hōʻike pinepine ʻia e like me: ≤40 μm.

3. Warp — WARP

ʻO ka ʻokoʻa ma waena o ka mamao liʻiliʻi a me ka mamao kiʻekiʻe loa mai ka ʻili o ka wafer a i ka mokulele kuhikuhi (ʻo ka ʻili hope o ka wafer) i ka wā e noho ai ka wafer i kahi kūlana manuahi (ʻaʻole i hoʻopaʻa ʻia). Hoʻokomo pū kēia me nā hihia concave (negative warp) a me convex (positive warp). Hōʻike pinepine ʻia ia ma nā micrometers (μm), i hōʻike pinepine ʻia e like me: ≤30 μm.

4. Huina Heluhelu i Hōʻike ʻia — TIR

Ke hoʻopaʻa ʻia ka wafer a pili pono, me ka hoʻohana ʻana i kahi mokulele kuhikuhi e hōʻemi ana i ka huina o nā intercepts o nā kiko āpau i loko o ka wahi maikaʻi a i ʻole kahi ʻāpana kūloko i kuhikuhi ʻia ma ka ʻili wafer, ʻo ka TIR ka ʻokoʻa ma waena o ka mamao kiʻekiʻe a me ka mamao liʻiliʻi mai ka ʻili wafer a i kēia mokulele kuhikuhi.

Hoʻokumu ʻia ma luna o ka ʻike hohonu i nā kikoʻī mea semiconductor e like me TTV, BOW, WARP, a me TIR, hāʻawi ʻo XKH i nā lawelawe hana wafer maʻamau i hana ʻia i nā kūlana ʻoihana koʻikoʻi. Hāʻawi mākou a kākoʻo i kahi ākea o nā mea hana kiʻekiʻe e like me ka sapphire, silicon carbide (SiC), silicon wafers, SOI, a me ka quartz, e hōʻoiaʻiʻo ana i ka palahalaha kūikawā, ke kūlike o ka mānoanoa, a me ka maikaʻi o ka ʻili no nā noi holomua i ka optoelectronics, nā mea mana, a me MEMS. E hilinaʻi iā mākou e hāʻawi i nā hopena mea hilinaʻi a me ka mīkini pololei e hoʻokō i kāu mau koi hoʻolālā koi nui loa.