ʻO ka lima ʻōpuʻu keramika SiC / End Effector - Ka lawelawe ʻana i ka presisi kiʻekiʻe no ka hana ʻana o Semiconductor

Wehewehe Pōkole:

ʻO ka SiC Ceramic Fork Arm, i kapa pinepine ʻia ʻo Ceramic End Effector, he ʻāpana lawelawe pololei kiʻekiʻe i hoʻomohala kūikawā ʻia no ka lawe ʻana i ka wafer, ke kaulike ʻana, a me ke kau ʻana i nā ʻoihana ʻenehana kiʻekiʻe, ʻoi aku hoʻi i loko o ka semiconductor a me ka hana photovoltaic. Hana ʻia me ka hoʻohana ʻana i nā keramika silicon carbide maʻemaʻe kiʻekiʻe, hoʻohui kēia ʻāpana i ka ikaika mechanical kūikawā, ka hoʻonui wela haʻahaʻa loa, a me ke kūpaʻa kiʻekiʻe i ka haʻalulu wela a me ka palaho.

E leka uila mai iā mākou

Nā hiʻohiʻona

Kiʻikuhi kikoʻī

ʻIke Huahana

ʻAʻole e like me nā mea hoʻopau hopena kuʻuna i hana ʻia mai ka alumini, ke kila kila, a i ʻole ka quartz, hāʻawi nā mea hoʻopau hopena keramika SiC i ka hana kūlike ʻole i loko o nā keʻena vacuum, nā lumi maʻemaʻe, a me nā wahi hana ʻino, e lilo ana lākou i ʻāpana koʻikoʻi o nā robots lawelawe wafer hanauna hou. Me ka piʻi ʻana o ke koi no ka hana ʻole ʻana i ka haumia a me nā hoʻomanawanui paʻa i ka hana chipmaking, ke lilo koke nei ka hoʻohana ʻana i nā mea hoʻopau hopena keramika i kūlana maʻamau o ka ʻoihana.

Kumu Hana Hana

ʻO ka hana ʻana oNā mea hoʻopau hopena keramika SiCpili i kahi moʻo o nā kaʻina hana kiʻekiʻe a maʻemaʻe hoʻi e hōʻoiaʻiʻo ana i ka hana a me ke kūpaʻa. ʻElua mau kaʻina hana nui e hoʻohana pinepine ʻia:

ʻO ka Silicon Carbide i hoʻopaʻa ʻia me ka hopena (RB-SiC)

Ma kēia kaʻina hana, ua hoʻokomo ʻia kahi preform i hana ʻia mai ka pauka silicon carbide a me ka mea hoʻopaʻa me ka silicon heheʻe i nā mahana kiʻekiʻe (~1500°C), kahi e pane ai me ke koena kalapona e hana i kahi hui SiC-Si paʻa a paʻa. Hāʻawi kēia ʻano hana i ka mana dimensional maikaʻi loa a he kūpono hoʻi ke kumukūʻai no ka hana nui.

ʻO ka Silicon Carbide Sintered Pressureless (SSiC)

Hana ʻia ʻo SSiC ma ka sintering ultra-fine, kiʻekiʻe-maʻemaʻe SiC pauka ma nā mahana kiʻekiʻe loa (>2000°C) me ka hoʻohana ʻole ʻana i nā mea hoʻohui a i ʻole kahi pae nakinaki. ʻO ka hopena kēia i kahi huahana me ka aneane 100% density a me nā waiwai mechanical a me thermal kiʻekiʻe loa i loaʻa i waena o nā mea SiC. He kūpono ia no nā noi lawelawe wafer ultra-critical.

Ka Hana Ma hope

Mīkini CNC Pololei: Hoʻokō i ka pālahalaha kiʻekiʻe a me ke ʻano like.
Hoʻopau ʻili: Hoʻemi ka hoʻowali daimana i ka ʻoʻoleʻa o ka ʻili i <0.02 µm.
Nānā ʻanaHoʻohana ʻia ka optical interferometry, CMM, a me ka hoʻāʻo ʻole e luku e hōʻoia i kēlā me kēia ʻāpana.

Hōʻoia kēia mau ʻanuʻu i kaMea hoʻokō hopena SiChāʻawi i ka pololei o ke kau ʻana o ka wafer kūlike, ka planarity maikaʻi loa, a me ka hana ʻāpana liʻiliʻi.

Nā Hiʻohiʻona Koʻikoʻi a me nā Pōmaikaʻi

Hiʻona	Wehewehena
Paʻakikī Kiʻekiʻe Loa	ʻO ka paʻakikī Vickers > 2500 HV, ke kū'ē nei i ka ʻaʻahu a me ka chipping.
Hoʻonui Haʻahaʻa	CTE ~4.5×10⁻⁶/K, e hiki ai ke kūpaʻa ka nui i ka pōʻaiapuni wela.
Ka Inertness Kemika	Kūpaʻa i ka HF, HCl, nā kinoea plasma, a me nā mea ʻino ʻē aʻe.
Ke kūpaʻa haʻalulu wela maikaʻi loa	Kūpono no ka hoʻomehana/hoʻoluʻu wikiwiki ʻana i nā ʻōnaehana vacuum a me ka umu.
Paʻa a me ka ikaika kiʻekiʻe	Kākoʻo i nā lima ʻō lōʻihi cantilevered me ka ʻole o ka deflection.
Ka hoʻokuʻu ʻana i ke kinoea haʻahaʻa	Kūpono no nā wahi vacuum kiʻekiʻe loa (UHV).
Mākaukau ka lumi maʻemaʻe ISO Papa 1	ʻO ka hana ʻole o nā ʻāpana e hōʻoiaʻiʻo i ka pono o ka wafer.

Nā noi

Hoʻohana nui ʻia ka SiC Ceramic Fork Arm / End Effector i nā ʻoihana e pono ai ka pololei loa, ka maʻemaʻe, a me ke kūpaʻa kemika. ʻO nā hiʻohiʻona noi koʻikoʻi:

Hana Hana Semiconductor

Hoʻouka/wehe ʻana i ka wafer i loko o nā ʻōnaehana waiho ʻana (CVD, PVD), etching (RIE, DRIE), a me nā ʻōnaehana hoʻomaʻemaʻe.
Ka halihali wafer robotic ma waena o FOUPs, cassettes, a me nā mea hana hana.
Ka lawelawe ʻana i ka mahana kiʻekiʻe i ka wā o ka hana wela a i ʻole ka annealing.

Hana ʻana o nā Kelepona Photovoltaic

Ka halihali akahai o nā wafer silicon palupalu a i ʻole nā mea hana lā ma nā laina hana ponoʻī.

ʻOihana Hōʻikeʻike Papa Palahalaha (FPD)

Ke hoʻoneʻe nei i nā panela aniani nui a i ʻole nā substrates i nā wahi hana OLED/LCD.

Mea hoʻohuihui Semiconductor / MEMS

Hoʻohana ʻia ma nā laina hana GaN, SiC, a me MEMS kahi e koʻikoʻi ai ka kaohi haumia a me ka pololei o ke kau ʻana.

He mea koʻikoʻi loa kāna hana hoʻokō hope loa i ka hōʻoia ʻana i ka lawelawe ʻana me ka ʻole o nā kīnā a me ke kūpaʻa i ka wā o nā hana koʻikoʻi.

Nā Hiki Hoʻopilikino

Hāʻawi mākou i kahi hoʻopilikino nui e hoʻokō i nā pono hana a me nā kaʻina hana like ʻole:

Hoʻolālā ʻōNā hoʻonohonoho ʻelua-prong, multi-finger, a i ʻole nā hoʻonohonoho pae māhele.
Hoʻohālikelike i ka nui o ka WaferMai nā wafers 2” a i 12”.
Nā ʻaoʻao kauHoʻohālikelike ʻia me nā lima robotic OEM.
Mānoanoa a me nā ʻae ʻana o ka ʻiliLoaʻa ka pālahalaha pae micron a me ka hoʻopuni ʻana o ka lihi.
Nā Hiʻohiʻona Anti-Slip: Nā ʻano ʻili a i ʻole nā uhi ʻili koho no ka paʻa ʻana o ka wafer.

kēlā me kēiamea hoʻokō hopena keramikaua hoʻolālā pū ʻia me nā mea kūʻai aku e hōʻoia i ke kūpono pololei me nā loli hāmeʻa liʻiliʻi.

Nā Nīnau i Nīnau Pinepine ʻia (FAQ)

Q1: Pehea ka maikaʻi o SiC ma mua o ka quartz no kahi noi hopena hopena?
A1:ʻOiai ka hoʻohana pinepine ʻia ʻana o ka quartz no kona maʻemaʻe, nele ia i ka paʻakikī mechanical a hiki ke haki ma lalo o ke kaumaha a i ʻole ka haʻalulu mahana. Hāʻawi ʻo SiC i ka ikaika kiʻekiʻe, ke kūpaʻa ʻana i ka ʻaʻahu, a me ke kūpaʻa wela, e hōʻemi nui ana i ka pilikia o ka downtime a me ka hōʻino ʻana o ka wafer.

Q2: Kūpono anei kēia lima ʻōpuʻu keramika me nā mea lawelawe wafer robotic āpau?
A2:ʻAe, kūpono kā mākou mau mea hoʻokō hopena seramika me ka hapa nui o nā ʻōnaehana lawelawe wafer nui a hiki ke hoʻololi ʻia i kāu mau hiʻohiʻona robotic kikoʻī me nā kiʻi ʻenekinia pololei.

Q3: Hiki iā ia ke lawelawe i nā wafers 300 mm me ka ʻole o ka warping?
A3:ʻAe. ʻO ke kūpaʻa kiʻekiʻe o SiC e ʻae i nā lima ʻō lahilahi a lōʻihi hoʻi e hoʻopaʻa pono i nā wafers 300 mm me ka ʻole o ka sagging a i ʻole ka deflection i ka wā e neʻe ai.

Q4: He aha ke ola lawelawe maʻamau o kahi mea hoʻokō hopena seramika SiC?
A4:Me ka hoʻohana pono ʻana, hiki i kahi mea hoʻokō hopena SiC ke mau i 5 a 10 mau manawa ma mua o nā hiʻohiʻona quartz a alumini paha maʻamau, mahalo i kona kūpaʻa maikaʻi loa i ke kaumaha wela a me ka mechanical.

Q5: Ke hāʻawi nei ʻoe i nā mea pani a i ʻole nā lawelawe prototyping wikiwiki?
A5:ʻAe, kākoʻo mākou i ka hana wikiwiki ʻana o ka laʻana a hāʻawi i nā lawelawe pani e pili ana i nā kiʻi CAD a i ʻole nā ʻāpana i hoʻohuli ʻia mai nā lako hana i loaʻa.

E pili ana iā mākou

He loea ʻo XKH i ka hoʻomohala ʻenehana kiʻekiʻe, ka hana ʻana, a me ke kūʻai aku ʻana i ke aniani optical kūikawā a me nā mea kristal hou. Lawelawe kā mākou huahana i nā mea uila optical, nā mea uila mea kūʻai aku, a me ka pūʻali koa. Hāʻawi mākou i nā ʻāpana optical Sapphire, nā uhi lens kelepona paʻalima, Ceramics, LT, Silicon Carbide SIC, Quartz, a me nā wafers kristal semiconductor. Me ka ʻike loea a me nā lako hana kiʻekiʻe, ʻoi aku mākou i ka hana ʻana i nā huahana maʻamau ʻole, me ka manaʻo e lilo i alakaʻi i nā mea optoelectronic ʻoihana ʻenehana kiʻekiʻe.