ʻO nā mea waiwai nui no ka hana semiconductor: nā ʻano o nā substrate wafer

ʻO ka Wafer Substrates ma ke ʻano he mau mea koʻikoʻi ma nā mea semiconductor

ʻO nā substrate Wafer nā mea lawe kino o nā mea semiconductor, a ʻo kā lākou waiwai waiwai e hoʻoholo pololei i ka hana o ka hāmeʻa, kumukūʻai, a me nā kahua noi. Aia ma lalo iho nā ʻano nui o ka wafer substrates me kā lākou mau pono a me nā hemahema:

1.Silika (Si)

• Māhele Makeke:ʻOi aku ma mua o 95% o ka mākeke semiconductor honua.

• Pono:

  • Kumukuai haʻahaʻa:Nui nā mea maka (silicon dioxide), nā kaʻina hana oʻo, a me nā ʻoihana waiwai nui.

  • Kūlike kaʻina hana kiʻekiʻe:He oʻo loa ka ʻenehana CMOS, e kākoʻo ana i nā node holomua (e laʻa, 3nm).

  • ʻO ka maikaʻi kristal maikaʻi loa:Hiki ke hoʻoulu ʻia nā wafers nui-anawaena (ma kahi o 12-ʻīniha, 18-ʻīniha ma lalo o ka hoʻomohala ʻana) me ka haʻahaʻa haʻahaʻa.

  • Nā waiwai mechanical paʻa:Maʻalahi e ʻoki, poli, a mālama.

• Nā hemahema:

  • Awāwa haiki (1.12 eV):ʻO ka leakage kiʻekiʻe i nā mahana kiʻekiʻe, e kaupalena ana i ka pono o ka mana.

  • ʻAʻohe hui pū:He haʻahaʻa haʻahaʻa haʻahaʻa haʻahaʻa haʻahaʻa, kūpono ʻole no nā mea optoelectronic e like me nā LED a me nā lasers.

  • ʻO ka neʻe ʻana o ka electron i kaupalena ʻia:Haʻahaʻa haʻahaʻa kiʻekiʻe-frequency hana hoʻohālikelike ʻia me nā semiconductors compound.
    

2.Gallium Arsenide (GaAs)

• Nā noi:Nā hāmeʻa RF kiʻekiʻe (5G/6G), nā mea optoelectronic (lasers, solar cell).

• Pono:

  • ʻO ka neʻe ʻana o ka electron kiʻekiʻe (5–6x kēlā o ke silikoni):He kūpono no nā noi wikiwiki kiʻekiʻe e like me ke kamaʻilio hawewe millimeter.

  • ʻAʻohe huikau pololei (1.42 eV):ʻO ka hoʻololi photoelectric kiʻekiʻe, ke kumu o nā laser infrared a me nā LED.

  • ʻO ka wela kiʻekiʻe a me ka pale ʻana i ka radiation:He kūpono no ka aerospace a me ka ʻino.

• Nā hemahema:

  • Ke kumu kūʻai kiʻekiʻe:Kakaʻikahi ka waiwai, ka ulu ʻana o ke aniani paʻakikī (hiki i ka hoʻokaʻawale ʻana), ka nui wafer palena ʻia (ka nui 6-ʻīniha).

  • Mechanics palupalu:Kūleʻa i ka haʻihaʻi, ka hopena i ka haʻahaʻa o ka hana ʻana.

  • ʻona:Pono ʻo Arsenic i ka mālama koʻikoʻi a me nā kaohi o ke kaiapuni.

3. Kapili Silika (SiC)

• Nā noi:ʻO nā mea mana kiʻekiʻe a me nā mana kiʻekiʻe (EV inverters, charging stations), aerospace.

• Pono:

  • ʻAha bandā ākea (3.26 eV):ʻO ka ikaika haʻihaʻi kiʻekiʻe (10x ka silicon), ka hoʻomanawanui kiʻekiʻe (ka mahana hana> 200 °C).

  • ʻO ke kau wela wela kiʻekiʻe (≈3× silika):ʻOi aku ka maikaʻi o ka hoʻoheheʻe ʻana i ka wela, hiki ke ʻoi aku ka nui o ka mana o ka ʻōnaehana.

  • poho hoololi haahaa:Hoʻomaikaʻi i ka pono hoʻololi mana.

• Nā hemahema:

  • ʻO ka hoʻomākaukau ʻana i kahi substrate paʻakikī:ʻO ka ulu ʻana o ke aniani lohi (> 1 pule), paʻakikī ka hoʻokele defect (micropipes, dislocations), ke kumu kūʻai kiʻekiʻe loa (5-10x silicon).

  • Nui wafer liʻiliʻi:ʻO ka nui 4-6 iniha; 8-ʻīniha ke kūkulu ʻia nei.

  • Paʻakikī ke hana:Paʻakikī loa (Mohs 9.5), hana ʻoki a hoʻoliʻi i ka manawa.

4. Gallium Nitride (GaN)

• Nā noi:ʻO nā mana mana alapine kiʻekiʻe (ka hoʻouka wikiwiki ʻana, nā kahua kahua 5G), nā LED polū/lasers.

• Pono:

  • ʻO ka neʻe electron kiʻekiʻe kiʻekiʻe loa + ʻākea pūhaka (3.4 eV):Hoʻohui i nā alapine kiʻekiʻe (> 100 GHz) a me ka hana kiʻekiʻe-voltage.

  • Haʻahaʻa ma ke kūʻē:Hoʻemi i ka nalowale o ka mana.

  • Heteroepitaxy kūpono:Hoʻoulu maʻamau ma luna o ke silikoni, sapphire, a i ʻole SiC substrates, e hōʻemi ana i ke kumukūʻai.

• Nā hemahema:

  • Paʻakikī ka ulu ʻana o ka kristal hoʻokahi:ʻO ka Heteroepitaxy ka mea nui, akā ʻo ka lattice mismatch e hoʻolauna i nā hemahema.

  • Ke kumu kūʻai kiʻekiʻe:He pipiʻi loa nā substrate GaN maoli (hiki ke kūʻai ʻia kahi wafer 2-iniha he mau tausani USD).

  • Nā pilikia hilinaʻi:ʻO nā hanana e like me ka hāʻule ʻana o kēia manawa e pono ai ka loiloi.

5. Indium Phosphide (InP)

• Nā noi:ʻO nā kamaʻilio optical kiʻekiʻe (lasers, photodetectors), nā mea hana terahertz.

• Pono:

  • ʻO ka neʻe electron kiʻekiʻe loa:Kākoʻo > 100 GHz hana, ʻoi aku ka maikaʻi o GaA.

  • ʻO ka pūhaka pololei me ka hoʻohālikelike ʻana i ka lōʻihi nalu:Mea kumu no ka 1.3-1.55 μm kamaʻilio fiber optical.

• Nā hemahema:

  • ʻAhaʻi a pipiʻi loa:ʻOi aku ke kumukūʻai o ka substrate ma mua o 100x silika, ka nui o ka wafer (4-6 iniha).

6. Sapphire (Al₂O₃)

• Nā noi:ʻO ke kukui LED (GaN epitaxial substrate), nā mea kūʻai uila uhi aniani.

• Pono:

  • Kumukuai haʻahaʻa:ʻOi aku ka maikaʻi ma mua o nā substrate SiC/GaN.

  • Paʻa kemika maikaʻi loa:Paʻa ʻino, hoʻokaʻawale loa.

  • Mākaʻikaʻi:He kūpono no nā kūkulu LED kūpaʻa.

• Nā hemahema:

  • ʻAʻole kūlike ka lattice nui me GaN (>13%):Hoʻokumu i ka nui defect density, e koi ana i nā papa pale.

  • Haʻihaʻi maikaʻi ʻole (~ 1/20 o ke silika):Hoʻopau i ka hana o nā LED mana kiʻekiʻe.

7. Nā Pākuʻi Ceramic (AlN, BeO, etc.)

• Nā noi:Nā mea hoʻolaha wela no nā modula mana kiʻekiʻe.

• Pono:

  • ʻO ka hoʻokaʻawale + ʻana i ka wela kiʻekiʻe (AlN: 170–230 W/m·K):He kūpono no ka ʻeke kiʻekiʻe.

• Nā hemahema:

  • ʻAʻole-hoʻokahi-kristal:ʻAʻole hiki ke kākoʻo pololei i ka ulu ʻana o ka hāmeʻa, hoʻohana wale ʻia ma ke ʻano he substrates packaging.

8. Nā Papahana Kūikawā

• SOI (Silicon on Insulator):

  • Kapili:Silika/SiO₂/silikona sandwich.

  • Pono:Hoʻemi i ka capacitance parasitic, radiation-hardened, leakage suppression (hoʻohana ʻia ma RF, MEMS).

  • Nā hemahema:30–50% ʻoi aʻe ka pipiʻi ma mua o ka silika nui.

• Quartz (SiO₂):Hoʻohana ʻia i nā photomasks a me MEMS; pale wela kiʻekiʻe akā palupalu loa.

• daimana:Kiʻekiʻe loa thermal conductivity substrate (>2000 W/m·K), ma lalo o R&D no ka wela loa.

Papa Hōʻuluʻulu Hoʻohālikelike

Nā mea nui no ke koho ʻana i ka substrate

• Nā koi hana:GaAs/InP no ke alapine kiʻekiʻe; SiC no ka uila kiʻekiʻe, ka wela kiʻekiʻe; GaAs/InP/GaN no ka optoelectronics.

• Kāohi kumu kūʻai:Makemake nā mea uila uila i ke silika; Hiki i nā māla kiʻekiʻe ke hōʻoia i nā kumukūʻai SiC / GaN.

• Paʻakikī hoʻohui:ʻAʻole hiki ke hoʻololi ʻia ʻo Silicon no ka hoʻohālikelike CMOS.

• Hooponopono wela:Makemake nā noi mana kiʻekiʻe iā SiC a i ʻole GaN e pili ana i ke daimana.

• Oke kaulahao lako:Si > Sapphire > GaAs > SiC > GaN > InP.

Kaulana e hiki mai ana

ʻO ka hoʻohui like ʻole (e laʻa, GaN-on-Si, GaN-on-SiC) e kaulike i ka hana a me ke kumukūʻai, ka hoʻokele holomua ma 5G, nā kaʻa uila, a me ka computing quantum.