ʻO ka papa hana wafer 4H-N SiC 8 iniha SiC
Hōʻike ka papa ma lalo nei i nā kikoʻī o kā mākou wafers 8 iniha SiC:
| Nā kikoʻī DSP ʻano-N 8 iniha | |||||
| Helu | Mea | ʻĀpana | Hana ʻana | Noiʻi | Dummy |
| 1:nā palena | |||||
| 1.1 | polytype | -- | 4H | 4H | 4H |
| 1.2 | kuhikuhi ʻili | ° | <11-20>4±0.5 | <11-20>4±0.5 | <11-20>4±0.5 |
| 2:Palapala uila | |||||
| 2.1 | mea hoʻohuihui | -- | Naikokene ʻano-n | Naikokene ʻano-n | Naikokene ʻano-n |
| 2.2 | ke kū'ē ʻana | ohm · kenimika | 0.015~0.025 | 0.01~0.03 | NA |
| 3:Palapala mīkini | |||||
| 3.1 | anawaena | mm | 200±0.2 | 200±0.2 | 200±0.2 |
| 3.2 | mānoanoa | μm | 500±25 | 500±25 | 500±25 |
| 3.3 | Kūlana notch | ° | [1- 100]±5 | [1- 100]±5 | [1- 100]±5 |
| 3.4 | Ka Hohonu o ka Notch | mm | 1~1.5 | 1~1.5 | 1~1.5 |
| 3.5 | LTV | μm | ≤5 (10mm * 10mm) | ≤5 (10mm * 10mm) | ≤10 (10mm * 10mm) |
| 3.6 | TTV | μm | ≤10 | ≤10 | ≤15 |
| 3.7 | Kakaka | μm | -25~25 | -45~45 | -65~65 |
| 3.8 | ʻŌwiliwili | μm | ≤30 | ≤50 | ≤70 |
| 3.9 | AFM | nm | Ra≤0.2 | Ra≤0.2 | Ra≤0.2 |
| 4: Hoʻonohonoho | |||||
| 4.1 | ka nui o ka micropipe | ea/cm2 | ≤2 | ≤10 | ≤50 |
| 4.2 | ka nui o ka metala | nā ʻātoma/cm2 | ≤1E11 | ≤1E11 | NA |
| 4.3 | TSD | ea/cm2 | ≤500 | ≤1000 | NA |
| 4.4 | BPD | ea/cm2 | ≤2000 | ≤5000 | NA |
| 4.5 | TED | ea/cm2 | ≤7000 | ≤10000 | NA |
| 5. Kūlana mua | |||||
| 5.1 | mua | -- | Si | Si | Si |
| 5.2 | hoʻopau ʻili | -- | CMP maka-ʻaoʻao | CMP maka-ʻaoʻao | CMP maka-ʻaoʻao |
| 5.3 | ʻāpana | ea/wafer | ≤100 (nui ≥0.3μm) | NA | NA |
| 5.4 | ʻōpala | ea/wafer | ≤5, Ka lōʻihi o ka lōʻihi ≤200mm | NA | NA |
| 5.5 | Ka lihi nā ʻāpana/nā ʻoki/nā māwae/nā ʻōpala/ka haumia | -- | ʻAʻohe | ʻAʻohe | NA |
| 5.6 | Nā wahi Polytype | -- | ʻAʻohe | ʻĀpana ≤10% | ʻĀpana ≤30% |
| 5.7 | māka mua | -- | ʻAʻohe | ʻAʻohe | ʻAʻohe |
| 6: Kūlana hope | |||||
| 6.1 | hoʻopau hope | -- | MP maka-C | MP maka-C | MP maka-C |
| 6.2 | ʻōpala | mm | NA | NA | NA |
| 6.3 | Ka lihi o nā kīnā hope nā ʻāpana/nā indent | -- | ʻAʻohe | ʻAʻohe | NA |
| 6.4 | ʻO ka ʻoʻoleʻa o ke kua | nm | Ra≤5 | Ra≤5 | Ra≤5 |
| 6.5 | Ka māka ʻana ma hope | -- | ʻOki | ʻOki | ʻOki |
| 7: lihi | |||||
| 7.1 | lihi | -- | Chamfer | Chamfer | Chamfer |
| 8:Pūʻolo | |||||
| 8.1 | ʻūpā | -- | Mākaukau ʻo Epi me ka vacuum ʻūpā | Mākaukau ʻo Epi me ka vacuum ʻūpā | Mākaukau ʻo Epi me ka vacuum ʻūpā |
| 8.2 | ʻūpā | -- | Waferi lehulehu ka hoʻopili ʻana o ka cassette | Waferi lehulehu ka hoʻopili ʻana o ka cassette | Waferi lehulehu ka hoʻopili ʻana o ka cassette |
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Nā Huahana Pili
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