ʻO ka Dia300x1.0mmt ka mānoanoa o ka Sapphire Wafer C-Plane SSP/DSP
Hoʻolauna i ka pahu wafer
| Nā Mea Crystal | 99,999% o Al2O3, Maʻemaʻe Kiʻekiʻe, Monocrystalline, Al2O3 | |||
| ʻAno kristal | ʻAʻole i loaʻa nā hoʻokomo, nā māka poloka, nā māhoe, ke kala, nā micro-bubbles a me nā kikowaena hoʻopuehu | |||
| Anawaena | 2'īniha | 3'īniha | 4 ʻīniha | 6 ʻīniha ~ 12 ʻīniha |
| 50.8± 0.1mm | 76.2±0.2mm | 100 ± 0.3mm | E like me nā ʻōlelo o ka hana maʻamau | |
| Mānoanoa | 430±15µm | 550±15µm | 650±20µm | Hiki ke hoʻopilikino ʻia e ka mea kūʻai aku |
| Hoʻonohonoho | ʻO ka mokulele C- (0001) i ka mokulele M- (1-100) a i ʻole ka mokulele A-(1 1-2 0) 0.2±0.1° /0.3±0.1°, ka mokulele R- (1-1 0 2), ka mokulele A- (1 1-2 0), ka mokulele M-(1-1 0 0), Kekahi kuhikuhi, Kekahi kihi | |||
| Ka lōʻihi pālahalaha mua | 16.0±1mm | 22.0±1.0mm | 32.5±1.5 mm | E like me nā ʻōlelo o ka hana maʻamau |
| Kūlana pālahalaha mua | Papahele-A (1 1-2 0) ± 0.2° | |||
| TTV | ≤10µm | ≤15µm | ≤20µm | ≤30µm |
| LTV | ≤10µm | ≤15µm | ≤20µm | ≤30µm |
| TIR | ≤10µm | ≤15µm | ≤20µm | ≤30µm |
| KAKAUOHA | ≤10µm | ≤15µm | ≤20µm | ≤30µm |
| ʻŌwiliwili | ≤10µm | ≤15µm | ≤20µm | ≤30µm |
| ʻIli mua | ʻEpi-Polished (Ra< 0.2nm) | |||
*Piʻo: ʻO ke kaʻe ʻana o ke kiko waena o ka ʻili waena o kahi wafer manuahi, ʻaʻole i hoʻopaʻa ʻia mai ka mokulele kuhikuhi, kahi i wehewehe ʻia ai ka mokulele kuhikuhi e nā kihi ʻekolu o kahi huinakolu like.
*Warp: ʻO ka ʻokoʻa ma waena o ka mamao kiʻekiʻe loa a me ka mamao liʻiliʻi loa o ka ʻili waena o kahi wafer manuahi, ʻaʻole i hoʻopaʻa ʻia mai ka mokulele kuhikuhi i wehewehe ʻia ma luna.
Nā huahana a me nā lawelawe kiʻekiʻe no nā polokalamu semiconductor hanauna hou a me ka ulu ʻana o ka epitaxial:
Ke kiʻekiʻe o ka pālahalaha (TTV i kāohi ʻia, kakaka, warp etc.)
Hoʻomaʻemaʻe kiʻekiʻe (haʻahaʻa ka haumia o nā ʻāpana, haʻahaʻa ka haumia metala)
ʻEli ʻana i ka substrate, grooving, ʻoki ʻana, a me ka polishing ʻaoʻao hope
Hoʻopili ʻana i ka ʻikepili e like me ka maʻemaʻe a me ke ʻano o ka substrate (koho)
Inā he pono kāu no nā substrates sapphire, e ʻoluʻolu e hoʻokaʻaʻike mai iā:
leka uilaeric@xkh-semitech.com+86 158 0194 2596 /doris@xkh-semitech.com+86 187 0175 6522
E hoʻi mākou iā ʻoe i ka hikiwawe loa!
Kiʻikuhi kikoʻī





