Hiki ke hoʻohana ʻia ke kiʻi maloʻo ʻo Sapphire Substrate PSS 2inch 4inch 6inch ICP no nā ʻāpana LED.
ʻAno kumu
1. Nā hiʻohiʻona waiwai: ʻO ka mea substrate he sapphire kristal hoʻokahi (Al₂O₃), me ka paʻakikī kiʻekiʻe, ke kūpaʻa wela kiʻekiʻe a me ke kūpaʻa kemika.
2. Ka ʻili o ka ʻili: Hoʻokumu ʻia ka ʻili e ka photolithography a me ke kālai ʻana i loko o nā hale micro-nano i kēlā me kēia manawa, e like me nā cones, nā pyramids a i ʻole nā papa hexagonal.
3. ʻO ka hana Optical: Ma o ka hoʻolālā ʻana i ka ʻili, hoʻemi ʻia ka nui o ka nānā ʻana o ka mālamalama ma ke kikowaena, a hoʻomaikaʻi ʻia ka maikaʻi o ka lawe ʻana i ka māmā.
4. Hana wela: Loaʻa i ka substrate Sapphire kahi conductivity thermal maikaʻi loa, kūpono no nā noi LED mana kiʻekiʻe.
5. Nā kikoʻī nui: ʻO ka nui maʻamau he 2 iniha (50.8mm), 4 iniha (100mm) a me 6 iniha (150mm).
Nā wahi noi nui
1. LED hana:
ʻOi aku ka maikaʻi o ka hoʻoneʻe ʻana i nā māmā: Hoʻemi ʻo PSS i ka nalowale māmā ma o ka hoʻolālā ʻana i ka hoʻolālā, hoʻomaikaʻi nui i ka ʻōlinolino LED a me ka pono kukui.
Hoʻonui i ka maikaʻi o ka ulu ʻana o ka epitaxial: Hāʻawi ke ʻano hoʻohālike i kahi kumu ulu maikaʻi no nā papa epitaxial GaN a hoʻomaikaʻi i ka hana LED.
2. Laser Diode (LD):
ʻO nā lasers mana kiʻekiʻe: ʻO ka conductivity thermal kiʻekiʻe a me ke kūpaʻa o PSS e kūpono i nā diodes laser mana kiʻekiʻe, e hoʻomaikaʻi ana i ka hana hoʻopau wela a me ka hilinaʻi.
Keia paepae haʻahaʻa: E hoʻonui i ka ulu epitaxial, e hoʻemi i ka paepae o ka diode laser, a hoʻomaikaʻi i ka pono.
3. Mea nānā kiʻi:
ʻO ka ʻike kiʻekiʻe: ʻO ka hoʻouna ʻana i nā kukui kiʻekiʻe a me ka haʻahaʻa haʻahaʻa haʻahaʻa o ka PSS e hoʻomaikaʻi i ka ʻike a me ka wikiwiki pane o ka photodetector.
Pane spectral ākea: kūpono no ka ʻike photoelectric i ka ultraviolet a i ʻike ʻia.
4. Mea uila uila:
Kūleʻa uila kiʻekiʻe: ʻO ka insulation kiʻekiʻe o Sapphire a me ke kūpaʻa wela e kūpono i nā mea mana uila kiʻekiʻe.
Hoʻopau wela maikaʻi: Hoʻomaikaʻi ka conductivity thermal kiʻekiʻe i ka hana wela o nā mea mana a hoʻolōʻihi i ke ola lawelawe.
5. Nā mea hana Rf:
ʻO ka hana alapine kiʻekiʻe: ʻO ka haʻahaʻa haʻahaʻa dielectric nalowale a me ke kiʻekiʻe thermal stability o PSS kūpono no nā polokalamu RF kiʻekiʻe.
Ka leo haʻahaʻa: ʻO ka palahalaha kiʻekiʻe a me ka haʻahaʻa haʻahaʻa haʻahaʻa e hōʻemi i ka walaʻau o ka mīkini a hoʻomaikaʻi i ka maikaʻi o ka hōʻailona.
6. Biosensors:
ʻIke ʻike kiʻekiʻe: ʻO ka lawe ʻana i nā kukui kiʻekiʻe a me ke kūpaʻa kemika o PSS kūpono no nā biosensors kiʻekiʻe.
Biocompatibility: ʻO ka biocompatibility o ka sapphire e kūpono ia no nā noi olakino a me ka biodetection.
ʻO ke kumu sapphire substrate (PSS) me nā mea epitaxial GaN:
ʻO ka substrate sapphire patterned (PSS) kahi substrate kūpono no ka ulu ʻana o ka epitaxial GaN (gallium nitride). ʻO ka lattice mau o ka sapphire kokoke i GaN, hiki ke hōʻemi i ka lattice mismatches a me nā hemahema i ka ulu epitaxial. ʻO ka micro-nano structure o ka PSS surface ʻaʻole ia e hoʻomaikaʻi wale i ka hoʻomaʻamaʻa ʻana i ka māmā, akā hoʻomaikaʻi pū i ka maikaʻi kristal o ka papa epitaxial GaN, a laila e hoʻomaikaʻi ai i ka hana a me ka hilinaʻi o ka LED.
Nā palena ʻenehana
| 'ikamu | Lapaʻa Sapphire i hoʻohālikelike ʻia (2~6 iniha) | ||
| Anawaena | 50.8 ± 0.1 mm | 100.0 ± 0.2 mm | 150.0 ± 0.3 mm |
| mānoanoa | 430 ± 25μm | 650 ± 25μm | 1000 ± 25μm |
| Kūlana ʻili | C-plane (0001) off-angle i ka M-axis (10-10) 0.2 ± 0.1° | ||
| C-plane (0001) off-angle i ka A-axis (11-20) 0 ± 0.1° | |||
| Kūlana Pāha mua | A-Plane (11-20) ± 1.0° | ||
| Ka lōʻihi pālahalaha | 16.0 ± 1.0 mm | 30.0 ± 1.0 mm | 47.5 ± 2.0 mm |
| R-Plane | hora 9 | ||
| Hoʻopau ʻili i mua | Hoʻohālike | ||
| Hoʻopau i hope | SSP: ʻĀina maikaʻi, Ra=0.8-1.2um; DSP: Epi-polished, Ra<0.3nm | ||
| Hōʻailona Laser | ʻaoʻao hope | ||
| TTV | ≤8μm | ≤10μm | ≤20μm |
| PAHU | ≤10μm | ≤15μm | ≤25μm |
| WARP | ≤12μm | ≤20μm | ≤30μm |
| Hoʻokuʻu Edge | ≤2 mm | ||
| Hōʻike Kūlana | Hoʻonaʻauao ʻano | Dome, Cone, Pyramid | |
| Kiʻekiʻe kiʻekiʻe | 1.6~1.8μm | ||
| Anawaena Kiana | 2.75~2.85μm | ||
| Wahi Laana | 0.1~0.3μm | ||
Hoʻolaha ʻo XKH i ka hāʻawi ʻana i nā substrates sapphire kiʻekiʻe, i hoʻohālikelike ʻia me ke kākoʻo ʻenehana a me ka lawelawe ma hope o ke kūʻai aku e kōkua i nā mea kūʻai aku e hoʻokō pono i nā hana hou ma ke kahua o LED, hōʻike a me optoelectronics.
1. Kiʻekiʻe kiʻekiʻe PSS lako: Patterned sapphire substrates i nā ʻano nui (2 ", 4", 6 ") e hoʻokō i nā pono o nā LED, hōʻike a me nā mea optoelectronic.
2. Hoʻolālā maʻamau: Hoʻopilikino i ka ʻili o ka micro-nano structure (e like me ka cone, pyramid a i ʻole hexagonal array) e like me ka pono o ka mea kūʻai aku e hoʻopaʻa i ka pono o ka lawe ʻana i ka māmā.
3. Kākoʻo ʻenehana: E hoʻolako i ka hoʻolālā noi PSS, ka loiloi kaʻina hana a me ke kūkākūkā ʻenehana e kōkua i nā mea kūʻai aku e hoʻomaikaʻi i ka hana huahana.
4. Kākoʻo ulu epitaxial: Hāʻawi ʻia ʻo PSS me ka GaN epitaxial material e hōʻoia i ka ulu ʻana o ka papa epitaxial kiʻekiʻe.
5. Ka ho'āʻo a me ka hōʻoia: E hoʻolako i ka hōʻike nānā maikaʻi PSS e hōʻoia i ka hoʻokō ʻana o nā huahana i nā kūlana ʻoihana.
Kiʻi kikoʻī
