Nā Hoʻonā Etching Wet & Dry i kālai ʻia me ka Sapphire Etched Wafer
Kiʻikuhi kikoʻī
Hoʻolauna Huahana
Hana ʻia nā wafers sapphire etched me ka hoʻohana ʻana i nā substrates sapphire kristal hoʻokahi kiʻekiʻe (Al₂O₃), i hana ʻia ma o ka photolithography holomua i hui pū ʻia menā ʻenehana kālai pulu a me nā ʻenehana kālai maloʻoLoaʻa i nā huahana nā ʻano hoʻonohonoho like ʻole o nā micro, ka pololei o ke ana, a me ke kūpaʻa kino a me ke kemika, e kūpono ai no nā noi hilinaʻi kiʻekiʻe i nā microelectronics, optoelectronics, semiconductor packaging, a me nā kahua noiʻi holomua.
Ua kaulana ʻo Sapphire no kona paʻakikī kūikawā a me ke kūpaʻa o ke kūkulu ʻana, me ka paʻakikī Mohs o 9, ʻo ka lua wale nō i ka daimana. Ma ka hoʻomalu pono ʻana i nā palena etching, hiki ke hoʻokumu ʻia nā micro-structures i wehewehe pono ʻia a hana hou ʻia ma luna o ka ʻili sapphire, e hōʻoiaʻiʻo ana i nā kihi hoʻohālike ʻoi, ke geometry paʻa, a me ke kūlike maikaʻi loa ma nā ʻāpana.

Nā ʻenehana kālai ʻana
Ka ʻoki ʻana i ka pulu
Hoʻohana ka ʻoki pulu i nā hopena kemika kūikawā e wehe koho i nā mea sapphire a hana i nā microstructures i makemake ʻia. Hāʻawi kēia kaʻina hana i ka throughput kiʻekiʻe, ka like maikaʻi, a me ke kumukūʻai hana haʻahaʻa, e kūpono ana no ka hoʻolālā ʻana i kahi nui a me nā noi me nā koi ʻaoʻao ʻaoʻao waena.
Ma ka hoʻomalu pono ʻana i ka haku mele ʻana o ka hopena, ka mahana, a me ka manawa etching, hiki ke hoʻokō ʻia ka kaohi paʻa o ka hohonu etch a me ke ʻano o ka ʻili. Hoʻohana nui ʻia nā wafers sapphire wet-etched i nā substrates packaging LED, nā papa kākoʻo kūkulu, a me nā noi MEMS i koho ʻia.
Ka ʻoki maloʻo
ʻO ke kālai maloʻo, e like me ke kālai plasma a i ʻole ke kālai ion reactive (RIE), hoʻohana i nā ion ikehu kiʻekiʻe a i ʻole nā ʻano reactive e kālai i ka sapphire ma o nā ʻano kino a me nā kemika. Hāʻawi kēia ʻano hana i ka anisotropy kiʻekiʻe, ka pololei kiʻekiʻe, a me ka hiki ke hoʻoili ʻano maikaʻi loa, e hiki ai ke hana ʻia nā hiʻohiʻona maikaʻi a me nā microstructures ratio kiʻekiʻe.
He kūpono loa ke kālai maloʻo no nā noi e pono ai nā paia ʻaoʻao kū pololei, ka wehewehe ʻana i nā hiʻohiʻona ʻoi, a me ka kaohi paʻa o ka dimensional, e like me nā polokalamu Micro-LED, ka hoʻopili semiconductor holomua, a me nā ʻano MEMS hana kiʻekiʻe.
Nā Hiʻohiʻona Koʻikoʻi a me nā Pōmaikaʻi
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ʻO ka substrate sapphire kristal hoʻokahi kiʻekiʻe me ka ikaika mechanical maikaʻi loa
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Nā koho hana maʻalahi: kālai pulu a kālai maloʻo paha ma muli o nā koi noi
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Paʻakikī kiʻekiʻe a me ke kūpaʻa ʻana no ka hilinaʻi lōʻihi
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Paʻa wela a me ke kemika maikaʻi loa, kūpono no nā ʻano ʻino
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ʻO ke aniani optical kiʻekiʻe a me nā waiwai dielectric paʻa
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ʻO ke ʻano like o ke ʻano a me ke kūlike o ka batch-to-batch
Nā noi
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Nā mea hoʻopili a me nā mea hoʻāʻo LED a me Micro-LED
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Nā mea lawe ʻāpana semiconductor a me ka hoʻopili holomua
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Nā mea ʻike MEMS a me nā ʻōnaehana micro-electromechanical
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Nā ʻāpana optical a me nā ʻōnaehana hoʻonohonoho pololei
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Nā ʻoihana noiʻi a me ka hoʻomohala ʻana i nā ʻano micro-structure i hoʻopilikino ʻia
Hoʻopilikino a me nā lawelawe
Hāʻawi mākou i nā lawelawe hoʻopilikino piha, me ka hoʻolālā ʻano, ke koho ʻana i ke ʻano etching (pulu a maloʻo paha), ka hoʻomalu hohonu etch, nā koho mānoanoa a me ka nui o ka substrate, ka etching ʻaoʻao hoʻokahi a ʻelua paha ʻaoʻao, a me nā ʻano polishing ʻili. ʻO ka hoʻomalu maikaʻi a me nā kaʻina hana nānā e hōʻoia i kēlā me kēia wafer i etch ʻia me ka sapphire e hoʻokō i nā kūlana hilinaʻi kiʻekiʻe a me ka hana ma mua o ka lawe ʻana.
Nā Nīnau i Nīnau Pinepine ʻia - Nā Nīnau i Nīnau Pinepine ʻia
Q1: He aha ka ʻokoʻa ma waena o ke kālai ʻana i ka pulu a me ke kālai ʻana i ka maloʻo no ka sapeiro?
A:Hoʻokumu ʻia ke kālai ʻana i ka pulu ma nā hopena kemika a kūpono no ka hana ʻana ma kahi ākea a me ke kumukūʻai kūpono, ʻoiai ʻo ke kālai maloʻo e hoʻohana i nā ʻano hana plasma a i ʻole ion e hoʻokō i ka pololei kiʻekiʻe, ka anisotropy maikaʻi, a me ka kaohi hiʻohiʻona maikaʻi. Aia ke koho i ka paʻakikī o ke kūkulu ʻana, nā koi pololei, a me nā noʻonoʻo kumukūʻai.
Q2: ʻO wai ke kaʻina hana etching e koho ai no kaʻu noi?
A:Manaʻo ʻia ke kālai ʻana i ka pulu no nā noi e pono ai nā ʻano like me ka pololei kūpono, e like me nā substrates LED maʻamau. ʻOi aku ka kūpono o ke kālai maloʻo no nā noi hoʻonā kiʻekiʻe, ratio ʻano kiʻekiʻe, a i ʻole Micro-LED a me MEMS kahi e koʻikoʻi ai ke geometry pololei.
Q3: Hiki iā ʻoe ke kākoʻo i nā ʻano hana a me nā kikoʻī i hana ʻia?
A:ʻAe. Kākoʻo mākou i nā hoʻolālā i hoʻopilikino piha ʻia, me ka hoʻonohonoho ʻana o ke ʻano, ka nui o nā hiʻohiʻona, ka hohonu o ke kālai ʻana, ka mānoanoa o ka wafer, a me nā ana o ka substrate.
E pili ana iā mākou
He loea ʻo XKH i ka hoʻomohala ʻenehana kiʻekiʻe, ka hana ʻana, a me ke kūʻai aku ʻana i ke aniani optical kūikawā a me nā mea kristal hou. Lawelawe kā mākou huahana i nā mea uila optical, nā mea uila mea kūʻai aku, a me ka pūʻali koa. Hāʻawi mākou i nā ʻāpana optical Sapphire, nā uhi lens kelepona paʻalima, Ceramics, LT, Silicon Carbide SIC, Quartz, a me nā wafers kristal semiconductor. Me ka ʻike loea a me nā lako hana kiʻekiʻe, ʻoi aku mākou i ka hana ʻana i nā huahana maʻamau ʻole, me ka manaʻo e lilo i alakaʻi i nā mea optoelectronic ʻoihana ʻenehana kiʻekiʻe.












