Nā Substrates Semiconductor Hanauna Hou: Sapphire, Silicon, a me Silicon Carbide

I loko o ka ʻoihana semiconductor, ʻo nā substrates ka mea kumu e hilinaʻi ai ka hana o ka hāmeʻa. Hoʻopilikia pololei ko lākou mau waiwai kino, wela, a me ka uila i ka pono, ka hilinaʻi, a me ka laulā o ka noi. Ma waena o nā koho āpau, ua lilo ka sapphire (Al₂O₃), silicon (Si), a me ka silicon carbide (SiC) i nā substrates i hoʻohana nui ʻia, e kūleʻa ana kēlā me kēia ma nā wahi ʻenehana like ʻole. Ke nānā nei kēia ʻatikala i kā lākou mau ʻano mea, nā ʻāina noi, a me nā ʻano hoʻomohala e hiki mai ana.

Sapphire: ʻO ka Lio Hana Optical

He ʻano kristal hoʻokahi o ka alumini oxide ka Sapphire me kahi lattice hexagonal. ʻO kona mau waiwai nui e pili ana i ka paʻakikī koʻikoʻi (Mohs hardness 9), ka transparency optical ākea mai ka ultraviolet a i ka infrared, a me ke kūpaʻa kemika ikaika, e kūpono ai no nā mea optoelectronic a me nā wahi ʻino. ʻO nā ʻenehana ulu holomua e like me ke ʻano o ka Heat Exchange Method a me ke ʻano Kyropoulos, i hui pū ʻia me ka polishing chemical-mechanical (CMP), e hana i nā wafers me ka sub-nanometer surface roughness.

Hoʻohana nui ʻia nā substrates sapphire i nā LED a me Micro-LEDs ma ke ʻano he mau papa epitaxial GaN, kahi e hoʻomaikaʻi ai nā substrates sapphire patterned (PSS) i ka pono o ka unuhi ʻana i ka mālamalama. Hoʻohana ʻia lākou i nā mea hana RF alapine kiʻekiʻe ma muli o ko lākou mau waiwai insulation uila, a i nā mea uila mea kūʻai aku a me nā noi aerospace ma ke ʻano he mau puka makani pale a me nā uhi sensor. ʻO nā palena e pili ana i ka conductivity thermal haʻahaʻa (35-42 W/m·K) a me ka lattice mismatch me GaN, kahi e koi ai i nā papa buffer e hōʻemi i nā hemahema.

Silika: ʻO ka Microelectronics Foundation

ʻO Silicon ke kumu o nā mea uila kuʻuna ma muli o kona ʻōnaehana ʻoihana makua, ka conductivity uila hiki ke hoʻololi ʻia ma o ka doping, a me nā waiwai thermal kūpono (conductivity thermal ~150 W/m·K, melting point 1410°C). Ma luna o 90% o nā kaapuni i hoʻohui ʻia, me nā CPU, nā mea hoʻomanaʻo, a me nā mea logic, i hana ʻia ma nā wafers silicon. Hoʻomalu pū ʻo Silicon i nā cell photovoltaic a hoʻohana nui ʻia i nā mea mana haʻahaʻa a waena e like me IGBTs a me MOSFETs.

Eia nō naʻe, ke kū nei ka silicon i nā pilikia i nā noi voltage kiʻekiʻe a me ke alapine kiʻekiʻe ma muli o kona bandgap haiki (1.12 eV) a me ka bandgap ʻaʻole pololei, ka mea e kaupalena ana i ka pono o ka hoʻokuʻu ʻana o ka mālamalama.

Silicon Carbide: Ka Mea Hana Hou Mana Kiʻekiʻe

He mea semiconductor hanauna ʻekolu ʻo SiC me kahi bandgap ākea (3.2 eV), voltage breakdown kiʻekiʻe (3 MV/cm), conductivity thermal kiʻekiʻe (~490 W/m·K), a me ka wikiwiki o ka saturation electron wikiwiki (~2×10⁷ cm/s). ʻO kēia mau ʻano e kūpono ai no nā mea uila kiʻekiʻe, mana kiʻekiʻe, a me nā alapine kiʻekiʻe. Hoʻoulu pinepine ʻia nā substrates SiC ma o ka lawe ʻana i ka mahu kino (PVT) ma nā mahana ma mua o 2000°C, me nā koi hana paʻakikī a pololei.

ʻO nā noi e komo pū me nā kaʻa uila, kahi e hoʻomaikaʻi ai nā SiC MOSFET i ka pono o ka inverter ma 5-10%, nā ʻōnaehana kamaʻilio 5G e hoʻohana ana i ka semi-insulating SiC no nā polokalamu GaN RF, a me nā grids akamai me ka hoʻoili ʻana o ke au pololei kiʻekiʻe (HVDC) e hōʻemi ana i ka pohō ikehu a hiki i ka 30%. ʻO nā palena he kumukūʻai kiʻekiʻe (ʻoi aku ke kumukūʻai o nā wafers 6-'īniha ma mua o ka silicon) a me nā pilikia hana ma muli o ka paʻakikī loa.

Nā Kūlana Hoʻohui a me ka Nānā i ka Wā e Hiki Mai Ana

Hoʻokumu ʻo Sapphire, silicon, a me SiC i kahi ʻōnaehana substrate hoʻopihapiha i ka ʻoihana semiconductor. Hoʻomalu ʻo Sapphire i ka optoelectronics, kākoʻo ʻo silicon i nā microelectronics kuʻuna a me nā mea mana haʻahaʻa a waena, a alakaʻi ʻo SiC i nā mea uila mana kiʻekiʻe-voltage, alapine kiʻekiʻe, a me ka pono kiʻekiʻe.

ʻO nā hoʻomohala e hiki mai ana e pili ana i ka hoʻonui ʻana i nā noi sapphire i nā LED UV hohonu a me nā micro-LED, e hiki ai iā Si-based GaN heteroepitaxy ke hoʻonui i ka hana alapine kiʻekiʻe, a me ka hoʻonui ʻana i ka hana wafer SiC i 8 ʻīniha me ka hoʻomaikaʻi ʻana i ka hua a me ka pono o ke kumukūʻai. I ka hui pū ʻana, ke hoʻokele nei kēia mau mea i ka hana hou ma o 5G, AI, a me ka neʻe uila, e hoʻokumu ana i ka hanauna hou o ka ʻenehana semiconductor.