ʻO nā lako ulu ʻo Sapphire Ingot Czochralski CZ Method no ka hana ʻana i nā wafers Sapphire 2inch-12inch
Kumu Hana
Hana ʻia ke ʻano hana CZ ma o nā hana aʻe:
1. Hoʻoheheʻe ʻana i nā mea maka: Hoʻoheheʻe ʻia ka Al₂O₃ kiʻekiʻe-maʻemaʻe (maʻemaʻe >99.999%) i loko o kahi ipu hoʻoheheʻe iridium ma 2050–2100°C.
2. Hoʻolauna ʻana i ka Crystal Hua: Hoʻohaʻahaʻa ʻia kahi kristal hua i loko o ka mea heheʻe, a ukali ʻia e ka huki wikiwiki ʻana e hana i kahi ʻāʻī (ke anawaena <1 mm) e hoʻopau i nā dislocations.
3. Ka Hoʻokumu ʻana o ka Poʻohiwi a me ka Ulu Nui: Hoʻemi ʻia ka wikiwiki o ka huki ʻana i 0.2–1 mm/h, e hoʻonui mālie ana i ke anawaena kristal i ka nui i manaʻo ʻia (e laʻa, 4–12 ʻīniha).
4. Hoʻoheheʻe ʻia a me ka hoʻolulu ʻana: Hoʻolulu ʻia ke aniani ma 0.1–0.5°C/min e hōʻemi i ka haki ʻana i hoʻokumu ʻia e ke kaumaha wela.
5. Nā ʻAno Crystal Hoʻohālikelike:
Papa Uila: Nā substrates Semiconductor (TTV <5 μm)
Papa ʻIke: nā puka makani laser UV (transmittance >90%@200 nm)
Nā ʻano like ʻole i hoʻohui ʻia: Ruby (Cr³⁺ concentration 0.01–0.5 wt.%), tubing sapeiro polū
Nā ʻĀpana ʻŌnaehana Koʻikoʻi
1. ʻŌnaehana Hoʻoheheʻe
Iridium Crucible: Kūpaʻa i 2300°C, kū i ka pala, kūpono me nā mea heheʻe nui (100–400 kg).
Ka umu hoʻomehana hoʻokomo: Ka mana wela kūʻokoʻa multi-zone (± 0.5°C), nā gradients thermal i hoʻomaikaʻi ʻia.
2. ʻŌnaehana Huki a me ka Hoʻohuli
Motoka Servo Kiʻekiʻe-Kiko: Hoʻonā huki 0.01 mm/h, concentricity rotational <0.01 mm.
Sila Wai Uku Makeneka: Hoʻoili ʻole ʻia no ka ulu mau ʻana (>72 mau hola).
3. ʻŌnaehana Mana Wela
Mana PID Pani-Loop: Hoʻoponopono mana manawa maoli (50–200 kW) e hoʻopaʻa i ke kahua wela.
Ka Palekana Kinoea Inert: Ka hui ʻana o Ar/N₂ (99.999% maʻemaʻe) e pale aku i ka oxidation.
4. Hana Hoʻokele Hana a me ka Nānā ʻana
Ka Nānā ʻana i ke Anawaena CCD: Manaʻo pane manawa maoli (pololei ±0.01 mm).
Infrared Thermography: Nānā i ke ʻano o ka pilina paʻa-wai.
Hoʻohālikelike ʻana o ke ʻano hana CZ vs. KY
| Palena | Ke ʻano hana CZ | Ke ʻano hana KY |
| Nui Loa o ke Aniani | 12 ʻīniha (300 mm) | 400 mm (ʻāpana ʻano pea) |
| Ka nui o ke kīnā | <100/cm² | <50/cm² |
| Ka wikiwiki o ka ulu ʻana | 0.5–5 mm/h | 0.1–2 mm/h |
| Ka hoʻohana ʻana i ka ikehu | 50–80 kWh/kg | 80–120 kWh/kg |
| Nā noi | Nā substrates LED, GaN epitaxy | Nā puka makani ʻōlinolino, nā ʻāpana nui |
| Kumukūʻai | Waena (hoʻopukapuka lako kiʻekiʻe) | Kiʻekiʻe (kaʻina hana paʻakikī) |
Nā Noi Koʻikoʻi
1. ʻOihana Semiconductor
GaN Epitaxial Substrates: nā wafers 2–8-'īniha (TTV <10 μm) no nā Micro-LED a me nā diode laser.
Nā Wafers SOI: ʻO ka ʻoʻoleʻa o ka ʻili <0.2 nm no nā ʻāpana i hoʻohui ʻia me 3D.
2. Optoelectronics
Nā Puka makani Laser UV: Kū i ka mana o 200 W/cm² no nā optics lithography.
Nā ʻĀpana Infrared: Ka helu omo <10⁻³ cm⁻¹ no ke kiʻi wela.
3. Nā Uila Mea Kūʻai
Nā Uhi Kāmela Kelepona akamai: Hoʻomaikaʻi ʻia ke kūpaʻa ʻana i ke kahakaha ʻana me ka paʻakikī Mohs 9, 10 ×.
Nā Hōʻikeʻike Uaki Akamai: Mānoanoa 0.3–0.5 mm, transmittance >92%.
4. Pale Kaua a me ka Lehulehu
Nuclear Reactor Windows: Ke ahonui i ka pāhawewe a hiki i ka 10¹⁶ n/cm².
Nā Aniani Laser Mana Kiʻekiʻe: Hoʻololi wela <λ/20@1064 nm.
Nā lawelawe a XKH
1. Hoʻopilikino ʻana i nā lako
Hoʻolālā Keʻena Hoʻonui: Nā hoʻonohonoho Φ200–400 mm no ka hana wafer 2–12-'īniha.
Ka Maʻalahi o ka Doping: Kākoʻo i ka doping honua laha ʻole (Er/Yb) a me ka metala hoʻololi (Ti/Cr) no nā waiwai optoelectronic i hana kūikawā ʻia.
2. Kākoʻo Hoʻopau-a-Hopena
Hoʻonui Hana: Nā kuhikuhi i hōʻoia mua ʻia (50+) no nā LED, nā mea RF, a me nā ʻāpana i hoʻopaʻakikī ʻia e ka radiation.
Pūnaewele Lawelawe Honua: Nā hōʻailona mamao 24/7 a me ka mālama ʻana ma kahi me ka palapala hoʻokō 24 mahina.
3. Ka Hana ʻana ma lalo
Hana ʻana i nā wafer: ʻOkiʻoki, wili, a me ka hoʻowali ʻana no nā wafer 2-12-'īniha (C/A-plane).
Nā Huahana Waiwai Hoʻohui:
Nā ʻĀpana Maka: Nā puka makani UV/IR (mānoanoa 0.5–50 mm).
Nā Mea Hana Pae Hoʻonani: Cr³⁺ ruby (palapala hōʻoia GIA), Ti³⁺ star sapphire.
4. Alakaʻi ʻenehana
Nā Palapala Hōʻoia: Nā wafers EMI-compliant.
Nā Palapala Sila Nui: Nā palapala sila nui i ka hana hou ʻana o ke ʻano CZ.
Hopena
Hāʻawi nā lako hana CZ i ka hoʻohālikelike nui, nā helu kīnā haʻahaʻa loa, a me ke kūpaʻa o ke kaʻina hana kiʻekiʻe, e lilo ia i pae hoʻohālikelike ʻoihana no nā LED, semiconductor, a me nā noi pale. Hāʻawi ʻo XKH i ke kākoʻo piha mai ka hoʻolaha ʻana o nā lako a hiki i ka hana ʻana ma hope o ka ulu ʻana, e hiki ai i nā mea kūʻai aku ke hoʻokō i ka hana kristal sapphire kiʻekiʻe a me ke kumukūʻai kūpono.









