ʻO SiC Ceramic Fork Arm / End Effector – Hoʻoponopono pololei no ka hana Semiconductor

ʻO SiC Ceramic Fork Arm / End Effector – ʻO ka lawelawe pololei ʻana no ka hana semiconductor kiʻi i hōʻike ʻia.

ʻO ka wehewehe pōkole:

ʻO ka SiC Ceramic Fork Arm, i ʻōlelo pinepine ʻia he Ceramic End Effector, he ʻāpana hoʻokele kikoʻī kiʻekiʻe i hoʻomohala ʻia no ka lawe ʻana i ka wafer, alignment, a me ka hoʻonohonoho ʻana i nā ʻoihana ʻenehana kiʻekiʻe, i loko o ka semiconductor a me ka hana photovoltaic. Hana ʻia me ka hoʻohana ʻana i nā seramika silicon carbide maʻemaʻe kiʻekiʻe, hoʻohui kēia ʻāpana i ka ikaika mechanical kūikawā, ka hoʻonui haʻahaʻa haʻahaʻa haʻahaʻa, a me ke kūpaʻa kiʻekiʻe i ka haʻalulu wela a me ka corrosion.

E hoʻouna i ka leka uila iā mākou

Nā hiʻohiʻona

Kiʻi kikoʻī

Nānā Huahana

ʻAʻole like me nā hopena hopena kuʻuna i hana ʻia mai ka alumini, ke kila kila, a i ʻole ka quartz, hāʻawi nā hopena hopena seramika SiC i ka hana like ʻole i loko o nā keʻena vacuum, nā lumi hoʻomaʻemaʻe, a me nā wahi kaʻina hana koʻikoʻi, e hoʻolilo iā lākou i ʻāpana koʻikoʻi o nā robots lawelawe wafer e hiki mai ana. Me ka hoʻonui ʻana i ka noi no ka hana ʻole o ka contamination a me ka hoʻomanawanui ʻana i ka chipmaking, ke lilo nei ka hoʻohana ʻana i nā hopena hopena ceramic i ka maʻamau o ka ʻoihana.

Kumu Hana Hana

ʻO ka hana ʻana oʻO nā mea hoʻopau hopena siC Ceramice pili ana i nā kaʻina hana kiʻekiʻe, maʻemaʻe kiʻekiʻe e hōʻoia i ka hana a me ka lōʻihi. ʻElua mau kaʻina hana nui i hoʻohana pinepine ʻia:

ʻO ka pānaʻi Silicon Carbide (RB-SiC)

Ma kēia kaʻina hana, ua hoʻokomo ʻia kahi preform i hana ʻia mai ka pauka carbide silicon a me ka mea hoʻopaʻa me ka silikoni hoʻoheheʻe ʻia i nā mahana kiʻekiʻe (~ 1500 ° C), e hoʻopili ana me ke koena kalapona e hana i kahi ʻāpana SiC-Si paʻa. Hāʻawi kēia ʻano hana i ka mana dimensional maikaʻi loa a he kumu kūʻai no ka hana nui.

Kapili Silika Paʻi Paʻi ʻole (SSiC)

Hana ʻia ʻo SSiC ma o ka sintering ultra-fine, high-purity SiC pauda ma nā wela kiʻekiʻe loa (> 2000°C) me ka hoʻohana ʻole ʻana i nā mea hoʻohui a i ʻole kahi pae paʻa. Loaʻa kēia i kahi huahana me kahi kokoke i 100% density a me nā waiwai mechanical a me nā mea wela kiʻekiʻe loa i loaʻa ma waena o nā mea SiC. He kūpono ia no nā noi hana wafer ultra-critical.

Hoʻoponopono hope

Mīkini CNC pololei: Loaʻa i ka palahalaha kiʻekiʻe a me ka like.
Hoʻopau ʻili: Hoʻemi ka poʻi daimana i ka ʻeleʻele o ka ʻili a hiki i ka <0.02 µm.
Nānā: Hoʻohana ʻia ka interferometry Optical, CMM, a me ka hoʻāʻo ʻole luku e hōʻoia i kēlā me kēia ʻāpana.

Hōʻoia kēia mau ʻanuʻu i kaSiC hopena hopenaHāʻawi i ka pololei o ka hoʻokomo ʻana i ka wafer, ka hoʻolālā maikaʻi loa, a me ka liʻiliʻi o nā mea hana.

Nā mea nui a me nā pono

Hiʻona	wehewehe
ʻOoleʻa kiʻekiʻe kiʻekiʻe	ʻO ka paʻakikī o Vickers> 2500 HV, ke kū'ē i kaʻaʻahu a me ka'ōpala.
Hoʻonui Thermal Haʻahaʻa	CTE ~4.5×10⁻⁶/K, hiki ke hoʻopaʻa paʻa i ke kaʻa uila wela.
Kemimi	Kū'ē i ka HF, HCl, nā kinoea plasma, a me nā meaʻino'ē aʻe.
Kūleʻa Haʻalulu Thermal maikaʻi loa	He kūpono no ka hoʻomehana wikiwiki a me ka hoʻoluʻu ʻana i nā ʻōnaehana umu a me ka umu.
Kiekie Rigidity a me ka ikaika	Kākoʻo i nā lima lāʻau cantilevered lōʻihi me ka ʻole deflection.
Haʻahaʻa Outgassing	He kūpono no nā kaiapuni ultra-high vacuum (UHV).
Mākaukau ka lumi hoʻomaʻemaʻe ISO Papa 1	Hoʻopaʻa ʻia ka pono o ka wafer.

Nā noi

Hoʻohana nui ʻia ka SiC Ceramic Fork Arm / End Effector i nā ʻoihana e koi ana i ka pololei loa, ka maʻemaʻe, a me ke kūpaʻa kemika. Loaʻa nā hiʻohiʻona noiʻi nui:

Hana Hana Semiconductor

ʻO ka hoʻouka ʻana a me ka wehe ʻana i ka wafer ma ka waiho ʻana (CVD, PVD), etching (RIE, DRIE), a me nā ʻōnaehana hoʻomaʻemaʻe.
ʻO ka lawe ʻana i ka wafer robotic ma waena o FOUP, cassette, a me nā mea hana hana.
ʻO ka mālama ʻana i ka wela kiʻekiʻe i ka wā o ka hoʻoili wela a i ʻole ka annealing.

Paʻi kiʻi kiʻi kiʻi kiʻi

ʻO ka lawe maʻalahi o nā wafers silika palupalu a i ʻole nā substrats solar i nā laina ʻakomi.

ʻOihana Hōʻike Papa Paʻa (FPD).

Ke hoʻoneʻe nei i nā panela aniani nui a i ʻole nā mea pani ma nā wahi hana OLED/LCD.

Huihui Semiconductor / MEMS

Hoʻohana ʻia i nā laina hana GaN, SiC, a me MEMS kahi mea koʻikoʻi ka mālama ʻana a me ka pololei o ke kūlana.

He mea koʻikoʻi loa kāna hana hopena hopena i ka hōʻoia ʻana i ke kīnā ʻole, ka lawelawe paʻa i ka wā o nā hana koʻikoʻi.

Nā Mana Hoʻoponopono

Hāʻawi mākou i ka hana maʻamau e hoʻokō i nā pono hana like ʻole a me nā koi kaʻina hana:

Hoʻolālā Fork: Nā hoʻolālā ʻelua ʻaoʻao, manamana lima, a i ʻole ka pae ʻāpana.
Kaulike ka nui o ka wafer: Mai 2” a 12” wafers.
Nā Kūlana Kaulana: E kūpono me nā lima robotic OEM.
Mānoanoa a me ka Ili: Loaʻa ka palahalaha pae Micron a me ka hoʻopuni ʻana.
Nā hiʻohiʻona anti-slip: ʻO nā ʻili ʻili a i ʻole nā uhi no ka paʻa ʻana i ka wafer paʻa.

ʻO kēlā me kēiamea hoʻopau hopena keramikaHoʻolālā pū ʻia me nā mea kūʻai aku e hōʻoia i ke kūpono kūpono me ka liʻiliʻi o nā hoʻololi mea hana.

Nā nīnau i nīnau pinepine ʻia (FAQ)

Q1: Pehea ka maikaʻi o SiC ma mua o ka quartz no kahi noi hopena hopena?
A1:ʻOiai hoʻohana mau ʻia ka quartz no kona maʻemaʻe, ʻaʻohe ona paʻakikī mechanical a hiki i ka haki ʻana ma lalo o ka ukana a i ʻole ka haʻalulu wela. Hāʻawi ʻo SiC i ka ikaika ʻoi aku ka maikaʻi, ke kūpaʻa ʻana, a me ke kūpaʻa wela, e hōʻemi nui ana i ka hopena o ka downtime a me ka pōʻino wafer.

Nīnau 2: Ua kūpono kēia lima lāʻau seramika me nā mea lawelawe wafer robotic?
A2:ʻAe, kūpono kā mākou mea hoʻopau hope me ka nui o nā ʻōnaehana lawelawe wafer nui a hiki ke hoʻololi ʻia i kāu mau hiʻohiʻona robotic kikoʻī me nā kiʻi ʻenekinia pololei.

Q3: Hiki iā ia ke mālama i nā wafers 300 mm me ka ʻole o ka warping?
A3:ʻOiaʻiʻo. ʻO ka paʻa kiʻekiʻe o SiC e hiki ai i nā lima lāʻau lahilahi a lōʻihi ke hoʻopaʻa paʻa i nā wafers 300 mm me ka ʻole o ka luʻu ʻana a i ʻole ka pale ʻana i ka wā o ka neʻe.

Q4: He aha ke ola lawelawe maʻamau o kahi hopena hopena ceramic SiC?
A4:Me ka hoʻohana kūpono, hiki i ka hopena hopena SiC ke lōʻihi i ka 5 a 10 mau manawa ma mua o nā quartz kuʻuna a i ʻole nā hiʻohiʻona alumini, mahalo i kona kūpaʻa maikaʻi i ka wela a me ke kaumaha mechanical.

Q5: Hāʻawi ʻoe i nā mea pani a i ʻole nā lawelawe prototyping wikiwiki?
A5:ʻAe, kākoʻo mākou i ka hana hoʻohālike wikiwiki a hāʻawi i nā lawelawe pani e pili ana i nā kaha kiʻi CAD a i ʻole nā ʻāpana i hoʻohuli ʻia mai nā lako i loaʻa.

E pili ana iā mākou

Hoʻokumu ʻo XKH i ka hoʻomohala ʻenehana kiʻekiʻe, ka hana ʻana, a me ke kūʻai ʻana i nā aniani optical kūikawā a me nā mea aniani hou. Hāʻawi kā mākou huahana i nā uila uila, nā mea hoʻohana uila, a me ka pūʻali koa. Hāʻawi mākou i nā ʻāpana optical Sapphire, nā uhi kelepona kelepona paʻa, Ceramics, LT, Silicon Carbide SIC, Quartz, a me nā wafer kristal semiconductor. Me ka ʻike akamai a me nā mea hana ʻoki ʻoki, ʻoi aku mākou i ka hoʻoili huahana maʻamau ʻole, me ka manaʻo e lilo i alakaʻi optoelectronic material high-tech ʻoihana.