8inihi SiC Production papa wafer 4H-N SiC substrate

8inch SiC Production papa wafer 4H-N SiC substrate Hōʻikeʻike kiʻi

ʻO ka wehewehe pōkole:

Hoʻohana ʻia nā substrates 8-inch SiC i nā mea uila mana kiʻekiʻe, e like me nā MOSFET mana (Metal Oxide Semiconductor Field Effect Transistors), Schottky diodes a me nā mea hana semiconductor mana ʻē aʻe.

E hoʻouna i ka leka uila iā mākou

Huahana Huahana

Hōʻike ka papa ma lalo nei i nā kikoʻī o kā mākou 8inch SiC wafers:

8 iniha N-type SiC DSP Specs
Helu	'ikamu	Unite	Hana ʻia	Ka noiʻi	Dummy
1: nā ʻāpana
1.1	polytype	--	4H	4H	4H
1.2	hoʻonohonoho ʻili	°	<11-20>4±0.5	<11-20>4±0.5	<11-20>4±0.5
2:Ka palena uila
2.1	dopant	--	n-type Nitrogen	n-type Nitrogen	n-type Nitrogen
2.2	kūʻē	ohm ·cm	0.015~0.025	0.01~0.03	NA
3:Ka palena mīkini
3.1	anawaena	mm	200±0.2	200±0.2	200±0.2
3.2	mānoanoa	μm	500±25	500±25	500±25
3.3	Kūlana notch	°	[1- 100]±5	[1- 100]±5	[1- 100]±5
3.4	Hohonu Notch	mm	1~1.5	1~1.5	1~1.5
3.5	LTV	μm	≤5(10mm*10mm)	≤5(10mm*10mm)	≤10(10mm*10mm)
3.6	TTV	μm	≤10	≤10	≤15
3.7	Kakaka	μm	-25~25	-45~45	-65~65
3.8	Warp	μm	≤30	≤50	≤70
3.9	AFM	nm	Ra≤0.2	Ra≤0.2	Ra≤0.2
4:Hoʻolālā
4.1	micropipe density	ea/cm2	≤2	≤10	≤50
4.2	mea metala	nā ʻātoma/cm2	≤1E11	≤1E11	NA
4.3	TSD	ea/cm2	≤500	≤1000	NA
4.4	BPD	ea/cm2	≤2000	≤5000	NA
4.5	TED	ea/cm2	≤7000	≤10000	NA
5.Front maikaʻi
5.1	mua	--	Si	Si	Si
5.2	hoʻopau ʻili	--	Si-maka CMP	Si-maka CMP	Si-maka CMP
5.3	ʻāpana	ea/wafer	≤100 (nui≥0.3μm)	NA	NA
5.4	ʻūlū	ea/wafer	≤5, Ka huina Length≤200mm	NA	NA
5.5	Kaulana chips/indents/cracks/stains/contamination	--	ʻAʻohe	ʻAʻohe	NA
5.6	Nā wahi polytype	--	ʻAʻohe	Wahi ≤10%	Wahi ≤30%
5.7	hoailona mua	--	ʻAʻohe	ʻAʻohe	ʻAʻohe
6: Ka maikaʻi hope
6.1	hope hope	--	C-maka MP	C-maka MP	C-maka MP
6.2	ʻūlū	mm	NA	NA	NA
6.3	lihi hemahema hope chips/indents	--	ʻAʻohe	ʻAʻohe	NA
6.4	ʻōkalakala kua	nm	Ra≤5	Ra≤5	Ra≤5
6.5	Kaha hope	--	Notch	Notch	Notch
7: lihi
7.1	lihi	--	Chamfer	Chamfer	Chamfer
8: Pūʻolo
8.1	kāʻei ʻana	--	Epi-mākaukau me ka vacuum kāʻei ʻana	Epi-mākaukau me ka vacuum kāʻei ʻana	Epi-mākaukau me ka vacuum kāʻei ʻana
8.2	kāʻei ʻana	--	Wafer nui hoʻopaʻa cassette	Wafer nui hoʻopaʻa cassette	Wafer nui hoʻopaʻa cassette