ʻO nā Wafers Quartz Fused Kiʻekiʻe-Maʻemaʻe no Semiconductor, Photonics Optical Applications 2″4″6″8″12″
Kiʻikuhi kikoʻī
ʻIkepili o ke Aniani Quartz
ʻO nā wafers Quartz ke kumu o nā mea hana hou he nui ʻole e hoʻokele nei i ka honua kikohoʻe o kēia lā. Mai ka hoʻokele ʻana i kāu kelepona akamai a hiki i ke kumu o nā kikowaena kumu 5G, hāʻawi mālie ʻo quartz i ke kūpaʻa, ka maʻemaʻe, a me ka pololei e pono ai i nā mea uila hana kiʻekiʻe a me nā photonics. Inā paha e kākoʻo ana i ka circuitry flexible, e hiki ai i nā sensor MEMS, a i ʻole ke hoʻokumu ʻana i ke kumu no ka helu quantum, ʻo nā ʻano kūikawā o quartz e lilo ia i mea nui loa ma nā ʻoihana.
ʻO "Fused Silica" a i ʻole "Fused Quartz" ʻo ia ka pae amorphous o ka quartz (SiO2). Ke hoʻohālikelike ʻia me ke aniani borosilicate, ʻaʻohe mea hoʻohui o ka silica fused; no laila aia ia ma kona ʻano maʻemaʻe, ʻo SiO2. ʻOi aku ka kiʻekiʻe o ka hoʻoili ʻana o ka silica fused ma ka spectrum infrared a me ultraviolet i ka hoʻohālikelike ʻia me ke aniani maʻamau. Hana ʻia ka silica fused ma ka hoʻoheheʻe ʻana a me ka hoʻopaʻa hou ʻana i ka ultrapure SiO2. Ma ka ʻaoʻao ʻē aʻe, hana ʻia ka silica fused synthetic mai nā precursors kemika waiwai silicon e like me SiCl4 i gasified a laila oxidized i loko o ka lewa H2 + O2. ʻO ka lepo SiO2 i hana ʻia ma kēia hihia ua hoʻohui ʻia i silica ma kahi substrate. ʻOki ʻia nā poloka silica fused i loko o nā wafers ma hope o ka hoʻopili ʻia ʻana o nā wafers.
Nā Hiʻohiʻona Koʻikoʻi a me nā Pōmaikaʻi o ka Quartz Glass Wafer
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Maʻemaʻe Loa-Kiʻekiʻe (≥99.99% SiO2)
Kūpono no nā kaʻina semiconductor maʻemaʻe loa a me nā kaʻina photonics kahi e pono ai ke hoʻēmi i ka haumia o nā mea. -
Ka laulā hana wela ākea
Mālama i ka kūpaʻa o ke kūkulu ʻana mai nā mahana cryogenic a hiki i ka 1100°C me ka ʻole o ka warping a i ʻole ka degradation. -
Ka hoʻoili UV a me IR maikaʻi loa
Hāʻawi i ka mōakāka optical maikaʻi loa mai ka ultraviolet hohonu (DUV) a hiki i ka infrared kokoke (NIR), e kākoʻo ana i nā noi optical precision. -
Ka helu hoʻonui wela haʻahaʻa
Hoʻonui i ke kūpaʻa o ka dimensional ma lalo o nā loli o ka mahana, e hōʻemi ana i ke kaumaha a hoʻomaikaʻi i ka hilinaʻi o ke kaʻina hana. -
Ke kūpaʻa kemika kiʻekiʻe loa
ʻAʻole i paʻa i ka hapa nui o nā waikawa, nā alkalis, a me nā mea hoʻoheheʻe—he mea kūpono ia no nā wahi hoʻoulu kemika. -
Ka Hoʻololi ʻana o ka ʻIli
Loaʻa me nā ʻokiʻoki poli ʻia me ka laumania loa, ʻaoʻao hoʻokahi a ʻaoʻao pālua paha, kūpono me nā koi photonics a me MEMS.
Kaʻina Hana Hana o ka Quartz Glass Wafer
Hoʻokumu ʻia nā wafers quartz i hoʻopili ʻia ma o kahi ʻano o nā ʻanuʻu i kāohi ʻia a pololei hoʻi:
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Koho Mea Maka
Ke koho ʻana o nā kumu quartz kūlohelohe kiʻekiʻe a i ʻole nā kumu SiO₂ synthetic. -
Ka Hoʻoheheʻe ʻana a me ka Fusion
Hoʻoheheʻe ʻia ka Quartz ma ~2000°C i loko o nā umu uila ma lalo o kahi lewa i kāohi ʻia e hoʻopau i nā hoʻokomo a me nā pehu. -
Ka Hoʻokumu ʻana i nā Poloka
Hoʻomaʻalili ʻia ka silica heheʻe i loko o nā poloka paʻa a i ʻole nā ingots. -
ʻOki ʻana i ka Wafer
Hoʻohana ʻia nā ʻoki daimana kikoʻī a i ʻole nā ʻoki uea e ʻoki i nā ʻots i loko o nā wafer blanks. -
Ka Lapping & Polishing
Ua hoʻopālahalaha ʻia a hoʻowali ʻia nā ʻili ʻelua e hoʻokō i nā kikoʻī optical, mānoanoa, a me ka ʻoʻoleʻa pololei. -
Hoʻomaʻemaʻe a me ka nānā ʻana
Hoʻomaʻemaʻe ʻia nā wafers ma nā lumi maʻemaʻe ISO Class 100/1000 a ua nānā pono ʻia no nā kīnā a me ke kūlike o nā ana.
Nā Waiwai o ka Wafer Aniani Quartz
| kikoʻī | ʻāpana | 4" | 6" | 8" | 10" | 12" |
|---|---|---|---|---|---|---|
| Anawaena / nui (a i ʻole huinahā) | mm | 100 | 150 | 200 | 250 | 300 |
| Hoʻomanawanui (±) | mm | 0.2 | 0.2 | 0.2 | 0.2 | 0.2 |
| Mānoanoa | mm | 0.10 a ʻoi aku paha | 0.30 a ʻoi aku paha | 0.40 a ʻoi aku paha | 0.50 a ʻoi aku paha | 0.50 a ʻoi aku paha |
| Pālahalaha kuhikuhi mua | mm | 32.5 | 57.5 | Hapa-ʻoki | Hapa-ʻoki | Hapa-ʻoki |
| LTV (5mm × 5mm) | μm | < 0.5 | < 0.5 | < 0.5 | < 0.5 | < 0.5 |
| TTV | μm | < 2 | < 3 | < 3 | < 5 | < 5 |
| Kakaka | μm | ±20 | ±30 | ±40 | ±40 | ±40 |
| ʻŌwiliwili | μm | ≤ 30 | ≤ 40 | ≤ 50 | ≤ 50 | ≤ 50 |
| PLTV (5mm × 5mm) < 0.4μm | % | ≥95% | ≥95% | ≥95% | ≥95% | ≥95% |
| Ka Hoʻopōʻai ʻana i ka Lihi | mm | Kūlike me ke kūlana SEMI M1.2 / e nānā i ka IEC62276 | ||||
| ʻAno ʻIli | ʻAoʻao hoʻokahi i hoʻowali ʻia / ʻAoʻao pālua i hoʻowali ʻia | |||||
| ʻAoʻao i hoʻopololei ʻia ʻo Ra | nm | ≤1 | ≤1 | ≤1 | ≤1 | ≤1 |
| Nā Kūlana ʻAoʻao Hope | μm | laulā 0.2-0.7 a i hoʻopilikino ʻia paha | ||||
Quartz vs. Nā Mea Moakaka ʻē aʻe
| Waiwai | Aniani Quartz | Aniani Borosilicate | Sapeiro | Aniani Maʻamau |
|---|---|---|---|---|
| Mahana Hana Loa | ~1100°C | ~500°C | ~2000°C | ~200°C |
| Hoʻoili UV | Maikaʻi loa (JGS1) | ʻilihune | Maikaʻi loa | ʻilihune loa |
| Ke kū'ē kemika | Maikaʻi loa | Waena | Maikaʻi loa | ʻilihune |
| Maʻemaʻe | Kiʻekiʻe loa | Haʻahaʻa a waena paha | Kiʻekiʻe | Haʻahaʻa |
| Hoʻonui Wela | Haʻahaʻa loa | Waena | Haʻahaʻa | Kiʻekiʻe |
| Kumukūʻai | Waena a kiʻekiʻe | Haʻahaʻa | Kiʻekiʻe | Haʻahaʻa loa |
Nā nīnau i nīnau pinepine ʻia no ka Quartz Glass Wafer
Q1: He aha ka ʻokoʻa ma waena o ka quartz i hoʻohui ʻia a me ka silica i hoʻohui ʻia?
ʻOiai ʻo nā ʻano amorphous ʻelua o SiO₂, ʻo ka quartz fused ka mea maʻamau i loaʻa mai nā kumu quartz kūlohelohe, ʻoiai ua hana ʻia ka silica fused ma ke ʻano synthetically. Ma ke ʻano hana, hāʻawi lākou i ka hana like, akā ʻoi aku ka kiʻekiʻe o ka maʻemaʻe a me ka homogeneity o ka silica fused.
Q2: Hiki ke hoʻohana ʻia nā wafers quartz i hoʻopili ʻia i nā wahi vacuum kiʻekiʻe?
ʻAe. Ma muli o ko lākou mau waiwai hoʻokuʻu haʻahaʻa a me ke kūpaʻa wela kiʻekiʻe, maikaʻi loa nā wafers quartz fused no nā ʻōnaehana vacuum a me nā noi aerospace.
Q3: He kūpono anei kēia mau wafers no nā noi laser UV hohonu?
ʻAe loa. Loaʻa i ka quartz fused ka transmittance kiʻekiʻe a hiki i ~185 nm, e kūpono ana no nā optics DUV, nā masks lithography, a me nā ʻōnaehana laser excimer.
Q4: Ke kākoʻo nei ʻoe i ka hana wafer maʻamau?
ʻAe. Hāʻawi mākou i ka hoʻopilikino piha ʻana me ke anawaena, ka mānoanoa, ka maikaʻi o ka ʻili, nā pālahalaha/notches, a me ke ʻano laser, ma muli o kāu mau koi noi kikoʻī.
E pili ana iā mākou
He loea ʻo XKH i ka hoʻomohala ʻenehana kiʻekiʻe, ka hana ʻana, a me ke kūʻai aku ʻana i ke aniani optical kūikawā a me nā mea kristal hou. Lawelawe kā mākou huahana i nā mea uila optical, nā mea uila mea kūʻai aku, a me ka pūʻali koa. Hāʻawi mākou i nā ʻāpana optical Sapphire, nā uhi lens kelepona paʻalima, Ceramics, LT, Silicon Carbide SIC, Quartz, a me nā wafers kristal semiconductor. Me ka ʻike loea a me nā lako hana kiʻekiʻe, ʻoi aku mākou i ka hana ʻana i nā huahana maʻamau ʻole, me ka manaʻo e lilo i alakaʻi i nā mea optoelectronic ʻoihana ʻenehana kiʻekiʻe.











