2'īniha SiC ingot Dia50.8mmx10mmt 4H-N monocrystal

2inch SiC ingot Dia50.8mmx10mmt 4H-N monocrystal Kiʻi i hōʻike ʻia

Wehewehe Pōkole:

ʻO ka ingot SiC (silicon carbide) 2-'īniha e pili ana i kahi kristal hoʻokahi cylindrical a i ʻole poloka o ka silicon carbide me ke anawaena a i ʻole ka lōʻihi o ka lihi o 2 'īniha. Hoʻohana ʻia nā ingot Silicon carbide ma ke ʻano he mea hoʻomaka no ka hana ʻana o nā mea semiconductor like ʻole, e like me nā mea uila mana a me nā mea optoelectronic.

E leka uila mai iā mākou

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ʻenehana ulu kristal SiC

ʻO nā ʻano o SiC e paʻakikī ai ka ulu ʻana i nā kristal hoʻokahi. ʻO ke kumu nui o kēia, ʻaʻohe pae wai me ka lakio stoichiometric o Si: C = 1: 1 ma ke kaomi lewa, a ʻaʻole hiki ke ulu iā SiC e nā ʻano ulu ʻoi aku ka makua, e like me ke ʻano huki pololei a me ke ʻano ipu hoʻoheheʻe hāʻule, ʻo ia nā kumu nui o ka ʻoihana semiconductor. Ma ke kumumanaʻo, hiki ke loaʻa kahi hopena me ka lakio stoichiometric o Si: C = 1: 1 ke ʻoi aku ke kaomi ma mua o 10E5atm a ʻoi aku ke kiʻekiʻe o ka mahana ma mua o 3200℃. I kēia manawa, ʻo nā ʻano hana nui e komo pū ana me ke ʻano PVT, ke ʻano wai-pae, a me ke ʻano hoʻokaʻawale kemika vapor-pae kiʻekiʻe.

ʻO nā wafers SiC a me nā kristal a mākou e hāʻawi nei ua ulu nui ʻia e ka halihali mahu kino (PVT), a eia kahi hoʻolauna pōkole i ka PVT:

Ua hoʻomaka ke ʻano hana halihali mahu kino (PVT) mai ke ʻano hana sublimation gas-phase i hana ʻia e Lely i ka makahiki 1955, kahi e waiho ʻia ai ka pauka SiC i loko o kahi paipu graphite a hoʻomehana ʻia i kahi mahana kiʻekiʻe e hoʻoheheʻe a hoʻoluʻu i ka pauka SiC, a laila hoʻomaʻalili ʻia ka paipu graphite, a waiho ʻia a hoʻopili ʻia nā ʻāpana gas-phase i hoʻoheheʻe ʻia o ka pauka SiC ma ke ʻano he mau kristal SiC ma kahi a puni o ka paipu graphite. ʻOiai he paʻakikī kēia ʻano hana e loaʻa ai nā kristal SiC nui a hoʻokahi a he paʻakikī ke kaohi ʻana i ke kaʻina hana waiho ʻana i loko o ka paipu graphite, hāʻawi ia i nā manaʻo no nā mea noiʻi ma hope.

Ua hoʻolauna ʻo YM Tairov et al. ma Rusia i ke kumumanaʻo o ka kristal hua ma kēia kumu, kahi i hoʻoponopono ai i ka pilikia o ke ʻano kristal hiki ʻole ke kaohi a me ke kūlana nucleation o nā kristal SiC. Ua hoʻomau nā mea noiʻi ma hope mai i ka hoʻomaikaʻi ʻana a ma hope ua hoʻomohala i ke ʻano hoʻoili mahu kino (PVT) i hoʻohana ʻia ma ka ʻoihana i kēia lā.

ʻOiai ʻo ke ʻano ulu kristal SiC mua loa, ʻo PVT ke ʻano ulu nui loa no nā kristal SiC. Ke hoʻohālikelike ʻia me nā ʻano hana ʻē aʻe, he haʻahaʻa nā koi o kēia ʻano hana no nā lako ulu, kaʻina hana ulu maʻalahi, ka hiki ke hoʻomalu ikaika, ka hoʻomohala piha a me ka noiʻi ʻana, a ua hoʻomohala mua ʻia.