8 ʻīniha LNOI (LiNbO3 ma ka Insulator) Wafer no nā Optical Modulators Waveguides i hoʻohui ʻia.
Kiʻi kikoʻī
Hoʻolauna
ʻO nā wafers Lithium Niobate on Insulator (LNOI) kahi mea ʻokiʻoki i hoʻohana ʻia i nā ʻano hana optical a me ka uila. Hana ʻia kēia mau wafers ma ka hoʻoili ʻana i kahi ʻāpana lahilahi o ka lithium niobate (LiNbO₃) ma luna o kahi substrate insulating, maʻamau he silicon a i ʻole nā mea kūpono ʻē aʻe, me ka hoʻohana ʻana i nā ʻenehana loea e like me ka implantation ion a me ka paʻa wafer. He nui nā ʻano like ʻole o ka ʻenehana LNOI me ka ʻenehana wafer Silicon on Insulator (SOI) akā hoʻohana pono i nā ʻano hiʻohiʻona kūʻokoʻa o ka lithium niobate, kahi mea i ʻike ʻia no kāna mau hiʻohiʻona piezoelectric, pyroelectric, a me nonlinear optical hiʻohiʻona.
Ua loaʻa i nā wafers LNOI ka manaʻo nui ma nā kula e like me ka optics integrated, telecommunications, a me quantum computing ma muli o kā lākou hana ʻoi aku ka maikaʻi ma nā noi kiʻekiʻe a me ka wikiwiki. Hana ʻia nā wafers me ka hoʻohana ʻana i ke ʻano "Smart-cut", e hiki ai i ka mana pololei ma luna o ka mānoanoa o ka lithium niobate thin film, e hōʻoia ana i nā wafers e hoʻokō i nā kikoʻī i koi ʻia no nā noi like ʻole.
Kumukānāwai
Hoʻomaka ka hana o ka hana ʻana i nā wafers LNOI me kahi kristal lithium niobate nui. Hoʻokomo ka kristal i ka implantation ion, kahi i hoʻokomo ʻia ai nā ion helium kiʻekiʻe i ka ʻili o ka kristal lithium niobate. Ke komo nei kēia mau ion i ke aniani a hiki i kahi hohonu kikoʻī a hoʻopau i ke ʻano aniani, e hana ana i kahi mokulele palupalu e hiki ke hoʻohana ʻia ma hope e hoʻokaʻawale i ke aniani i nā ʻāpana lahilahi. ʻO ka ikehu kūikawā o nā ion helium e hoʻomalu i ka hohonu o ka implantation, e pili pono ana i ka mānoanoa o ka papa lithium niobate hope loa.
Ma hope o ka hoʻokomo ʻana i ka ion, hoʻopaʻa ʻia ka kristal lithium niobate i kahi substrate e hoʻohana ana i kahi ʻenehana i kapa ʻia ʻo wafer bonding. Hoʻohana maʻamau ke kaʻina hana hoʻopaʻa i kahi ʻano hoʻopili pololei, kahi e hoʻopili pū ʻia ai nā ʻāpana ʻelua (ka ion-implanted lithium niobate crystal a me ka substrate) ma lalo o ka wela kiʻekiʻe a me ke kaomi e hana i kahi paʻa ikaika. I kekahi mau hihia, hiki ke hoʻohana ʻia kahi mea hoʻopili e like me benzocyclobutene (BCB) no ke kākoʻo hou aku.
Ma hope o ka hoʻopaʻa ʻana, hana ka wafer i kahi kaʻina annealing e hoʻoponopono i nā pōʻino i hana ʻia e ka implantation ion a e hoʻonui i ka pilina ma waena o nā papa. ʻO ke kaʻina hana annealing kekahi e kōkua i ka ʻāpana lithium niobate ʻeleʻele e hoʻokaʻawale mai ke aniani mua, e waiho ana ma hope o kahi ʻāpana lahilahi, kiʻekiʻe o ka lithium niobate hiki ke hoʻohana ʻia no ka hana ʻana i nā mea hana.
Nā kikoʻī
Hōʻike ʻia nā wafers LNOI e kekahi mau kikoʻī koʻikoʻi e hōʻoia i ko lākou kūpono no nā noi hana kiʻekiʻe. Aia kēia mau mea:
Nā mea kiko'īʻ
| ʻMea waiwaiʻ | ʻNā kikoʻīʻ |
| Mea waiwai | Kaulike: LiNbO3 |
| Mea Pono | ʻO nā pōpō a i ʻole nā mea hoʻokomo <100μm |
| Kūlana | Y-oki ± 0.2° |
| ʻO ka mānoanoa | 4.65 g/cm³ |
| Ka Mahana Curie | 1142 ±1°C |
| ʻAlohilohi | >95% i ka laulā 450-700 nm (10 mm mānoanoa) |
Nā kikoʻī hanaʻ
| ʻParameterʻ | ʻHōʻikeʻikeʻ |
| Anawaena | 150 mm ± 0.2 mm |
| mānoanoa | 350 μm ±10 μm |
| Palahalaha | <1.3 μm |
| Huina Manoanoa (TTV) | Warp <70 μm @ 150 mm wafer |
| ʻAno mānoanoa kūloko (LTV) | <70 μm @ 150 mm wafer |
| ʻoʻoleʻa | Rq ≤0.5 nm (waiwai AFM RMS) |
| ʻAno ʻili | 40-20 |
| Nā ʻāpana (ʻaʻole hiki ke wehe ʻia) | 100-200 μm ≤3 mau ʻāpana |
| Kipa | <300 μm (wafer piha, ʻaʻohe wahi hoʻokaʻawale) |
| māwae | ʻAʻohe māwae (wafer piha) |
| Hoʻohaumia | ʻAʻole hiki ke hoʻoneʻe ʻia (wafer piha) |
| Hoʻolikelike | <30 arcseconds |
| Kūlana Kūlana Kūlana (X-axis) | 47 ±2 mm |
Nā noi
Hoʻohana ʻia nā wafers LNOI ma kahi ākea o nā noi ma muli o ko lākou mau waiwai kūʻokoʻa, ʻoi aku ka nui o nā kiʻi photonics, telecommunications, a me quantum technologies. ʻO kekahi o nā noi koʻikoʻi:
Optics hoʻohui ʻia:Hoʻohana nui ʻia nā wafers LNOI i nā kaapuni optical i hoʻohui ʻia, kahi e hiki ai i nā mea hana kiʻekiʻe photonic e like me modulators, waveguides, a me resonators. ʻO nā waiwai optical nonlinear kiʻekiʻe o ka lithium niobate e lilo ia i mea koho maikaʻi loa no nā noi e koi ana i ka manipulation māmā.
Kelepona:Hoʻohana ʻia nā wafers LNOI i nā modulators optical, ʻo ia nā mea koʻikoʻi i nā ʻōnaehana kamaʻilio kiʻekiʻe, me nā pūnaewele fiber optic. ʻO ka hiki ke hoʻololi i ka mālamalama i nā alapine kiʻekiʻe e kūpono i nā wafers LNOI no nā ʻōnaehana kelepona hou.
Kuantum Computing:Ma nā ʻenehana quantum, hoʻohana ʻia nā wafers LNOI e hana i nā ʻāpana no nā kamepiula quantum a me nā ʻōnaehana kamaʻilio quantum. Hoʻohana ʻia nā waiwai optical nonlinear o LNOI no ka hana ʻana i nā paʻi kiʻi paʻi ʻia, he mea koʻikoʻi no ka hāʻawi ʻana i ke kī nui a me ka cryptography quantum.
Nā mea nānā:Hoʻohana ʻia nā wafers LNOI i nā noi ʻike like ʻole, me nā mea ʻike maka acoustic. ʻO ko lākou hiki ke launa pū me ka māmā a me ke kani e hiki ai iā lākou ke maʻalahi no nā ʻano ʻenehana ʻike.
FAQ
Q:He aha ka ʻenehana LNOI?
A: ʻO ka ʻenehana LNOI e pili ana i ka hoʻoili ʻana o kahi kiʻiʻoniʻoni lithium niobate ma luna o kahi substrate insulating, maʻamau maʻamau. Hoʻohana kēia ʻenehana i nā waiwai kūʻokoʻa o ka lithium niobate, e like me kāna mau hiʻohiʻona kiʻekiʻe nonlinear optical, piezoelectricity, a me pyroelectricity, i mea kūpono no ka optics integrated a me ke kelepona.
Q:He aha ka ʻokoʻa ma waena o nā wafers LNOI a me SOI?
A: Ua like nā wafers LNOI a me SOI i loko o ia mau mea he ʻāpana lahilahi o nā mea i hoʻopaʻa ʻia i kahi pani. Eia nō naʻe, hoʻohana nā wafers LNOI i ka lithium niobate ma ke ʻano he kiʻi ʻoniʻoni lahilahi, aʻo nā wafers SOI ke hoʻohana nei i ke silika. Aia ka ʻokoʻa koʻikoʻi i nā waiwai o ka mea kiʻiʻoniʻoni lahilahi, me ka LNOI e hāʻawi ana i nā waiwai optical a me piezoelectric.
Q:He aha nā pōmaikaʻi o ka hoʻohana ʻana i nā wafers LNOI?
A: ʻO nā mea maikaʻi nui o nā wafers LNOI e pili ana i kā lākou mau waiwai optical maikaʻi loa, e like me nā coefficient optical nonlinear kiʻekiʻe, a me ko lākou ikaika mechanical. Hoʻohana kēia mau hiʻohiʻona i nā wafers LNOI no ka hoʻohana ʻana i nā noi kiʻekiʻe, kiʻekiʻe-frequency, a me quantum.
Q:Hiki ke hoʻohana ʻia nā wafers LNOI no nā noi quantum?
A: ʻAe, hoʻohana nui ʻia nā wafers LNOI i nā ʻenehana quantum ma muli o ko lākou hiki ke hoʻohua i nā pālua photon entangled a me ko lākou kūlike me nā photonics i hoʻohui ʻia. He mea koʻikoʻi kēia mau waiwai no nā noi i ka quantum computing, kamaʻilio, a me ka cryptography.
Q:He aha ka mānoanoa maʻamau o nā kiʻiʻoniʻoni LNOI?
A: ʻO nā kiʻiʻoniʻoni LNOI maʻamau mai kahi mau haneli nanometer a i kekahi mau micrometers i ka mānoanoa, ma muli o ke noi kikoʻī. Hoʻomalu ʻia ka mānoanoa i ka wā o ke kaʻina hana implantation.
