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12 ʻīniha Sapphire Wafer no ka hana ʻana i ka Semiconductor kiʻekiʻe

12 ʻīniha Sapphire Wafer no ka Hana ʻana i ka Semiconductor Kiʻekiʻe Kiʻi i Hōʻike ʻia
  • 12 ʻīniha Sapphire Wafer no ka hana ʻana i ka Semiconductor kiʻekiʻe
  • 12 ʻīniha Sapphire Wafer no ka hana ʻana i ka Semiconductor kiʻekiʻe
  • 12 ʻīniha Sapphire Wafer no ka hana ʻana i ka Semiconductor kiʻekiʻe

Wehewehe Pōkole:

Ua hoʻolālā ʻia ka wafer sapphire 12 ʻīniha e hoʻokō i ke koi e ulu nei no ka semiconductor wahi nui, throughput kiʻekiʻe a me ka hana optoelectronic. Ke hoʻomau nei nā hoʻolālā hāmeʻa i ka piʻi ʻana a neʻe nā laina hana i nā ʻano wafer nui aʻe, hāʻawi nā substrates sapphire me nā diameters ultra-large i nā pono maopopo i ka huahana, ka hoʻonui ʻana i ka hua, a me ka kaohi ʻana i ke kumukūʻai.


Nā hiʻohiʻona

Kiʻikuhi kikoʻī

pl30139633-12_sapphire_glass2_wafer
wafer sapeiro

Hoʻolauna ʻia o ka wafer sapphire 12 ʻīniha

Ua hoʻolālā ʻia ka wafer sapphire 12 ʻīniha e hoʻokō i ke koi e ulu nei no ka semiconductor wahi nui, throughput kiʻekiʻe a me ka hana optoelectronic. Ke hoʻomau nei nā hoʻolālā hāmeʻa i ka piʻi ʻana a neʻe nā laina hana i nā ʻano wafer nui aʻe, hāʻawi nā substrates sapphire me nā diameters ultra-large i nā pono maopopo i ka huahana, ka hoʻonui ʻana i ka hua, a me ka kaohi ʻana i ke kumukūʻai.

Hana ʻia mai ka Al₂O₃ kristal hoʻokahi kiʻekiʻe-maʻemaʻe, hoʻohui kā mākou mau wafer sapphire 12 ʻīniha i ka ikaika mechanical maikaʻi loa, ke kūpaʻa wela, a me ka maikaʻi o ka ʻili. Ma o ka ulu ʻana o ka kristal i hoʻonui ʻia a me ka hana wafer pololei, hāʻawi kēia mau substrates i ka hana hilinaʻi no nā LED holomua, GaN, a me nā noi semiconductor kūikawā.

Nā ʻano mea

 

Ua kaulana ʻo Sapphire (hoʻokahi-crystal aluminum oxide, Al₂O₃) no kona mau waiwai kino a me nā kemika koʻikoʻi. Loaʻa i nā wafers sapphire 12 ʻīniha nā pono āpau o ka mea sapphire me ka hāʻawi ʻana i kahi ʻili ākea nui aʻe.

ʻO nā ʻano mea koʻikoʻi:

  • Paʻakikī kiʻekiʻe loa a me ke kūpaʻa ʻana i ke komo ʻana

  • ʻO ke kūpaʻa wela maikaʻi loa a me ke kiko heheʻe kiʻekiʻe

  • ʻOi aku ka maikaʻi o ke kūpaʻa kemika i nā waikawa a me nā alkalis

  • ʻO ke aniani ʻōlinolino kiʻekiʻe mai nā nalu UV a i IR

  • Nā waiwai insulation uila maikaʻi loa

ʻO kēia mau ʻano e hana ai i nā wafer sapphire 12 ʻīniha i kūpono no nā ʻano hana ʻino a me nā kaʻina hana semiconductor wela kiʻekiʻe.

Kaʻina Hana Hana

ʻO ka hana ʻana o nā wafers sapphire 12 ʻīniha e pono ai ka ulu ʻana o ke kristal holomua a me nā ʻenehana hana pololei loa. ʻO ke kaʻina hana hana maʻamau:

  1. Ka ulu ʻana o ke aniani hoʻokahi
    Hoʻoulu ʻia nā kristal sapphire kiʻekiʻe me ka hoʻohana ʻana i nā ʻano holomua e like me KY a i ʻole nā ​​​​ʻenehana ulu kristal nui ʻē aʻe, e hōʻoiaʻiʻo ana i ka hoʻonohonoho kristal like a me ke kaumaha kūloko haʻahaʻa.

  2. Ke hoʻoponopono ʻana a me ka ʻoki ʻana i ka kristal
    Ua hoʻohālikelike pono ʻia ka ʻoaka sapphire a ʻokiʻoki ʻia i loko o nā wafers 12 ʻīniha me ka hoʻohana ʻana i nā mea ʻoki pololei kiʻekiʻe e hōʻemi i ka pōʻino ma lalo o ka ʻili.

  3. Ka Lapping a me ka Polishing
    Hoʻopili ʻia nā kaʻina hana lapping multi-step a me ka polishing mechanical chemical (CMP) e hoʻokō i ka ʻoʻoleʻa ʻili maikaʻi loa, ka palahalaha, a me ke ʻano like o ka mānoanoa.

  4. Hoʻomaʻemaʻe a me ka Nānā ʻana
    Hoʻomaʻemaʻe pono ʻia kēlā me kēia wafer sapphire 12 ʻīniha a nānā pono ʻia, me ka maikaʻi o ka ʻili, TTV, kakaka, ka warp, a me ka nānā ʻana i nā kīnā.

Nā noi

Hoʻohana nui ʻia nā wafers sapphire 12 iniha i nā ʻenehana holomua a me nā ʻenehana e kū mai ana, me:

  • Nā substrates LED mana kiʻekiʻe a me ka ʻōlinolino kiʻekiʻe

  • Nā mea mana e pili ana iā GaN a me nā mea hana RF

  • Mea lawe lako semiconductor a me nā substrates insulating

  • Nā puka makani optical a me nā ʻāpana optical wahi nui

  • ʻO ka hoʻopili semiconductor holomua a me nā mea lawe kaʻina hana kūikawā

ʻO ke anawaena nui e hiki ai i ka throughput kiʻekiʻe a me ka hoʻomaikaʻi ʻana i ka pono kumukūʻai i ka hana nui ʻana.

Nā Pōmaikaʻi o nā Wafers Sapphire 12 ʻīniha

  • ʻĀpana hiki ke hoʻohana ʻia no ka hoʻopuka ʻana o ka hāmeʻa kiʻekiʻe ma kēlā me kēia wafer

  • Hoʻomaikaʻi ʻia ke kūlike a me ke ʻano o ke kaʻina hana

  • Hoʻemi ʻia ke kumukūʻai no kēlā me kēia hāmeʻa i ka hana nui

  • Ikaika mīkini maikaʻi loa no ka lawelawe ʻana i nā nui nui

  • Nā kikoʻī i hoʻopilikino ʻia no nā noi like ʻole

 

Nā Koho Hoʻopilikino

Hāʻawi mākou i ka hoʻopilikino maʻalahi no nā wafers sapphire 12 iniha, me:

  • Ke kuhikuhi ʻana o ke aniani (C-plane, A-plane, R-plane, a pēlā aku)

  • Ka hoʻomanawanui ʻana o ka mānoanoa a me ke anawaena

  • Hoʻopili ʻana i ka ʻaoʻao hoʻokahi a ʻaoʻao pālua paha

  • ʻO ke ʻano lihi a me ka hoʻolālā chamfer

  • Nā koi o ka ʻilikai a me ka palahalaha

Palena Nā kikoʻī Nā memo
Anawaena Wafer 12 ʻīniha (300 mm) Wafer anawaena nui maʻamau
Mea Hana Sapphire aniani hoʻokahi (Al₂O₃) Papa uila/optika kiʻekiʻe maʻemaʻe
Kūlana Kila mokulele C (0001), mokulele A (11-20), mokulele R (1-102) Loaʻa nā kuhikuhi koho
Mānoanoa 430–500 μm Loaʻa ka mānoanoa maʻamau ma ke noi
Ka hoʻomanawanui mānoanoa ±10 μm Hoʻomanawanui paʻa no nā polokalamu holomua
Ka loli ʻana o ka mānoanoa holoʻokoʻa (TTV) ≤10 μm Hoʻomaopopo i ka hana like ʻana ma waena o ka wafer
Kakaka ≤50 μm I ana ʻia ma luna o ka wafer holoʻokoʻa
ʻŌwiliwili ≤50 μm I ana ʻia ma luna o ka wafer holoʻokoʻa
Hoʻopau ʻili Hoʻopili ʻia ʻaoʻao hoʻokahi (SSP) / Hoʻopili ʻia ʻaoʻao pālua (DSP) ʻIli kiʻekiʻe o ka ʻike maka
ʻO ka ʻOʻoleʻa o ka ʻIli (Ra) ≤0.5 nm (i hoʻopili ʻia) Ka laumania pae ʻātoma no ka ulu ʻana o ka epitaxial
ʻIkepili Lihi Kaʻe Chamfer / Kaʻe poepoe No ka pale ʻana i ka ʻoki ʻana i ka wā e lawelawe ai
Pololei o ke kuhikuhi ʻana ±0.5° Hoʻomaopopo i ka ulu kūpono o ka papa epitaxial
Ka nui o ke kīnā <10 kenimika⁻² Ana ʻia e ka nānā ʻana o ka maka
Palahalaha ≤2 μm / 100 mm Hoʻomaopopo i ka lithography like a me ka ulu ʻana o ka epitaxial
Ka maʻemaʻe Papa 100 – Papa 1000 Kūpono me ka lumi maʻemaʻe
Hoʻoili Optical >85% (UV–IR) Ma muli o ka nalu a me ka mānoanoa

 

12 ʻīniha Sapphire Wafer FAQ

Q1: He aha ka mānoanoa maʻamau o kahi wafer sapeiro 12 ʻīniha?
A: ʻO ka mānoanoa maʻamau mai 430 μm a 500 μm. Hiki ke hana ʻia nā mānoanoa maʻamau e like me nā koi o ka mea kūʻai aku.

 

Q2: He aha nā kuhikuhi kristal i loaʻa no nā wafers sapphire 12 ʻīniha?
A: Hāʻawi mākou i nā kuhikuhi C-plane (0001), A-plane (11-20), a me R-plane (1-102). Hiki ke hoʻopilikino ʻia nā kuhikuhi ʻē aʻe ma muli o nā koi kikoʻī o ka hāmeʻa.

 

Q3: He aha ka ʻokoʻa o ka mānoanoa holoʻokoʻa (TTV) o ka wafer?
A: ʻO kā mākou mau wafers sapphire 12 ʻīniha ka maʻamau he TTV ≤10 μm, e hōʻoiaʻiʻo ana i ka like ʻana ma ka ʻili wafer holoʻokoʻa no ka hana ʻana i nā mea hana kiʻekiʻe.

E pili ana iā mākou

He loea ʻo XKH i ka hoʻomohala ʻenehana kiʻekiʻe, ka hana ʻana, a me ke kūʻai aku ʻana i ke aniani optical kūikawā a me nā mea kristal hou. Lawelawe kā mākou huahana i nā mea uila optical, nā mea uila mea kūʻai aku, a me ka pūʻali koa. Hāʻawi mākou i nā ʻāpana optical Sapphire, nā uhi lens kelepona paʻalima, Ceramics, LT, Silicon Carbide SIC, Quartz, a me nā wafers kristal semiconductor. Me ka ʻike loea a me nā lako hana kiʻekiʻe, ʻoi aku mākou i ka hana ʻana i nā huahana maʻamau ʻole, me ka manaʻo e lilo i alakaʻi i nā mea optoelectronic ʻoihana ʻenehana kiʻekiʻe.

e pili ana iā mākou
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