SiC wafer 4H-N 6H-N HPSI 4H-semi 6H-semi 4H-P 6H-P 3C ʻano 2 ʻīniha 3 ʻīniha 4 ʻīniha 6 ʻīniha 8 ʻīniha
Nā Waiwai
4H-N a me 6H-N (N-ʻano SiC Wafers)
Noi:Hoʻohana nui ʻia i nā mea uila mana, optoelectronics, a me nā noi wela kiʻekiʻe.
Ka laulā o ke anawaena:50.8 mm a i 200 mm.
Mānoanoa:350 μm ± 25 μm, me nā mānoanoa koho o 500 μm ± 25 μm.
Ke kū'ē ʻana:ʻAno-N 4H/6H-P: ≤ 0.1 Ω·cm (papa-Z), ≤ 0.3 Ω·cm (papa-P); ʻAno-N 3C-N: ≤ 0.8 mΩ·cm (papa-Z), ≤ 1 mΩ·cm (papa-P).
ʻOʻoleʻa:ʻO Ra ≤ 0.2 nm (CMP a i ʻole MP).
Ka nui o ka Micropipe (MPD):< 1 kēlā me kēia kenimika².
TTV: ≤ 10 μm no nā anawaena āpau.
ʻŌwiliwili: ≤ 30 μm (≤ 45 μm no nā wafers 8-'īniha).
Hoʻokaʻawale ʻana i ka lihi:3 mm a 6 mm ma muli o ke ʻano o ka wafer.
Pūʻolo:Kaseti wafer multi-wafer a i ʻole ka pahu wafer hoʻokahi.
ʻO ka nui i loaʻa he 3'īniha 4'īniha 6'īniha 8'īniha
HPSI (Nā Wafers SiC Semi-Insulating Maʻemaʻe Kiʻekiʻe)
Noi:Hoʻohana ʻia no nā hāmeʻa e pono ai ke kūpaʻa kiʻekiʻe a me ka hana paʻa, e like me nā hāmeʻa RF, nā noi photonic, a me nā mea ʻike.
Ka laulā o ke anawaena:50.8 mm a i 200 mm.
Mānoanoa:ʻO ka mānoanoa maʻamau o 350 μm ± 25 μm me nā koho no nā wafers mānoanoa a hiki i 500 μm.
ʻOʻoleʻa:Ra ≤ 0.2 nm.
Ka nui o ka Micropipe (MPD): ≤ 1 ea/cm².
Ke kū'ē ʻana:ʻO ke kūpaʻa kiʻekiʻe, hoʻohana pinepine ʻia i nā noi semi-insulating.
ʻŌwiliwili: ≤ 30 μm (no nā nui liʻiliʻi), ≤ 45 μm no nā anawaena nui aʻe.
TTV: ≤ 10 μm.
ʻO ka nui i loaʻa he 3'īniha 4'īniha 6'īniha 8'īniha
4H-P、6H-P&3C Wafer SiC(Nā Wafers SiC ʻano-P)
Noi:ʻO ke kumu nui no ka mana a me nā hāmeʻa alapine kiʻekiʻe.
Ka laulā o ke anawaena:50.8 mm a i 200 mm.
Mānoanoa:350 μm ± 25 μm a i ʻole nā koho i hoʻopilikino ʻia.
Ke kū'ē ʻana:ʻAno-P 4H/6H-P: ≤ 0.1 Ω·cm (papa-Z), ≤ 0.3 Ω·cm (papa-P).
ʻOʻoleʻa:ʻO Ra ≤ 0.2 nm (CMP a i ʻole MP).
Ka nui o ka Micropipe (MPD):< 1 kēlā me kēia kenimika².
TTV: ≤ 10 μm.
Hoʻokaʻawale ʻana i ka lihi:3 mm a i 6 mm.
ʻŌwiliwili: ≤ 30 μm no nā nui liʻiliʻi, ≤ 45 μm no nā nui nui.
ʻO ka nui i loaʻa he 3'īniha 4'īniha 6'īniha5×5 10×10
Papa ʻIkepili ʻĀpana
| Waiwai | 2 ʻīniha | 3'īniha | 4 ʻīniha | 6 ʻīniha | 8 ʻīniha | |||
| ʻAno | 4H-N/HPSI/ | 4H-N/HPSI/ | 4H-N/HPSI//4H/6H-P/3C; | 4H-N/HPSI//4H/6H-P/3C; | 4H-N/HPSI/4H-SEMI | |||
| Anawaena | 50.8 ± 0.3 mm | 76.2±0.3mm | 100 ± 0.3mm | 150±0.3mm | 200 ± 0.3 mm | |||
| Mānoanoa | 330 ± 25 um | 350 ±25 um | 350 ±25 um | 350 ±25 um | 350 ±25 um | |||
| 350±25um; | 500±25um | 500±25um | 500±25um | 500±25um | ||||
| a i hoʻopilikino ʻia paha | a i hoʻopilikino ʻia paha | a i hoʻopilikino ʻia paha | a i hoʻopilikino ʻia paha | a i hoʻopilikino ʻia paha | ||||
| ʻOʻoleʻa | Ra ≤ 0.2nm | Ra ≤ 0.2nm | Ra ≤ 0.2nm | Ra ≤ 0.2nm | Ra ≤ 0.2nm | |||
| ʻŌwiliwili | ≤ 30um | ≤ 30um | ≤ 30um | ≤ 30um | ≤45um | |||
| TTV | ≤ 10um | ≤ 10um | ≤ 10um | ≤ 10um | ≤ 10um | |||
| Kāhili/ʻEli | CMP/MP | |||||||
| MPD | <1ea/cm-2 | <1ea/cm-2 | <1ea/cm-2 | <1ea/cm-2 | <1ea/cm-2 | |||
| ʻAno | Poepoe, Pālahalaha 16mm; ʻO ka lōʻihi he 22mm; ʻO ka lōʻihi he 30/32.5mm; ʻO ka lōʻihi he 47.5mm; ʻUku; ʻUku; | |||||||
| Bevel | 45°, SEMI Spec; ʻAno C | |||||||
| Papa | Papa hana no MOS&SBD; Papa noiʻi; Papa Dummy, Papa wafer hua | |||||||
| Nā Manaʻo | Ke anawaena, ka mānoanoa, ke kuhikuhi ʻana, hiki ke hoʻopilikino ʻia nā kikoʻī ma luna ma kāu noi | |||||||
Nā noi
·Nā Uila Mana
He mea koʻikoʻi nā wafers SiC ʻano N i nā mea uila mana ma muli o ko lākou hiki ke lawelawe i ke voltage kiʻekiʻe a me ke au kiʻekiʻe. Hoʻohana pinepine ʻia lākou i nā mea hoʻololi mana, nā inverters, a me nā hoʻokele motika no nā ʻoihana e like me ka ikehu hou, nā kaʻa uila, a me ka automation ʻoihana.
· ʻOptoelectronics
Hoʻohana ʻia nā mea SiC ʻano N, ʻoi aku hoʻi no nā noi optoelectronic, i nā mea hana e like me nā diode emitting light (LED) a me nā diode laser. ʻO ko lākou conductivity thermal kiʻekiʻe a me ka bandgap ākea e kūpono ai lākou no nā mea hana optoelectronic hana kiʻekiʻe.
·Nā Hana Mahana Kiʻekiʻe
He kūpono loa nā wafers 4H-N 6H-N SiC no nā wahi wela kiʻekiʻe, e like me nā mea ʻike a me nā mea mana i hoʻohana ʻia i nā noi aerospace, automotive, a me nā ʻoihana kahi e koʻikoʻi ai ka hoʻopuehu ʻana o ka wela a me ke kūpaʻa i nā mahana kiʻekiʻe.
·Nā Mea Hana RF
Hoʻohana ʻia nā wafers 4H-N 6H-N SiC i nā mea hana alapine lekiō (RF) e hana ana ma nā pae alapine kiʻekiʻe. Hoʻohana ʻia lākou i nā ʻōnaehana kamaʻilio, ʻenehana radar, a me nā kamaʻilio ukali, kahi e pono ai ka pono o ka mana kiʻekiʻe a me ka hana.
·Nā noi Photonic
I loko o nā photonics, hoʻohana ʻia nā wafers SiC no nā mea hana e like me nā photodetectors a me nā modulators. ʻO nā waiwai kūikawā o ka mea e ʻae iā ia e lilo i mea kūpono i ka hana ʻana o ka mālamalama, modulation, a me ka ʻike ʻana i nā ʻōnaehana kamaʻilio optical a me nā mea hana kiʻi.
·Nā mea ʻike
Hoʻohana ʻia nā wafers SiC i nā ʻano hana sensor like ʻole, ʻoi aku hoʻi i nā wahi ʻino kahi e hāʻule ai nā mea ʻē aʻe. ʻO kēia mau mea e komo pū me ka mahana, ke kaomi, a me nā sensor kemika, he mea nui ia i nā kahua e like me ke kaʻa, ka ʻaila a me ke kinoea, a me ka nānā ʻana i ke kaiapuni.
·Nā ʻōnaehana hoʻokele kaʻa uila
He kuleana koʻikoʻi ko ka ʻenehana SiC i nā kaʻa uila ma o ka hoʻomaikaʻi ʻana i ka pono a me ka hana o nā ʻōnaehana hoʻokele. Me nā semiconductors mana SiC, hiki i nā kaʻa uila ke hoʻokō i ke ola pākaukau ʻoi aku ka maikaʻi, nā manawa hoʻouka wikiwiki, a me ka pono ikehu ʻoi aku ka nui.
·Nā Sensors Holomua a me nā mea hoʻololi Photonic
I nā ʻenehana sensor holomua, hoʻohana ʻia nā wafers SiC no ka hana ʻana i nā sensor kiʻekiʻe no nā noi ma robotics, nā mea lapaʻau, a me ka nānā ʻana i ke kaiapuni. I nā mea hoʻololi photonic, hoʻohana ʻia nā waiwai o SiC e hiki ai ke hoʻololi pono i ka ikehu uila i nā hōʻailona optical, he mea nui ia i nā kamaʻilio a me nā ʻoihana pūnaewele wikiwiki.
Nīnau a me nā Pane
Q:He aha ka 4H i loko o ka 4H SiC?
AʻO "4H" ma 4H SiC e pili ana i ke ʻano kristal o ka silicon carbide, ʻo ia hoʻi kahi ʻano hexagonal me ʻehā papa (H). Hōʻike ka "H" i ke ʻano o ka polytype hexagonal, e hoʻokaʻawale ana iā ia mai nā polytype SiC ʻē aʻe e like me 6H a i ʻole 3C.
Q:He aha ka conductivity thermal o 4H-SiC?
AʻO ke alakaʻi wela o 4H-SiC (Silicon Carbide) ma kahi o 490-500 W/m·K ma ka mahana o ka lumi. ʻO kēia alakaʻi wela kiʻekiʻe e kūpono ia no nā noi ma nā mea uila mana a me nā wahi wela kiʻekiʻe, kahi e koʻikoʻi ai ka hoʻolaha wela maikaʻi.














