ʻO nā lako ulu ʻo Sapphire Ingot Czochralski CZ Method no ka hana ʻana i nā wafers Sapphire 2inch-12inch

Wehewehe Pōkole:

ʻO ka Lako Hana Hoʻoulu ʻo Sapphire Ingot (Czochralski Method) he ʻōnaehana ʻoi loa i hoʻolālā ʻia no ka ulu ʻana o ka kristal hoʻokahi sapphire maʻemaʻe kiʻekiʻe a haʻahaʻa ka hemahema. Hiki i ke ʻano hana Czochralski (CZ) ke kaohi pololei i ka wikiwiki o ka huki ʻana o ka kristal hua (0.5-5 mm/h), ka wikiwiki o ka hoʻohuli ʻana (5-30 rpm), a me nā gradients mahana i loko o kahi ipu hoʻoheheʻe iridium, e hana ana i nā kristal axisymmetric a hiki i 12 ʻīniha (300 mm) ke anawaena. Kākoʻo kēia lako i ka kaohi ʻana i ke kuhikuhi ʻana o ka kristal C/A-plane, e hiki ai ke ulu o ka sapphire optical-grade, electronic-grade, a me ka doped sapphire (e laʻa, Cr³⁺ ruby, Ti³⁺ star sapphire).

Hāʻawi ʻo XKH i nā hoʻonā āpau-a-hopena, me ka hoʻopilikino ʻana i nā lako (hana wafer 2-12-'īniha), ka hoʻonui ʻana i ke kaʻina hana (ka nui o nā hemahema <100/cm²), a me ke aʻo loea, me ka hoʻopuka mahina o 5,000+ wafers no nā noi e like me nā substrates LED, GaN epitaxy, a me ka hoʻopili semiconductor.


Nā hiʻohiʻona

Kumu Hana

Hana ʻia ke ʻano hana CZ ma o nā hana aʻe:
1. Hoʻoheheʻe ʻana i nā mea maka: Hoʻoheheʻe ʻia ka Al₂O₃ kiʻekiʻe-maʻemaʻe (maʻemaʻe >99.999%) i loko o kahi ipu hoʻoheheʻe iridium ma 2050–2100°C.
2. Hoʻolauna ʻana i ka Crystal Hua: Hoʻohaʻahaʻa ʻia kahi kristal hua i loko o ka mea heheʻe, a ukali ʻia e ka huki wikiwiki ʻana e hana i kahi ʻāʻī (ke anawaena <1 mm) e hoʻopau i nā dislocations.
3. Ka Hoʻokumu ʻana o ka Poʻohiwi a me ka Ulu Nui: Hoʻemi ʻia ka wikiwiki o ka huki ʻana i 0.2–1 mm/h, e hoʻonui mālie ana i ke anawaena kristal i ka nui i manaʻo ʻia (e laʻa, 4–12 ʻīniha).
4. Hoʻoheheʻe ʻia a me ka hoʻolulu ʻana: Hoʻolulu ʻia ke aniani ma 0.1–0.5°C/min e hōʻemi i ka haki ʻana i hoʻokumu ʻia e ke kaumaha wela.
5. Nā ʻAno Crystal Hoʻohālikelike:
Papa Uila: Nā substrates Semiconductor (TTV <5 μm)
Papa ʻIke: nā puka makani laser UV (transmittance >90%@200 nm)
Nā ʻano like ʻole i hoʻohui ʻia: Ruby (Cr³⁺ concentration 0.01–0.5 wt.%), tubing sapeiro polū

Nā ʻĀpana ʻŌnaehana Koʻikoʻi

1. ʻŌnaehana Hoʻoheheʻe
​​Iridium Crucible: Kūpaʻa i 2300°C, kū i ka pala, kūpono me nā mea heheʻe nui (100–400 kg).
​​Ka umu hoʻomehana hoʻokomo: Ka mana wela kūʻokoʻa multi-zone (± 0.5°C), nā gradients thermal i hoʻomaikaʻi ʻia.

2. ʻŌnaehana Huki a me ka Hoʻohuli
​​Motoka Servo Kiʻekiʻe-Kiko: Hoʻonā huki 0.01 mm/h, concentricity rotational <0.01 mm.
Sila Wai Uku Makeneka: Hoʻoili ʻole ʻia no ka ulu mau ʻana (>72 mau hola).

3. ʻŌnaehana Mana Wela
​​Mana PID Pani-Loop: Hoʻoponopono mana manawa maoli (50–200 kW) e hoʻopaʻa i ke kahua wela.
​​Ka Palekana Kinoea Inert: Ka hui ʻana o Ar/N₂ (99.999% maʻemaʻe) e pale aku i ka oxidation.

4. Hana Hoʻokele Hana a me ka Nānā ʻana
​​Ka Nānā ʻana i ke Anawaena CCD: Manaʻo pane manawa maoli (pololei ±0.01 mm).
​​Infrared Thermography: Nānā i ke ʻano o ka pilina paʻa-wai.

Hoʻohālikelike ʻana o ke ʻano hana CZ vs. KY

Palena Ke ʻano hana CZ Ke ʻano hana KY
Nui Loa o ke Aniani 12 ʻīniha (300 mm) 400 mm (ʻāpana ʻano pea)
Ka nui o ke kīnā <100/cm² <50/cm²
Ka wikiwiki o ka ulu ʻana 0.5–5 mm/h 0.1–2 mm/h
Ka hoʻohana ʻana i ka ikehu 50–80 kWh/kg 80–120 kWh/kg
Nā noi Nā substrates LED, GaN epitaxy Nā puka makani ʻōlinolino, nā ʻāpana nui
Kumukūʻai Waena (hoʻopukapuka lako kiʻekiʻe) Kiʻekiʻe (kaʻina hana paʻakikī)

Nā Noi Koʻikoʻi

1. ʻOihana Semiconductor
​​GaN Epitaxial Substrates​​: nā wafers 2–8-'īniha (TTV <10 μm) no nā Micro-LED a me nā diode laser.
​​Nā Wafers SOI: ʻO ka ʻoʻoleʻa o ka ʻili <0.2 nm no nā ʻāpana i hoʻohui ʻia me 3D.

2. Optoelectronics
​​Nā Puka makani Laser UV: Kū i ka mana o 200 W/cm² no nā optics lithography.
​​Nā ʻĀpana Infrared​​: Ka helu omo <10⁻³ cm⁻¹ no ke kiʻi wela.

3. Nā Uila Mea Kūʻai
​​Nā Uhi Kāmela Kelepona akamai: Hoʻomaikaʻi ʻia ke kūpaʻa ʻana i ke kahakaha ʻana me ka paʻakikī Mohs 9, 10 ×.
​​Nā Hōʻikeʻike Uaki Akamai: Mānoanoa 0.3–0.5 mm, transmittance >92%.

4. Pale Kaua a me ka Lehulehu
​​Nuclear Reactor Windows​​: Ke ahonui i ka pāhawewe a hiki i ka 10¹⁶ n/cm².
​​Nā Aniani Laser Mana Kiʻekiʻe​​: Hoʻololi wela <λ/20@1064 nm.

Nā lawelawe a XKH

1. Hoʻopilikino ʻana i nā lako
​​Hoʻolālā Keʻena Hoʻonui: Nā hoʻonohonoho Φ200–400 mm no ka hana wafer 2–12-'īniha.
​​​Ka Maʻalahi o ka Doping​​: Kākoʻo i ka doping honua laha ʻole (Er/Yb) a me ka metala hoʻololi (Ti/Cr) no nā waiwai optoelectronic i hana kūikawā ʻia.

2. Kākoʻo Hoʻopau-a-Hopena
​​Hoʻonui Hana: Nā kuhikuhi i hōʻoia mua ʻia (50+) no nā LED, nā mea RF, a me nā ʻāpana i hoʻopaʻakikī ʻia e ka radiation.
Pūnaewele Lawelawe Honua: Nā hōʻailona mamao 24/7 a me ka mālama ʻana ma kahi me ka palapala hoʻokō 24 mahina.

3. Ka Hana ʻana ma lalo
Hana ʻana i nā wafer: ʻOkiʻoki, wili, a me ka hoʻowali ʻana no nā wafer 2-12-'īniha (C/A-plane).
Nā Huahana Waiwai Hoʻohui:
​​Nā ʻĀpana Maka: Nā puka makani UV/IR (mānoanoa 0.5–50 mm).
​​Nā Mea Hana Pae Hoʻonani: Cr³⁺ ruby ​​(palapala hōʻoia GIA), Ti³⁺ star sapphire.

4. Alakaʻi ʻenehana
Nā Palapala Hōʻoia: Nā wafers EMI-compliant.
​​Nā Palapala Sila Nui: Nā palapala sila nui i ka hana hou ʻana o ke ʻano CZ.

Hopena

Hāʻawi nā lako hana CZ i ka hoʻohālikelike nui, nā helu kīnā haʻahaʻa loa, a me ke kūpaʻa o ke kaʻina hana kiʻekiʻe, e lilo ia i pae hoʻohālikelike ʻoihana no nā LED, semiconductor, a me nā noi pale. Hāʻawi ʻo XKH i ke kākoʻo piha mai ka hoʻolaha ʻana o nā lako a hiki i ka hana ʻana ma hope o ka ulu ʻana, e hiki ai i nā mea kūʻai aku ke hoʻokō i ka hana kristal sapphire kiʻekiʻe a me ke kumukūʻai kūpono.

ʻUmu ulu ʻoka sapphire 4
ʻUmu ulu ʻoka sapphire 5

  • Ma mua:
  • Aʻe:

  • E kākau i kāu leka ma aneʻi a hoʻouna mai iā mākou