4H/6H-P 6'īniha SiC wafer Zero MPD grade Production Grade Dummy grade
Papa kuhikuhi maʻamau no nā ʻano SiC Composite 4H/6H-P
6 ʻīniha ke anawaena o ka Silicon Carbide (SiC) Substrate Nā kikoʻī
| Papa | Hana ʻana o ka Zero MPDPapa (Z Papa) | Hana MaʻamauPapa (P Papa) | Papa Dummy (D Papa) | ||
| Anawaena | 145.5 mm~150.0 mm | ||||
| Mānoanoa | 350 μm ± 25 μm | ||||
| Hoʻonohonoho Wafer | -Offaxis: 2.0°-4.0° i ka ʻaoʻao [1120] ± 0.5° no 4H/6H-P, Ma ke axis:〈111〉± 0.5° no 3C-N | ||||
| Ka nui o ka micropipe | 0 kenimika-2 | ||||
| Ke kū'ē ʻana | ʻano-p 4H/6H-P | ≤0.1 Ωꞏcm | ≤0.3 Ωꞏcm | ||
| ʻano-n 3C-N | ≤0.8 mΩꞏcm | ≤1 m Ωꞏcm | |||
| Kūlana Pālahalaha Mua | 4H/6H-P | -{1010} ± 5.0° | |||
| 3C-N | -{110} ± 5.0° | ||||
| Ka Lōʻihi Palahalaha Mua | 32.5 mm ± 2.0 mm | ||||
| Ka Lōʻihi Pālahalaha Lua | 18.0 mm ± 2.0 mm | ||||
| Kūlana Pālahalaha Lua | Ke alo Silicon i luna: 90° CW. mai Prime flat ± 5.0° | ||||
| Hoʻokaʻawale ʻana i ka lihi | 3 mm | 6 mm | |||
| LTV/TTV/Kakaka/Warp | ≤2.5 μm/≤5 μm/≤15 μm/≤30 μm | ≤10 μm / ≤15 μm / ≤25 μm / ≤40 μm | |||
| ʻOʻoleʻa | Polani Ra≤1 nm | ||||
| CMP Ra≤0.2 nm | Ra≤0.5 nm | ||||
| Nā Māwae Lihi e ka Mālamalama Ikaika Kiʻekiʻe | ʻAʻohe | Ka lōʻihi hui ≤ 10 mm, ka lōʻihi hoʻokahi ≤2 mm | |||
| Nā Papa Hex Ma o ke Kukui Ikaika Kiʻekiʻe | ʻĀpana hōʻuluʻulu ≤0.05% | ʻĀpana hōʻuluʻulu ≤0.1% | |||
| Nā wahi Polytype e ka mālamalama ikaika kiʻekiʻe | ʻAʻohe | ʻĀpana hōʻuluʻulu ≤3% | |||
| Nā Hoʻokomo Kalapona ʻIke | ʻĀpana hōʻuluʻulu ≤0.05% | ʻĀpana hōʻuluʻulu ≤3% | |||
| Nā ʻōpala ʻili Silicon e ka mālamalama ikaika kiʻekiʻe | ʻAʻohe | Ka lōʻihi huina ≤1 × ke anawaena wafer | |||
| Kiʻekiʻe nā ʻāpana lihi ma o ka mālamalama ikaika | ʻAʻohe mea i ʻae ʻia ≥0.2mm ka laulā a me ka hohonu | 5 i ʻae ʻia, ≤1 mm kēlā me kēia | |||
| Ka haumia ʻana o ka ʻili Silicon ma o ka ikaika kiʻekiʻe | ʻAʻohe | ||||
| Ka hoʻopili ʻana | Kaseta Wafer Multi-wafer a i ʻole ka Pahu Wafer Hoʻokahi | ||||
Nā memo:
※ Pili nā palena kīnā i ka ʻili wafer holoʻokoʻa koe wale nō ka ʻāpana hoʻokaʻawale lihi. # Pono e nānā ʻia nā ʻōpala ma ka ʻaoʻao Si o
Hoʻohana nui ʻia ka wafer SiC ʻano 4H/6H-P 6-'īniha me ka papa Zero MPD a me ka papa hana a i ʻole ka papa dummy i nā noi uila holomua. ʻO kona conductivity thermal maikaʻi loa, ka voltage breakdown kiʻekiʻe, a me ke kūʻē ʻana i nā ʻano ʻino e kūpono ia no nā mea uila mana, e like me nā kuapo voltage kiʻekiʻe a me nā inverters. Hōʻoia ka papa Zero MPD i nā hemahema liʻiliʻi, koʻikoʻi no nā mea hilinaʻi kiʻekiʻe. Hoʻohana ʻia nā wafers papa hana i ka hana nui ʻana o nā mea mana a me nā noi RF, kahi e koʻikoʻi ai ka hana a me ka pololei. Ma ka ʻaoʻao ʻē aʻe, hoʻohana ʻia nā wafers papa Dummy no ka calibration kaʻina hana, ka hoʻāʻo ʻana i nā lako, a me ka prototyping, e hiki ai ke kaohi maikaʻi mau i nā wahi hana semiconductor.
ʻO nā pono o nā substrates composite N-type SiC e komo pū ana
- Ka Hoʻokele Wera KiʻekiʻeHoʻopau pono ka wafer 4H/6H-P SiC i ka wela, e kūpono ai no nā noi uila wela kiʻekiʻe a me ka mana kiʻekiʻe.
- Ka Uila Haʻihaʻi KiʻekiʻeʻO kona hiki ke lawelawe i nā voltages kiʻekiʻe me ka ʻole o ka hemahema e kūpono ai ia no nā mea uila mana a me nā noi hoʻololi voltage kiʻekiʻe.
- Papa MPD ʻole (Micro Pipe Defect)ʻO ka nui o nā hemahema liʻiliʻi e hōʻoiaʻiʻo i ka hilinaʻi a me ka hana kiʻekiʻe, he mea nui ia no nā polokalamu uila koi.
- Papa Hana no ka Hana Nui ʻana: Kūpono no ka hana nui ʻana o nā mea semiconductor hana kiʻekiʻe me nā kūlana maikaʻi koʻikoʻi.
- Papa Dummy no ka hoʻāʻo ʻana a me ka hoʻoponopono ʻana: Hiki ke hoʻonui i ke kaʻina hana, hoʻāʻo ʻana i nā lako, a me ke ʻano hana prototype me ka ʻole o ka hoʻohana ʻana i nā wafers papa hana kiʻekiʻe.
Ma keʻano holoʻokoʻa, hāʻawi nā wafers SiC 4H/6H-P 6-'īniha me ka Zero MPD grade, ka production grade, a me ka dummy grade i nā pono koʻikoʻi no ka hoʻomohala ʻana i nā mea uila hana kiʻekiʻe. He mea pono loa kēia mau wafers i nā noi e pono ai ka hana wela kiʻekiʻe, ka nui o ka mana kiʻekiʻe, a me ka hoʻololi mana kūpono. Hōʻoia ka Zero MPD grade i nā hemahema liʻiliʻi no ka hana pono a paʻa o ka mea hana, ʻoiai ʻo nā wafers grade-production e kākoʻo i ka hana nui me nā kaohi maikaʻi koʻikoʻi. Hāʻawi nā wafers grade-dummy i kahi hopena kūpono no ka hoʻonui ʻana i ke kaʻina hana a me ka calibration o nā lako, e lilo ia i mea nui no ka hana semiconductor precision kiʻekiʻe.
Kiʻikuhi kikoʻī
