2 iniha SiC ingot Dia50.8mmx10mmt 4H-N monocrystal

ʻO ka wehewehe pōkole:

ʻO ka ingot 2-ʻīniha SiC (silicon carbide) e pili ana i ka pahu aniani a i ʻole ke ʻano poloka o ka silicon carbide me ke anawaena a i ʻole ka lōʻihi o 2 iniha.Hoʻohana ʻia nā ingots Silicon carbide i mea hoʻomaka no ka hana ʻana i nā mea semiconductor like ʻole, e like me nā mea uila uila a me nā mea optoelectronic.

E hoʻouna i ka leka uila iā mākou

Huahana Huahana

ʻO ka ʻenehana ʻo SiC Crystal Growth

ʻO nā hiʻohiʻona o SiC he mea paʻakikī ke ulu i nā kristal hoʻokahi.ʻO kēia ma muli o ka loaʻa ʻole o ka pae wai me ka ratio stoichiometric o Si: C = 1: 1 ma ke kaomi ʻana i ka lewa, a ʻaʻole hiki ke ulu ʻo SiC e nā ʻano ulu ulu ʻoi aʻe, e like me ke ala kiʻi pololei a me ʻO ke ala hāʻule crucible, ʻo ia nā kumu nui o ka ʻoihana semiconductor.ʻO ka manaʻo, hiki ke loaʻa ka hopena me ka ratio stoichiometric o Si: C = 1: 1 inā ʻoi aku ka nui o ke kaomi ma mua o 10E5atm a ʻoi aku ka kiʻekiʻe o ka mahana ma mua o 3200 ℃.I kēia manawa, ʻo nā kaʻina hana koʻikoʻi e pili ana i ke ʻano PVT, ke ʻano wai-phase, a me ke ʻano deposition chemical-phase kiʻekiʻe.

Hoʻoulu nui ʻia nā wafers SiC a me nā crystals a mākou e hoʻolako nei e ka lawe ʻana i ka mahu kino (PVT), a ʻo kēia ka hoʻolauna pōkole i ka PVT:

ʻO ke ʻano o ka lawe ʻana i ka mahu kino (PVT) i hoʻokumu ʻia mai ka ʻenehana sublimation gas-phase i hana ʻia e Lely i ka makahiki 1955, kahi i hoʻokomo ʻia ai ka pauka SiC i loko o kahi paipu graphite a hoʻomehana ʻia i kahi wela kiʻekiʻe e hoʻoheheʻe a hoʻohaʻahaʻa i ka pauka SiC, a laila ka graphite. Hoʻomoe ʻia ka paipu, a waiho ʻia nā ʻāpana kinoea decomposed o ka pauka SiC a hoʻoheheʻe ʻia e like me nā kristal SiC ma kahi a puni o ka paipu graphite.ʻOiai paʻakikī kēia ala e loaʻa ai nā kristal hoʻokahi SiC nui a paʻakikī ke kaʻina hana deposition i loko o ka paipu graphite, hāʻawi ia i nā manaʻo no nā mea noiʻi ma hope.

YM Tairov et al.ma Rūsia ua hoʻokomo i ka manaʻo o ke aniani hua ma kēia kumu, ka mea i hoʻoponopono i ka pilikia o ke ʻano aniani ʻole a me ke kūlana nucleation o nā kristal SiC.Ua hoʻomau ka poʻe noiʻi i ka hoʻomaikaʻi ʻana a ua hoʻomohala i ke ʻano o ka hoʻoili kino kino (PVT) i hoʻohana ʻia i ka ʻoihana i kēia mau lā.

E like me ke ʻano o ka ulu ʻana o ka kristal SiC mua loa, ʻo PVT ke ala ulu nui loa no nā kristal SiC.Ke hoʻohālikelike ʻia me nā ʻano hana ʻē aʻe, he haʻahaʻa nā koi o kēia ʻano no ka ulu ʻana o nā mea ulu, ka maʻalahi o ka ulu ʻana, ka mana ikaika, ka hoʻomohala ʻana a me ka noiʻi, a ua hana mua ʻia.