ʻO nā Wafers Quartz Fused High-Purity no Semiconductor, Photonics Optical Applications 2″4″6″8″12″
Kiʻi kikoʻī
Nānā o ke aniani Quartz
Hoʻokumu ʻia nā wafers Quartz i ka iwi kuamoʻo o nā mea hana hou he nui e hoʻokele i ka honua kikohoʻe o kēia mau lā. Mai ka hoʻokele ʻana i kāu kelepona a hiki i ka iwi kuamoʻo o nā kahua kahua 5G, hāʻawi mālie ʻo quartz i ke kūpaʻa, ka maʻemaʻe, a me ka pololei i koi ʻia i nā mea uila kiʻekiʻe a me nā photonics. Ke kākoʻo nei i ka circuitry maʻalahi, hiki i nā sensor MEMS, a i ʻole ke kumu no ka computing quantum, ʻo nā hiʻohiʻona kūʻokoʻa o ka quartz he mea nui ia ma nā ʻoihana.
"Fused Silica" a i ʻole "Fused Quartz" ʻo ia ka pae amorphous o ka quartz (SiO2). Ke hoʻohālikelike ʻia me ke aniani borosilicate, ʻaʻohe mea hoʻohui i ka silica fused; nolaila, aia ma kona ano maemae, SiO2. He kiʻekiʻe ka hoʻouna ʻana o ka silica Fused i ka spectrum infrared a me ultraviolet ke hoʻohālikelike ʻia me ke aniani maʻamau. Hoʻokumu ʻia ka silica fused ma ka hoʻoheheʻe ʻana a hoʻopaʻa hou i ka ultrapure SiO2. Hana ʻia ʻo Synthetic fused silica ma kekahi ʻaoʻao mai nā precursors kemika waiwai nui e like me SiCl4 i hoʻoheheʻe ʻia a laila hoʻokahe ʻia i loko o kahi lewa H2 + O2. Hoʻohui ʻia ka lepo SiO2 i hana ʻia i kēia hihia me ka silica ma kahi substrate. Hoʻokiʻoki ʻia nā poloka silica i hoʻohui ʻia i mau ʻāpana a laila hoʻomaʻamaʻa hope ʻia nā wafers.
ʻO nā hiʻohiʻona nui a me nā pono o ka Quartz Glass Wafer
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Maʻemaʻe Kiʻekiʻe Loa (≥99.99% SiO2)
He kūpono no nā kaʻina hana semiconductor ultra-maʻemaʻe a me nā photonics kahi e hoʻemi ʻia ai ka hoʻohaumia ʻana. -
Laulā Hana wela
E mālama i ka pono o ke kino mai nā mahana cryogenic a hiki i ka 1100 ° C me ka ʻole o ka warping a i ʻole degradation. -
ʻO ka hoʻoili ʻana o UV a me IR
Hāʻawi i ka mālamalama optical maikaʻi loa mai ka ultraviolet hohonu (DUV) ma o kahi kokoke-infrared (NIR), e kākoʻo ana i nā noi optical precision. -
Haʻahaʻa Thermal Expansion Coefficient
Hoʻonui i ke kūpaʻa dimensional ma lalo o nā loli wela, e hōʻemi ana i ke kaumaha a hoʻomaikaʻi i ka hilinaʻi o ka hana. -
Kūleʻa Kemika Kiʻekiʻe
Inert i ka hapa nui o nā waikawa, alkalis, a me nā mea hoʻoheheʻe—no ke kūpono loa ia no nā kaiapuni ʻino. -
Hiki ke hoʻopau i ka ʻili
Loaʻa me ka ultra-smooth, ʻaoʻao hoʻokahi a i ʻole ʻaoʻao ʻelua ʻaoʻao polina, kūpono me nā kiʻi kiʻi a me nā pono MEMS.
Ka Hana Hana ʻana o ka Quartz Glass Wafer
Hoʻokumu ʻia nā wafers quartz fused ma o ke ʻano o nā ʻanuʻu i kāohi ʻia a pololei:
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Koho Mea Maka
Ke koho ʻana i ka quartz kūlohelohe kiʻekiʻe a i ʻole nā kumu SiO₂ synthetic. -
Hehee a hui
Hoʻoheheʻe ʻia ka Quartz ma ~ 2000 ° C i loko o nā umu uila ma lalo o kahi ea hoʻomalu e hoʻopau i nā inclusions a me nā ʻōpū. -
Hoʻokumu ʻana i ka poloka
Hoʻomaʻalili ʻia ka silica hoʻoheheʻe ʻia i loko o nā poloka paʻa a i ʻole nā ingots. -
Wafer Slicing
Hoʻohana ʻia nā daimana a i ʻole nā ʻili uea no ka ʻoki ʻana i nā ingots i ʻāpana wafer. -
Ka Lapa a me ka Poni
Hoʻopili ʻia nā ʻaoʻao ʻelua a hoʻomaʻamaʻa ʻia e hoʻokō pono i nā kikoʻī kikoʻī, mānoanoa, a me nā kikoʻī. -
Hoomaemae & Nana
Hoʻomaʻemaʻe ʻia nā wafers ma nā lumi maʻemaʻe ISO Class 100/1000 a hoʻopaʻa ʻia i ka nānā pono ʻana no nā hemahema a me ka hoʻohālikelike dimensional.
Nā waiwai o ka wafer Glass Quartz
| spec | ʻāpana | 4" | 6" | 8" | 10" | 12" |
|---|---|---|---|---|---|---|
| Anawaena / nui (a i ʻole huinaha) | mm | 100 | 150 | 200 | 250 | 300 |
| Hoʻomanawanui (±) | mm | 0.2 | 0.2 | 0.2 | 0.2 | 0.2 |
| mānoanoa | mm | 0.10 a ʻoi aku paha | 0.30 a oi | 0.40 a oi | 0.50 a oi | 0.50 a oi |
| Papa kuhikuhi mua | mm | 32.5 | 57.5 | Semi-notch | Semi-notch | Semi-notch |
| LTV (5mm×5mm) | μm | < 0.5 | < 0.5 | < 0.5 | < 0.5 | < 0.5 |
| TTV | μm | < 2 | < 3 | < 3 | < 5 | < 5 |
| Kakaka | μm | ±20 | ±30 | ±40 | ±40 | ±40 |
| Warp | μm | ≤ 30 | ≤ 40 | ≤ 50 | ≤ 50 | ≤ 50 |
| PLTV (5mm×5mm) < 0.4μm | % | ≥95% | ≥95% | ≥95% | ≥95% | ≥95% |
| Hoʻopuni ʻaoʻao | mm | Kūlike me SEMI M1.2 Standard / e nānā iā IEC62276 | ||||
| ʻAno ʻili | Hoʻomaʻamaʻa ʻia ka ʻaoʻao hoʻokahi / ʻaoʻao pālua | |||||
| ʻaoʻao poli Ra | nm | ≤1 | ≤1 | ≤1 | ≤1 | ≤1 |
| Koina aoao hope | μm | maʻamau 0.2-0.7 a i ʻole maʻamau | ||||
ʻO Quartz vs. Nā Mea Mālohi ʻē aʻe
| Waiwai | Aniani Quartz | Aniani Borosilicate | Sapphire | Aniani ma'amau |
|---|---|---|---|---|
| Max Hana Hana | ~1100°C | ~500°C | ~2000°C | ~200°C |
| Ka hoʻoili UV | Maikaʻi (JGS1) | ʻilihune | Maikaʻi loa | ʻilihune loa |
| Palekana Kemika | maikaʻi loa | Kaumaha | maikaʻi loa | ʻilihune |
| Maemae | Kiʻekiʻe loa | Haʻahaʻa a haʻahaʻa | Kiʻekiʻe | Haʻahaʻa |
| Hoʻonui wela | Haahaa loa | Kaumaha | Haʻahaʻa | Kiʻekiʻe |
| Koina | Maikaʻi a kiʻekiʻe | Haʻahaʻa | Kiʻekiʻe | Haahaa loa |
FAQ o ke aniani Wafer Quartz
Q1: He aha ka ʻokoʻa ma waena o ka quartz fused a me ka silica fused?
ʻOiai ʻo nā ʻano amorphous ʻelua o SiO₂, ʻo ka quartz fused maʻamau mai nā kumu quartz maoli, ʻoiai ua hana ʻia ka silica fused. Ma ka hana, hāʻawi lākou i ka hana like, akā ʻoi aku ka maikaʻi o ka silica fused i ka maʻemaʻe a me ka homogeneity.
Q2: Hiki ke hoʻohana ʻia nā wafers quartz i hoʻohui ʻia i nā wahi ʻeleʻele kiʻekiʻe?
ʻAe. Ma muli o kā lākou haʻahaʻa haʻahaʻa haʻahaʻa a me ke kūpaʻa wela kiʻekiʻe, ʻoi aku ka maikaʻi o nā wafers quartz fused no nā ʻōnaehana vacuum a me nā noi aerospace.
Q3: Ua kūpono kēia mau wafers no nā noi laser hohonu-UV?
ʻOiaʻiʻo. Loaʻa i ka quartz fused ka transmittance kiʻekiʻe a hiki i ~ 185 nm, e kūpono ana ia no nā DUV optics, lithography masks, a me nā ʻōnaehana laser excimer.
Q4: Ke kākoʻo nei ʻoe i ka hana wafer maʻamau?
ʻAe. Hāʻawi mākou i ka hana maʻamau piha e like me ke anawaena, ka mānoanoa, ka maikaʻi o ka ʻili, nā pālahalaha / notches, a me ka hoʻohālike laser, e pili ana i kāu koi noi kikoʻī.
E pili ana iā mākou
Hoʻokumu ʻo XKH i ka hoʻomohala ʻenehana kiʻekiʻe, ka hana ʻana, a me ke kūʻai ʻana i nā aniani optical kūikawā a me nā mea aniani hou. Hāʻawi kā mākou huahana i nā uila uila, mea uila uila, a me ka pūʻali koa. Hāʻawi mākou i nā ʻāpana optical Sapphire, nā uhi kelepona kelepona paʻa, Ceramics, LT, Silicon Carbide SIC, Quartz, a me nā wafer kristal semiconductor. Me ka ʻike akamai a me nā mea hana ʻoki ʻoki, ʻoi aku mākou i ka hoʻoili huahana maʻamau ʻole, me ka manaʻo e lilo i alakaʻi optoelectronic material high-tech ʻoihana.
