ʻO ka mīkini hoʻopololei kukuna Ion no ka sapphire SiC Si

ʻO ka mīkini poli kukuna Ion no ka sapphire SiC Si Kiʻi i hōʻike ʻia

Wehewehe Pōkole:

Hoʻokumu ʻia ka Mīkini Hoʻohālikelike a me ka Polishing Ion Beam ma ke kumumanaʻo o ka sputtering ion. I loko o kahi keʻena vacuum kiʻekiʻe, hoʻopuka kahi kumu ion i ka plasma, kahi e hoʻolalelale ʻia i loko o kahi kukuna ion ikehu kiʻekiʻe. Hoʻopōkā kēia kukuna i ka ʻili o ka ʻāpana optical, e wehe ana i nā mea ma ka pae atomika e hoʻokō i ka hoʻoponopono ʻili ultra-precise a me ka hoʻopau ʻana.

E leka uila mai iā mākou

Nā hiʻohiʻona

Kiʻikuhi kikoʻī

ʻIke Huahana o ka Mīkini Polishing Ion Beam

Ma ke ʻano he kaʻina hana ʻole-hoʻopili, hoʻopau ka poli ʻana o ke kukuna ion i ke kaumaha mechanical a pale i ka hōʻino ʻana o lalo o ka ʻili, e kūpono ai no ka hana ʻana i nā optics kiʻekiʻe-pololei i hoʻohana ʻia i ka astronomy, aerospace, semiconductors, a me nā noi noiʻi holomua.

Kumumanaʻo Hana o ka Mīkini Polishing Ion Beam

Hanauna ʻIon
Hoʻokomo ʻia ke kinoea inert (e laʻa, argon) i loko o ke keʻena vacuum a hoʻohuihui ʻia ma o kahi hoʻokuʻu uila e hana i ka plasma.

Hoʻolalelale & Hoʻokumu ʻana o ke Kukui
Hoʻolalelale ʻia nā ion i kekahi mau haneli a i ʻole tausani mau electron volts (eV) a hoʻohālike ʻia i loko o kahi kiko kukuna paʻa a kālele ʻia.

Wehe ʻana i nā mea
Hoʻopuka kino ke kukuna ion i nā ʻātoma mai ka ʻili me ka ʻole o ka hoʻomaka ʻana i nā hopena kemika.

Ka ʻIke ʻana i nā Hewa a me ka Hoʻolālā Ala
Ana ʻia nā ʻokoʻa o ke kiʻi ʻili me ka interferometry. Hoʻopili ʻia nā hana wehe e hoʻoholo i nā manawa noho a hoʻoulu i nā ala mea hana i hoʻomaikaʻi ʻia.

Hoʻoponopono Loop Pani
Hoʻomau nā pōʻaiapuni hana hou o ke ana ʻana a me ke ana ʻana a hiki i ka hoʻokō ʻia ʻana o nā pahuhopu kikoʻī RMS/PV.

Nā Hiʻohiʻona Koʻikoʻi o ka Mīkini Polishing Ion Beam

Hoʻohālikelike ʻIli Honua- Hana i nā ʻili pālahalaha, poepoe, aspherical, a me nā ʻili freeform

Ka wikiwiki o ka wehe ʻana i ka paʻa loa– Hiki ke hoʻoponopono i ka helu sub-nanometer

Ka Hana ʻAna me ka ʻOle o ka Pōʻino– ʻAʻohe hemahema o lalo o ka ʻili a i ʻole nā loli kūkulu

Hana Kūpaʻa- Hana like maikaʻi ma nā mea o nā paʻakikī like ʻole

Hoʻoponopono alapine haʻahaʻa/waena- Hoʻopau i nā hewa me ka ʻole o ka hoʻopuka ʻana i nā mea hana alapine waena/kiʻekiʻe

Koi Mālama Haʻahaʻa- Hana lōʻihi me ka manawa hoʻomaha liʻiliʻi

Nā Kikoʻī ʻenehana nui o ka mīkini poli kukuna Ion

Mea	Nā kikoʻī
ʻAno Hana	Ka hoʻoheheʻe ʻana o ka ion i loko o kahi kaiapuni vacuum kiʻekiʻe
ʻAno Hana	Hoʻopololei a me ka hoʻopili ʻana i ka ʻili ʻaʻohe pili
Ka nui o ka ʻāpana hana kiʻekiʻe loa	Φ4000 mm
Nā Koʻi Neʻe	ʻAki 3 / ʻAki 5
Paʻa o ka wehe ʻana	≥95%
Pololei o ka ʻili	PV < 10 nm; RMS ≤ 0.5 nm (RMS maʻamau < 1 nm; PV < 15 nm)
Ka hiki ke hoʻoponopono pinepine	Hoʻopau i nā hewa alapine haʻahaʻa-waena me ka ʻole o ka hoʻokomo ʻana i nā hewa alapine waena/kiʻekiʻe
Hana Hoʻomau	3-5 mau pule me ka ʻole o ka mālama ʻana i ka mīkini hoʻomaʻemaʻe
Kumukūʻai mālama	Haʻahaʻa

Nā hiki ke hana ʻana o ka mīkini poli kukuna Ion

Nā ʻAno ʻIli i Kākoʻo ʻia

Maʻalahi: Pālahalaha, poepoe, prism

Paʻakikī: Asphere symmetric/asymmetric, asphere off-axis, cylindrical

Kūikawā: Nā optics lahilahi loa, nā optics slat, nā optics hemispherical, nā optics conformal, nā papa phase, nā ʻili freeform

Nā Mea i Kākoʻo ʻia

Aniani ʻōniʻoniʻo: Quartz, microcrystalline, K9, a pēlā aku.

Nā mea infrared: Silicon, germanium, a pēlā aku.

Nā metala: Alumini, kila kila, titanium alloy, etc.

Nā kristal: YAG, silicon carbide kristal hoʻokahi, a pēlā aku.

Nā mea paʻakikī/palupalu: Silicon carbide, a pēlā aku.

Ka maikaʻi o ka ʻili / ka pololei

PV < 10 nm

RMS ≤ 0.5 nm

Nā Haʻawina Hihia Hana ʻana o ka Mīkini Polishing Beam Ion

Hihia 1 - Aniani Palahalaha Maʻamau

ʻĀpana hana: D630 mm quartz pālahalaha

Hopena: PV 46.4 nm; RMS 4.63 nm

Hihia 2 - Aniani Hoʻonaninani X-ray

ʻĀpana hana: 150 × 30 mm silicon pālahalaha

Hopena: PV 8.3 nm; RMS 0.379 nm; Piʻina 0.13 µrad

Hihia 3 - Aniani Ma waho o ke Axis

ʻĀpana hana: D326 mm aniani honua ma waho o ke axis

Hopena: PV 35.9 nm; RMS 3.9 nm

Nā nīnau i nīnau pinepine ʻia no nā aniani Quartz

Nā nīnau i nīnau pinepine ʻia - Mīkini hoʻopololei kukuna Ion

Q1: He aha ka hoʻopololei kukuna ion?
A1:ʻO ka hoʻowali ʻana i ke kukuna ion he hana hoʻopili ʻole ia e hoʻohana ana i kahi kukuna i kālele ʻia o nā ion (e like me nā ion argon) e wehe i nā mea mai kahi ʻili o ka ʻāpana hana. Hoʻolalelale ʻia nā ion a kuhikuhi ʻia i ka ʻili, e hana ana i ka wehe ʻana i nā mea pae atomika, e hopena ana i nā hoʻopau ultra-smooth. Hoʻopau kēia kaʻina hana i ke kaumaha mechanical a me ka hōʻino ʻana o lalo o ka ʻili, e kūpono ana no nā ʻāpana optical precision.

Q2: He aha nā ʻano ʻili e hiki ai i ka Ion Beam Polishing Machine ke hana?
A2:ʻO kaMīkini Hoʻopololei Kukuna Ionhiki ke hana i nā ʻano ʻili like ʻole, me nā ʻāpana optical maʻalahi e like menā pālahalaha, nā poepoe, a me nā prisms, a me nā geometries paʻakikī e like menā aspheres, nā aspheres ma waho o ke axis, a menā ʻili kūʻokoʻaHe mea kūpono loa ia ma nā mea e like me ke aniani optical, nā optics infrared, nā metala, a me nā mea paʻakikī/brittle.

Q3: He aha nā mea e hiki ai i ka Ion Beam Polishing Machine ke hana pū me?
A3:ʻO kaMīkini Hoʻopololei Kukuna Ionhiki ke hoʻopili i nā ʻano mea like ʻole, e like me:

Aniani ʻōpaeʻO Quartz, microcrystalline, K9, a pēlā aku.
Nā mea infraredʻO ke silika, ka germanium, a pēlā aku.
Nā metalaʻAluminika, kila kila, titanium metala, a pēlā aku.
Nā mea anianiʻO YAG, ka silicon carbide kristal hoʻokahi, a pēlā aku.
Nā mea paʻakikī/palupalu ʻē aʻe: Silicon carbide, a pēlā aku.

E pili ana iā mākou

He loea ʻo XKH i ka hoʻomohala ʻenehana kiʻekiʻe, ka hana ʻana, a me ke kūʻai aku ʻana i ke aniani optical kūikawā a me nā mea kristal hou. Lawelawe kā mākou huahana i nā mea uila optical, nā mea uila mea kūʻai aku, a me ka pūʻali koa. Hāʻawi mākou i nā ʻāpana optical Sapphire, nā uhi lens kelepona paʻalima, Ceramics, LT, Silicon Carbide SIC, Quartz, a me nā wafers kristal semiconductor. Me ka ʻike loea a me nā lako hana kiʻekiʻe, ʻoi aku mākou i ka hana ʻana i nā huahana maʻamau ʻole, me ka manaʻo e lilo i alakaʻi i nā mea optoelectronic ʻoihana ʻenehana kiʻekiʻe.