ʻO ka Sapphire Square Blank Substrate - Optical, Semiconductor, a me Test Wafer

Wehewehe Pōkole:

ʻO ke kumu hakahaka huinahā sapphire i hōʻike ʻia ma ke kiʻi he mea maʻemaʻe kiʻekiʻe, hoʻokahi-kristal alumini oxide (Al₂O₃), i hana ʻia e hoʻokō i nā koi koi o nā ʻōnaehana optical holomua, ka hana semiconductor, a me ka hoʻāʻo ʻana i nā lako kikoʻī. Hana ʻia ma o nā ʻano ulu kristal holomua e like me ke kaʻina hana Kyropoulos (KY) a i ʻole Czochralski (CZ), hōʻike kēia hakahaka sapphire i ka transparency optical koʻikoʻi, ka paʻakikī koʻikoʻi, a me ke kūpaʻa kemika kupaianaha, e lilo ia i koho kūpono no nā noi ʻoihana hana kiʻekiʻe.

E leka uila mai iā mākou

Nā hiʻohiʻona

Kiʻikuhi kikoʻī

ʻIkepili o ka Sapphire Square Blank Substrate

ʻO ke kumu hakahaka huinahā sapphire, e like me ka mea i hōʻike ʻia ma ke kiʻi, he ʻāpana alumini oxide kristal hoʻokahi kiʻekiʻe (Al₂O₃) i hoʻolālā ʻia no ka hoʻohana ʻana i ka ʻenekinia optical holomua, ka hana ʻana i nā mea semiconductor, a me ka hoʻāʻo ʻana i nā lako hana pololei. Kaulana no kona mau waiwai kino a me nā kemika kūikawā, ua lilo ka sapphire i hoʻokahi o nā mea pono ʻole i nā ʻoihana e koi ana i ka lōʻihi loa, ke kūpaʻa, a me ka hana optical. Hana ʻia ma o nā ʻano ulu kristal paʻakikī, e like me ke kaʻina hana Kyropoulos (KY), Heat Exchange Method (HEM), a i ʻole Czochralski (CZ), ua hana pono ʻia kēia mau hakahaka huinahā e hoʻokō i nā kūlana kiʻekiʻe loa.

Nā Hiʻohiʻona Koʻikoʻi o ka Sapphire Square Blank Substrate

He kristal uniaxial, anisotropic ka Sapphire me kahi ʻano hexagonal lattice, e hāʻawi ana i kahi hui like ʻole o ka ikaika mechanical, ka paʻa wela, a me ke kūpaʻa kemika. Me ka helu paʻakikī Mohs o 9, ʻo ka sapphire ka lua wale nō i ka daimana ma ke ʻano o ke kūpaʻa ʻana i ke kahakaha ʻana, e hōʻoiaʻiʻo ana i ka lōʻihi o ke ola ʻana ma lalo o nā kūlana ʻoihana abrasive. ʻOi aku kona kiko heheʻe ma mua o 2000°C, e ʻae ana i ka hana hilinaʻi i nā wahi wela kiʻekiʻe, ʻoiai ʻo kona pohō dielectric haʻahaʻa e lilo ia i mea substrate makemake ʻia no RF a me nā noi uila alapine kiʻekiʻe.

Ma ke kahua optical, hōʻike ka sapphire i kahi laulā hoʻoili ākea mai ka ultraviolet hohonu (~200nm) ma o ka ʻike ʻia a hiki i ka mid-infrared (~5000nm), me ka homogeneity optical maikaʻi loa a me ka birefringence haʻahaʻa ke kuhikuhi pono ʻia. ʻO kēia mau waiwai e hana i nā blanks square sapphire i mea nui loa i nā kahua optics-intensive e like me nā ʻōnaehana laser, photonics, spectroscopy, a me ke kiʻi ʻana.

Hana ʻana a me ka Hana ʻana

Hoʻomaʻamaʻa ʻia kēlā me kēia substrate sapphire square blank i kahi kaʻina hana hana koʻikoʻi, e hoʻomaka ana me nā pauka alumina maka maʻemaʻe kiʻekiʻe i hoʻokomo ʻia i ka ulu ʻana o ka kristal i kāohi ʻia i loko o nā umu wela kiʻekiʻe. Ma hope o ka ulu ʻana o ke kristal nui, ua kuhikuhi pono ʻia (maʻamau ʻo C-plane (0001), A-plane (11-20), a i ʻole R-plane (1-102)) e kūpono i nā koi kikoʻī o ka noi. A laila ʻokiʻoki ʻia ke kristal i loko o nā blanks square me nā ʻoki i uhi ʻia i ka daimana, a ukali ʻia e ka lapping pololei e hoʻokō i ka like ʻana o ka mānoanoa. No nā noi optical a me semiconductor, hiki ke hoʻopili ʻia nā ʻili i ka pae ʻōmaʻomaʻo atomika, e hoʻokō ana i ka palahalaha koʻikoʻi, parallelism, a me nā kikoʻī o ka ʻili.

Nā Pōmaikaʻi Koʻikoʻi

ʻIke Optical Koʻikoʻi– ʻO ka hoʻoili ʻana o ka wideband mai UV a i IR e kūpono ia no nā puka makani optical, nā lua laser, a me nā uhi sensor.
Ikaika Mekanika Kiʻekiʻe– ʻO ka ikaika compressive kiʻekiʻe, ka paʻakikī haki, a me ke kūpaʻa ʻana i ke kahakaha e hōʻoia i ka lōʻihi o ke ola ma nā wahi hoʻoluhi kiʻekiʻe.
Paʻa Wela a me Kemika- Kūleʻa i ka haʻalulu wela, nā mahana kiʻekiʻe, a me nā kemika huhū, mālama i ka pono i ka wā o ka hana semiconductor a me ka ʻike ʻino ʻana o ke kaiapuni.
Mana Ana Kūpono– Nā hoʻomanawanui mānoanoa hiki ke hoʻokō ʻia i loko o ±5µm a me ka pālahalaha o ka ʻili a hiki i ka λ/10 (ma 632.8nm), koʻikoʻi no nā noi photolithography a me nā noi hoʻopaʻa wafer.
Ka maʻalahi– Kūpono no nā ʻano hana like ʻole e komo pū ana me nā ʻāpana optical, nā substrates ulu epitaxial, a me nā wafers hoʻāʻo mīkini.

Nā noi

Nā noi ʻōniʻoniʻoHoʻohana ʻia ma ke ʻano he mau puka makani, nā kānana, nā mea paʻa waena o ka loaʻa ʻana o ka laser, nā uhi pale no nā mea ʻike, a me nā substrates photonics ma muli o kona mōakāka optical a me ke kūpaʻa.
Nā Substrates SemiconductorHana ma ke ʻano he kumu nui no nā LED GaN-based, nā mea uila mana (nā ʻano SiC-on-sapphire), nā mea RF, a me nā kaapuni microelectronic, kahi i mea nui ai ka conductivity thermal a me ke kū'ē kemika.
Hoʻāʻo Lako a me nā Wafers DummyHoʻohana pinepine ʻia ma ke ʻano he mau substrates hoʻāʻo i nā laina hana semiconductor, hoʻohana ʻia no ka hoʻoponopono mīkini, ka hoʻohālike kaʻina hana, a me ka hoʻāʻo ʻana i ke ahonui o nā lako etching, deposition, a i ʻole nā lako nānā.
Noiʻi ʻEpekemaHe mea nui i nā hoʻonohonoho hoʻokolohua e pono ai nā kahua inert, moakāka, a paʻa ka mīkini no nā haʻawina optical, uila, a me nā mea.

Nā nīnau i nīnau pinepine ʻia

Q1: He aha ka pōmaikaʻi o ka hoʻohana ʻana i kahi sapphire blank huinaha ma luna o kahi wafer poepoe?
A: Hāʻawi nā hakahaka huinahā i ka nui o ka wahi hiki ke hoʻohana ʻia no ka ʻokiʻoki maʻamau, ka hana ʻana i nā mea hana, a i ʻole ka hoʻāʻo ʻana i ka mīkini, e hōʻemi ana i ka ʻōpala mea a me ke kumukūʻai.

Q2: Hiki i nā substrates sapphire ke kū i nā wahi hana semiconductor?
ʻAe, mālama nā substrates sapphire i ke kūpaʻa ma lalo o nā mahana kiʻekiʻe, ka etching plasma, a me nā hana kemika i maʻamau i ka hana semiconductor.

Q3: He mea nui anei ke kuhikuhi ʻana o ka ʻili no kaʻu noi?
A: ʻAe nō. Hoʻohana nui ʻia ka sapphire C-plane no GaN epitaxy i ka hana ʻana o LED, ʻoiai ʻoi aku ka makemake ʻia o nā kuhikuhi A-plane a me R-plane no nā noi optical a piezoelectric paha.

Q4: Loaʻa kēia mau hakahaka me nā uhi maʻamau?
A: ʻAe, hiki ke hoʻopili ʻia nā uhi anti-reflective, dielectric, a i ʻole conductive e hoʻokō i nā koi optical a uila paha.

E pili ana iā mākou

He loea ʻo XKH i ka hoʻomohala ʻenehana kiʻekiʻe, ka hana ʻana, a me ke kūʻai aku ʻana i ke aniani optical kūikawā a me nā mea kristal hou. Lawelawe kā mākou huahana i nā mea uila optical, nā mea uila mea kūʻai aku, a me ka pūʻali koa. Hāʻawi mākou i nā ʻāpana optical Sapphire, nā uhi lens kelepona paʻalima, Ceramics, LT, Silicon Carbide SIC, Quartz, a me nā wafers kristal semiconductor. Me ka ʻike loea a me nā lako hana kiʻekiʻe, ʻoi aku mākou i ka hana ʻana i nā huahana maʻamau ʻole, me ka manaʻo e lilo i alakaʻi i nā mea optoelectronic ʻoihana ʻenehana kiʻekiʻe.