AlN-on-NPSS Wafer: High-Performance Aluminum Nitride Layer on Non-Polished Sapphire Substrate for High-Temperature, High-Power, and RF Applications

ʻO ka wehewehe pōkole:

Hoʻohui ʻia ka wafer AlN-on-NPSS i kahi papa alumini nitride (AlN) hana kiʻekiʻe me kahi substrate sapphire non-polished (NPSS) e hāʻawi i kahi hopena kūpono no nā noi kiʻekiʻe, ka mana kiʻekiʻe, a me ka radio-frequency (RF). ʻO ka hui ʻokoʻa o ka AlN ʻokoʻa thermal conductivity a me nā waiwai uila, me ka ikaika mechanical maikaʻi o ka substrate, e hana i kēia wafer i kahi koho i makemake ʻia no nā noi koi e like me ka uila uila, nā hāmeʻa kiʻekiʻe, a me nā ʻāpana optical. Me ka hoʻoheheʻe wela maikaʻi, haʻahaʻa haʻahaʻa, a me ka launa pū me nā kaiapuni wela kiʻekiʻe, hiki i kēia wafer ke hoʻomohala i nā mea hana hou me ka hana ʻoi aku ka maikaʻi.

E hoʻouna i ka leka uila iā mākou

Huahana Huahana

Nā hiʻohiʻona

Kiekie-Hana AlN Layer: ʻIke ʻia ʻo Aluminum Nitride (AlN) no kānakiʻekiʻe thermal conductivity(~200 W/m·K),ʻākea pūhaka, akiʻekiʻe haʻihaʻi uila, e lilo ia i mea kūpono nomana kiʻekiʻe, kiʻekiʻe-frequency, akiʻekiʻe-mehananā noi.

ʻO ka Lapa Sapphire ʻAʻole Hoʻomaʻamaʻa ʻole (NPSS): Hāʻawi ka sapphire i poni ʻole ʻia akumu kūʻai, ikaika me ka mechanicallykumu, e hōʻoia ana i kahi kahua paʻa no ka ulu ʻana o ka epitaxial me ka ʻole o ka paʻakikī o ka poli ʻana. ʻO nā waiwai mechanical maikaʻi o ka NPSS e paʻa ia no nā kaiapuni paʻakikī.

Paʻa Thermal Kiʻekiʻe: Hiki i ka wafer AlN-on-NPSS ke pale aku i ka piʻi ʻana o ka wela, kūpono ia no ka hoʻohana ʻana mauila uila, ʻōnaehana kaʻa, Nā LED, anā polokalamu ʻike makae koi i ka hana paʻa i nā kūlana wela kiʻekiʻe.

Hoʻokohu Uila: Loaʻa iā AlN nā waiwai insulating uila maikaʻi loa, kūpono ia no nā noi ma kahikaʻawale uilahe koʻikoʻi, meNā lako RFauila uila microwave.

ʻO ka hoʻoheheʻe wela kiʻekiʻe: Me ke kiʻekiʻe o ka thermal conductivity, ʻo ka AlN layer e hōʻoia i ka hoʻopau ʻana i ka wela, he mea nui ia no ka mālama ʻana i ka hana a me ka lōʻihi o nā mea hana e hana ana ma lalo o ka mana kiʻekiʻe a me ke alapine.

Nā ʻāpana ʻenehana

ʻĀpana	Hōʻike
Anawaena Wafer	2-ʻīniha, 4-ʻīniha (loaʻa nā nui maʻamau)
ʻAno pāpaʻi	ʻO ka Lapa Sapphire ʻAʻole Hoʻomaʻamaʻa ʻole (NPSS)
AlN Layer Manoanoa	2µm a i 10µm (hiki ke hoʻololi ʻia)
Mānoanoa lepo	430µm ± 25µm (no 2-iniha), 500µm ± 25µm (no 4-iniha)
ʻO ka hoʻoili wela	200 W/m·K
Kū'ē Uila	ʻO ka insulation kiʻekiʻe, kūpono no nā noi RF
ʻAole ʻili	Ra ≤ 0.5µm (no ka papa AlN)
Maemae Mea	AlN maemae loa (99.9%)
kalakala	Keʻokeʻo/Keʻokeʻo-Keʻokeʻo (Papa AlN me ka substrate NPSS waihoʻoluʻu māmā)
Wafer Warp	< 30µm (maʻamau)
ʻAno Doping	Un-doped (hiki ke hoʻopilikino ʻia)

Nā noi

ʻO kaAlN-on-NPSS waferua hoʻolālā ʻia no ka nui o nā noi hana kiʻekiʻe ma waena o nā ʻoihana:

Kiekie-Mana Electronics: ʻO ka pae AlN ka wela wela kiʻekiʻe a me nā waiwai insulating e lilo ia i mea kūpono nonā transistors mana, nā mea hoʻoponopono, amana ICshoʻohana ʻia makaʻa kaʻa, ʻoihana ʻoihana, aikehu houʻōnaehana.

Nā ʻāpana Radio-Frequency (RF).: ʻO nā waiwai insulating uila maikaʻi loa o AlN, i hui pū ʻia me kona poho haʻahaʻa, hiki ke hana iRF transistors, Nā HEMT (High-Electron-Mobility Transistors), a me nā mea ʻē aʻeʻāpana microwavee hana maikaʻi ana i nā alapine kiʻekiʻe a me nā pae mana.

ʻO nā mea Optical: Hoʻohana ʻia nā wafers AlN-on-NPSS manā diodes laser, Nā LED, anā mea nānā kiʻi, kahi o kakiʻekiʻe thermal conductivityaikaika ikaikahe mea nui no ka mālama ʻana i ka hana i nā wā lōʻihi.

Nā Kiekie Kiekie: ʻO ka hiki i ka wafer ke kū i ka wela nui e kūpono ainā mea ʻike welaanānā kaiapunima nā ʻoihana likeaerospace, kaʻa kaʻa, aaila & kinoea.

Hoʻopili Semiconductor: Hoʻohana ʻia ma mea hoolaha welaanā papa hoʻomalu welai nā ʻōnaehana pale, e hōʻoiaʻiʻo ana i ka hilinaʻi a me ka pono o nā semiconductors.

N&A

Nīnau: He aha ka pōmaikaʻi nui o nā wafers AlN-on-NPSS ma mua o nā mea kahiko e like me ke silika?

A: ʻO ka pōmaikaʻi nui ʻo AlNkiʻekiʻe thermal conductivity, hiki iā ia ke hoʻopau maikaʻi i ka wela, i mea kūpono nomana kiʻekiʻeanā noi alapine kiʻekiʻekahi e koʻikoʻi ai ka mālama ʻana i ka wela. Eia hou, loaʻa iā AlN kahiʻākea pūhakaa maikaʻi loahoʻopololei uila, e hoʻonui ai i ka hoʻohana ʻana maRFanā mea hana microwavei hoʻohālikelike ʻia me ka silika kahiko.

Nīnau: Hiki ke hoʻopilikino ʻia ka papa AlN ma nā wafers NPSS?

A: ʻAe, hiki ke hoʻonohonoho ʻia ka papa AlN ma ke ʻano o ka mānoanoa (mai ka 2µm a i ka 10µm a i ʻole) e hoʻokō i nā pono kikoʻī o kāu noi. Hāʻawi pū mākou i ka hana maʻamau e pili ana i ke ʻano doping (N-type a i ʻole P-type) a me nā papa hou no nā hana kūikawā.

Nīnau: He aha ka noi maʻamau no kēia wafer i ka ʻoihana kaʻa?

A: Ma ka ʻoihana kaʻa, hoʻohana mau ʻia nā wafers AlN-on-NPSSuila uila, Nā ʻōnaehana kukui LED, anā mea ʻike wela. Hāʻawi lākou i ka hoʻokele wela a me ka insulation uila, he mea nui ia no nā ʻōnaehana kiʻekiʻe e hana ana ma lalo o nā kūlana wela.