Ke hoʻomaopopo nei i nā Wafers Semi-Insulating vs. N-Type SiC no nā noi RF

Ua kū mai ʻo Silicon carbide (SiC) ma ke ʻano he mea koʻikoʻi i nā mea uila hou, ʻoi aku hoʻi no nā noi e pili ana i ka mana kiʻekiʻe, ke alapine kiʻekiʻe, a me nā wahi wela kiʻekiʻe. ʻO kona mau waiwai kiʻekiʻe—e like me ka bandgap ākea, ka conductivity thermal kiʻekiʻe, a me ka voltage breakdown kiʻekiʻe—e hoʻolilo iā SiC i koho kūpono no nā mea holomua i nā mea uila mana, optoelectronics, a me nā noi alapine lekiō (RF). Ma waena o nā ʻano wafers SiC like ʻole,hoʻokaʻawale hapaa meʻano-nHoʻohana pinepine ʻia nā wafers i nā ʻōnaehana RF. He mea nui ka hoʻomaopopo ʻana i nā ʻokoʻa ma waena o kēia mau mea no ka hoʻonui ʻana i ka hana o nā polokalamu SiC.

1. He aha nā Wafers Semi-Insulating a me N-Type SiC?

Nā Wafers SiC Semi-Insulating
ʻO nā wafers SiC semi-insulating kahi ʻano SiC kikoʻī i hoʻohuihui ʻia me kekahi mau haumia e pale aku i nā mea lawe manuahi mai ke kahe ʻana ma o ka mea. ʻO ka hopena kēia i kahi resistivity kiʻekiʻe loa, ʻo ia hoʻi, ʻaʻole alakaʻi maʻalahi ka wafer i ka uila. He mea nui loa nā wafers SiC semi-insulating i nā noi RF no ka mea hāʻawi lākou i ka hoʻokaʻawale maikaʻi loa ma waena o nā wahi hana a me ke koena o ka ʻōnaehana. Hoʻemi kēia waiwai i ka pilikia o nā kahe parasitic, no laila e hoʻomaikaʻi ana i ke kūpaʻa a me ka hana o ka hāmeʻa.

Nā Wafers SiC ʻAno N
I ka hoʻohālikelike ʻana, ua hoʻohui ʻia nā wafers SiC ʻano-n me nā mea (ʻo ia hoʻi ka nitrogen a i ʻole ka phosphorus) e hāʻawi ana i nā electrons manuahi i ka mea, e ʻae ana iā ia e alakaʻi i ka uila. Hōʻike kēia mau wafers i ka resistivity haʻahaʻa i hoʻohālikelike ʻia me nā wafers SiC semi-insulating. Hoʻohana pinepine ʻia ka N-type SiC i ka hana ʻana o nā mea hana e like me nā transistors hopena kahua (FET) no ka mea kākoʻo ia i ka hoʻokumu ʻana o kahi kahawai conductive e pono ai no ke kahe ʻana o kēia manawa. Hāʻawi nā wafers ʻano-N i kahi pae conductivity i kāohi ʻia, e kūpono ai lākou no ka mana a me nā noi hoʻololi i nā kaapuni RF.

2. Nā Waiwai o nā Wafers SiC no nā noi RF

2.1. Nā ʻano mea

• Ka laulā ākeaLoaʻa i nā wafers SiC semi-insulating a me n-type kahi bandgap ākea (ma kahi o 3.26 eV no SiC), kahi e hiki ai iā lākou ke hana ma nā alapine kiʻekiʻe, nā voltages kiʻekiʻe, a me nā mahana i hoʻohālikelike ʻia me nā mea hana silicon-based. He mea pono loa kēia waiwai no nā noi RF e pono ai ka lawelawe ʻana i ka mana kiʻekiʻe a me ke kūpaʻa wela.

• Ka Hoʻokele WelaʻO ke alakaʻi wela kiʻekiʻe o SiC (~3.7 W/cm·K) kekahi pono koʻikoʻi i nā noi RF. Hāʻawi ia i ka hoʻolaha wela maikaʻi, e hōʻemi ana i ke kaumaha wela ma nā ʻāpana a hoʻomaikaʻi i ka hilinaʻi holoʻokoʻa a me ka hana ma nā wahi RF mana kiʻekiʻe.

2.2. Ke kū'ē a me ke alakaʻi

• Nā Wafers Semi-InsulatingMe ka resistivity maʻamau ma ka pae o 10^6 a 10^9 ohm·cm, he mea nui nā wafers SiC semi-insulating no ka hoʻokaʻawale ʻana i nā ʻāpana like ʻole o nā ʻōnaehana RF. ʻO ko lākou ʻano non-conductive e hōʻoiaʻiʻo ana he liʻiliʻi ka leakage o ke au, e pale ana i ka hoʻopilikia makemake ʻole ʻia a me ka nalowale o ka hōʻailona ma ke kaapuni.

• Nā Wafer ʻAno NʻO nā wafers SiC ʻano-N, ma ka ʻaoʻao ʻē aʻe, he mau waiwai resistivity mai 10^-3 a 10^4 ohm·cm, ma muli o nā pae doping. He mea nui kēia mau wafers no nā mea RF e pono ai ka conductivity i kāohi ʻia, e like me nā amplifiers a me nā kuapo, kahi e pono ai ke kahe o ke au no ka hana ʻana i ka hōʻailona.

3. Nā noi ma nā ʻōnaehana RF

3.1. Nā Mea Hoʻonui Mana

ʻO nā mea hoʻoikaika mana e pili ana i ka SiC kahi kihi o nā ʻōnaehana RF hou, ʻoi aku hoʻi i nā kamaʻilio kelepona, radar, a me nā kamaʻilio ukali. No nā noi hoʻoikaika mana, ʻo ke koho ʻana o ke ʻano wafer—semi-insulating a i ʻole n-type—e hoʻoholo i ka pono, ka linearity, a me ka hana walaʻau.

• SiC Semi-InsulatingHoʻohana pinepine ʻia nā wafers SiC semi-insulating i loko o ke substrate no ke ʻano kumu o ka amplifier. ʻO kā lākou resistivity kiʻekiʻe e hōʻoiaʻiʻo ana e hoʻemi ʻia nā au a me nā mea i makemake ʻole ʻia, e alakaʻi ana i ka hoʻoili hōʻailona maʻemaʻe a me ka pono holoʻokoʻa kiʻekiʻe.

• ʻAno-N SiCHoʻohana ʻia nā wafers SiC ʻano-N ma ka ʻāpana hana o nā mea hoʻonui mana. ʻO kā lākou conductivity e ʻae ai i ka hoʻokumu ʻana i kahi kahawai i kāohi ʻia e kahe ai nā electrons, e hiki ai ke hoʻonui i nā hōʻailona RF. ʻO ka hui pū ʻana o ka mea ʻano-n no nā mea hana a me ka mea semi-insulating no nā substrates he mea maʻamau ia i nā noi RF mana kiʻekiʻe.

3.2. Nā Mea Hana Hoʻololi Alapine Kiʻekiʻe

Hoʻohana ʻia nā wafers SiC i nā mea hoʻololi alapine kiʻekiʻe, e like me SiC FETs a me nā diodes, he mea nui ia no nā mea hoʻonui mana RF a me nā mea hoʻoili. ʻO ke kū'ē haʻahaʻa a me ke kiʻekiʻe o ka volta breakdown o nā wafers SiC ʻano-n e hoʻolilo iā lākou i kūpono loa no nā noi hoʻololi pono kiʻekiʻe.

3.3. Nā Mea Hana Microwave a me Millimeter-Wave

Loaʻa i nā mea hana microwave a me millimeter-wave i hoʻokumu ʻia ma SiC, me nā oscillators a me nā mixers, ka pōmaikaʻi mai ka hiki o ka mea ke lawelawe i ka mana kiʻekiʻe ma nā alapine kiʻekiʻe. ʻO ka hui pū ʻana o ka conductivity thermal kiʻekiʻe, ka capacitance parasitic haʻahaʻa, a me ka bandgap ākea e kūpono ai ʻo SiC no nā mea hana e hana ana ma nā pae GHz a me THz.

4. Nā Pōmaikaʻi a me nā Palena

4.1. Nā Pōmaikaʻi o nā Wafers SiC Semi-Insulating

• Nā Au Parasitic LiʻiliʻiʻO ke kū'ē kiʻekiʻe o nā wafers SiC semi-insulating e kōkua i ka hoʻokaʻawale ʻana i nā ʻāpana o ka hāmeʻa, e hōʻemi ana i ka pilikia o nā au parasitic e hiki ke hoʻohaʻahaʻa i ka hana o nā ʻōnaehana RF.

• Hoʻomaikaʻi ʻia ka pono o ka hōʻailonaHoʻomaopopo nā wafers SiC semi-insulating i ka pono o ka hōʻailona kiʻekiʻe ma ka pale ʻana i nā ala uila i makemake ʻole ʻia, e kūpono ai lākou no nā noi RF alapine kiʻekiʻe.

4.2. Nā Pōmaikaʻi o nā Wafers SiC ʻAno N

• Ka Hoʻokele Manaʻo ʻiaHāʻawi nā wafers SiC ʻano-N i kahi pae conductivity i wehewehe pono ʻia a hiki ke hoʻololi ʻia, e kūpono ana iā lākou no nā ʻāpana hana e like me nā transistors a me nā diodes.

• Ka lawelawe ʻana i ka mana kiʻekiʻeʻOi aku ka maikaʻi o nā wafers SiC ʻano-N i nā noi hoʻololi mana, e kū ana i nā voltages a me nā au kiʻekiʻe i hoʻohālikelike ʻia me nā mea semiconductor kuʻuna e like me ka silicon.

4.3. Nā Palena

• Ka Paʻakikī o ka Hana ʻanaʻO ka hana ʻana i ka wafer SiC, ʻoi aku hoʻi no nā ʻano semi-insulating, hiki ke ʻoi aku ka paʻakikī a me ke kumukūʻai ma mua o ka silicon, kahi e kaupalena ai i kā lākou hoʻohana ʻana i nā noi koʻikoʻi i ke kumukūʻai.

• Nā hemahema meaʻOiai ʻo SiC ka mea i ʻike ʻia no kona mau waiwai mea maikaʻi loa, hiki i nā hemahema i loko o ka ʻano wafer—e like me nā dislocations a i ʻole ka haumia i ka wā o ka hana ʻana—ke hoʻopilikia i ka hana, ʻoiai hoʻi i nā noi alapine kiʻekiʻe a me ka mana kiʻekiʻe.

5. Nā ʻAno Hou ma SiC no nā Noi RF

Manaʻo ʻia e piʻi aʻe ke koi no SiC i nā noi RF i ka hoʻomau ʻana o nā ʻoihana e hoʻokuke i nā palena o ka mana, ke alapine (frequency), a me ka mahana i nā hāmeʻa. Me nā holomua i nā ʻenehana hana wafer a me nā ʻano hana doping i hoʻomaikaʻi ʻia, e pāʻani nā wafers SiC semi-insulating a me n-type i kahi kuleana koʻikoʻi i nā ʻōnaehana RF hanauna e hiki mai ana.

• Nā Mea Hana i Hoʻohui ʻiaKe hoʻomau nei ka noiʻi ʻana i ka hoʻohui ʻana i nā mea semi-insulating a me nā mea SiC ʻano-n i loko o kahi ʻano hana hoʻokahi. E hoʻohui kēia i nā pono o ka conductivity kiʻekiʻe no nā ʻāpana hana me nā waiwai hoʻokaʻawale o nā mea semi-insulating, e alakaʻi ana paha i nā kaapuni RF ʻoi aku ka liʻiliʻi a me ka maikaʻi.

• Nā noi RF alapine kiʻekiʻeI ka ulu ʻana o nā ʻōnaehana RF i nā alapine kiʻekiʻe aʻe, e ulu ana ka pono no nā mea me ka lawelawe ʻana i ka mana nui a me ke kūpaʻa wela. ʻO ka bandgap ākea o SiC a me ka conductivity thermal maikaʻi loa e hoʻonoho pono iā ia no ka hoʻohana ʻana i nā microwave a me nā millimeter-wave o ka hanauna e hiki mai ana.

6. Hopena

Hāʻawi nā wafers SiC semi-insulating a me n-type i nā pono kūikawā no nā noi RF. Hāʻawi nā wafers semi-insulating i ka hoʻokaʻawale ʻana a me nā kahe parasitic i hoʻemi ʻia, e lilo ana lākou i mea kūpono no ka hoʻohana ʻana i ka substrate i nā ʻōnaehana RF. I ka hoʻohālikelike ʻana, he mea nui nā wafers n-type no nā ʻāpana hāmeʻa hana e pono ai ka conductivity i kāohi ʻia. I ka hui pū ʻana, hiki i kēia mau mea ke hoʻomohala i nā mea RF ʻoi aku ka maikaʻi a me ka hana kiʻekiʻe e hiki ke hana ma nā pae mana kiʻekiʻe, nā alapine, a me nā mahana ma mua o nā ʻāpana silicon-based kuʻuna. Ke hoʻomau nei ka ulu ʻana o ke koi no nā ʻōnaehana RF holomua, e lilo wale ana ke kuleana o SiC ma kēia kahua i mea nui.