ʻO AlN-on-NPSS Wafer: Papa Nitride Aluminum Hana Kiʻekiʻe ma ka Substrate Sapphire ʻAʻole i Polished no nā noi mahana kiʻekiʻe, mana kiʻekiʻe, a me RF

Wehewehe Pōkole:

Hoʻohui ka wafer AlN-on-NPSS i kahi papa alumini nitride (AlN) hana kiʻekiʻe me kahi substrate sapphire i poli ʻole ʻia (NPSS) e hāʻawi i kahi hopena kūpono no nā noi wela kiʻekiʻe, mana kiʻekiʻe, a me ke alapine lekiō (RF). ʻO ka hui kūikawā o ka conductivity thermal kūikawā o AlN a me nā waiwai uila, me ka ikaika mechanical maikaʻi loa o ka substrate, e hoʻolilo i kēia wafer i koho makemake ʻia no nā noi koi e like me nā uila mana, nā mea hana alapine kiʻekiʻe, a me nā ʻāpana optical. Me ka hoʻokuʻu wela maikaʻi loa, ka pohō haʻahaʻa, a me ka hoʻohālikelike ʻana me nā wahi wela kiʻekiʻe, hiki i kēia wafer ke hoʻomohala i nā mea hana hanauna hou me ka hana kiʻekiʻe.

E leka uila mai iā mākou

Nā hiʻohiʻona

Papa AlN Hana KiʻekiʻeUa ʻike ʻia ka Aluminum Nitride (AlN) no konaconductivity wela kiʻekiʻe(~200 W/m·K),ākea ākea, a meuila haki kiʻekiʻe, e lilo ia i mea kūpono nomana kiʻekiʻe, alapine kiʻekiʻe, a mewela kiʻekiʻenā noi.

ʻO ka Substrate Sapphire i hoʻopili ʻole ʻia (NPSS)Hāʻawi ka sapeiro i wili ʻole ʻia i kahikūpono i ke kumukūʻai, paʻa mīkinikumu, e hōʻoiaʻiʻo ana i kahi kahua paʻa no ka ulu ʻana o ka epitaxial me ka ʻole o ka paʻakikī o ka hoʻopili ʻana i ka ʻili. ʻO nā waiwai mechanical maikaʻi loa o ka NPSS e paʻa ai no nā ʻano paʻakikī.

Paʻa Wera KiʻekiʻeHiki i ka wafer AlN-on-NPSS ke kū i nā loli wela koʻikoʻi, e kūpono ai no ka hoʻohana ʻana i lokonā mea uila mana, nā ʻōnaehana kaʻa, Nā LED, a menā noi ʻike makae pono ai ka hana paʻa i nā kūlana wela kiʻekiʻe.

Hoʻokaʻawale UilaLoaʻa iā AlN nā waiwai hoʻokaʻawale uila maikaʻi loa, e kūpono ana no nā noi kahika hoʻokaʻawale uilahe mea koʻikoʻi, menā polokalamu RFa menā mea uila microwave.

Hoʻolaha Wela KiʻekiʻeMe ka conductivity thermal kiʻekiʻe, hōʻoia ka papa AlN i ka hoʻopuehu wela maikaʻi, he mea nui ia no ka mālama ʻana i ka hana a me ke ola lōʻihi o nā mea e hana ana ma lalo o ka mana kiʻekiʻe a me ke alapine (frequency).

Nā Palena ʻenehana

Palena	Nā kikoʻī
Anawaena Wafer	2-'īniha, 4-'īniha (loaʻa nā nui maʻamau)
ʻAno Substrate	ʻO ka Substrate Sapphire i hoʻopili ʻole ʻia (NPSS)
Mānoanoa o ka Papa AlN	2µm a i 10µm (hiki ke hoʻopilikino ʻia)
Mānoanoa o ka substrate	430µm ± 25µm (no 2-'īniha), 500µm ± 25µm (no 4-'īniha)
Ka Hoʻokele Wela	200 W/m·K
Ke kū'ē uila	Hoʻopaʻa kiʻekiʻe, kūpono no nā noi RF
ʻO ka ʻōʻili	Ra ≤ 0.5µm (no ka papa AlN)
Maʻemaʻe o nā mea	AlN maʻemaʻe kiʻekiʻe (99.9%)
Waihoʻoluʻu	Keʻokeʻo/Keʻokeʻo ʻOle (papa AlN me ka substrate NPSS kala māmā)
Wafer Warp	< 30µm (maʻamau)
ʻAno Doping	ʻAʻole i hoʻohui ʻia (hiki ke hoʻopilikino ʻia)

Nā noi

ʻO kaʻO ka wafer AlN-ma-NPSSua hoʻolālā ʻia no nā ʻano hana hana kiʻekiʻe like ʻole ma nā ʻoihana like ʻole:

Nā Uila Mana KiʻekiʻeʻO ke kiʻekiʻe o ka conductivity thermal a me nā waiwai insulating o ka papa AlN e lilo ia i mea kūpono nonā transistors mana, nā mea hoʻoponopono, a menā IC manahoʻohana ʻia makaʻa, ʻoihana, a meikehu hounā ʻōnaehana.

Nā ʻĀpana Alapine Leka Uila (RF)ʻO nā waiwai hoʻokaʻawale uila maikaʻi loa o AlN, me kona pohō haʻahaʻa, e hiki ai ke hana ʻiaNā transistors RF, Nā HEMT (Nā Transistors Mobility Uila Kiʻekiʻe), a me nā mea ʻē aʻenā ʻāpana microwavee hana pono ana ma nā alapine kiʻekiʻe a me nā pae mana.

Nā Mea Hana OpticalHoʻohana ʻia nā wafers AlN-on-NPSS i lokonā diode laser, Nā LED, a menā mea nānā kiʻi, kahi o kaconductivity wela kiʻekiʻea meka paʻa mīkinihe mea nui no ka mālama ʻana i ka hana hana no nā manawa he nui.

Nā Mea ʻIke Mahana Kiʻekiʻe: ʻO ka hiki i ka wafer ke kū i ka wela nui e kūpono ai nonā mea ʻike mahanaa meka nānā ʻana i ke kaiapunima nā ʻoihana e like memokulele, kaʻa, a meʻaila a me ke kinoea.

Ka Hoʻopili ʻana o ka SemiconductorHoʻohana ʻia ma nā mea hoʻolaha welaa menā papa hoʻokele welai nā ʻōnaehana hoʻopili, e hōʻoiaʻiʻo ana i ka hilinaʻi a me ka pono o nā semiconductors.

Nīnau a me nā Pane

Q: He aha ka pōmaikaʻi nui o nā wafers AlN-on-NPSS ma luna o nā mea kuʻuna e like me ka silicon?

A: ʻO ka pōmaikaʻi nui ʻo AlN'sconductivity wela kiʻekiʻe, ka mea e hiki ai iā ia ke hoʻokuʻu pono i ka wela, e kūpono ana nomana kiʻekiʻea menā noi alapine kiʻekiʻekahi e koʻikoʻi ai ka hoʻokele wela. Eia kekahi, loaʻa iā AlN kahiākea ākeaa maikaʻi loaka pale uila, e lilo ia i mea maikaʻi loa no ka hoʻohana ʻana i lokoRFa menā mea hana microwavehoʻohālikelike ʻia me ka silicon kuʻuna.

Q: Hiki ke hoʻopilikino ʻia ka papa AlN ma nā wafers NPSS?

ʻAe, hiki ke hoʻopilikino ʻia ka papa AlN ma ke ʻano o ka mānoanoa (mai 2µm a 10µm a ʻoi aku paha) e hoʻokō i nā pono kikoʻī o kāu noi. Hāʻawi pū mākou i ka hoʻopilikino ʻana ma ke ʻano o ke ʻano doping (ʻano-N a i ʻole ʻano-P) a me nā papa hou no nā hana kūikawā.

Q: He aha ka hoʻohana maʻamau no kēia wafer i ka ʻoihana kaʻa?

A: I loko o ka ʻoihana kaʻa, hoʻohana pinepine ʻia nā wafers AlN-on-NPSS i lokonā mea uila mana, Nā ʻōnaehana kukui LED, a menā mea ʻike mahanaHāʻawi lākou i ka hoʻokele wela maikaʻi loa a me ka insulation uila, he mea nui ia no nā ʻōnaehana hana kiʻekiʻe e hana ana ma lalo o nā kūlana mahana like ʻole.