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ʻO ka graphite pā pā keramika SiC me ka uhi ʻana o CVD SiC no nā lako

ʻO ke kiʻi graphite o ka pā keramika SiC me ka uhi ʻana o CVD SiC no nā lako Kiʻi i hōʻike ʻia
  • ʻO ka graphite pā pā keramika SiC me ka uhi ʻana o CVD SiC no nā lako
  • ʻO ka graphite pā pā keramika SiC me ka uhi ʻana o CVD SiC no nā lako

Wehewehe Pōkole:

Hana ʻo Shanghai Xinkehui New Materials Co., Ltd. i ka Φ380mm–Φ600mm semiconductor etching disk, wafer bearing disk, silicon carbide tray, SIC tray, silicon carbide tray, ICP etching tray, etching tray, silicon carbide pureness > 99.9%, ʻehā manawa ke ola o ka lawelawe ʻana o ka pā SIC ma mua o ka graphite-based CVD tray, hoʻohana lōʻihi me ka ʻole o ka deformation, kū i ka FH acid, hoʻohuihui ʻia ka H2So4 corrosion.


Nā hiʻohiʻona

ʻAʻole hoʻohana wale ʻia nā keramika carbide Silicon i ke kahua waiho ʻana o ka ʻili lahilahi, e like me ka epitaxy a i ʻole MOCVD, a i ʻole i ka hana wafer, ma ka puʻuwai kahi i hoʻokomo mua ʻia ai nā pā lawe wafer no MOCVD i ke kaiapuni waiho ʻana, a no laila ua kūpaʻa loa i ka wela a me ka pala. Loaʻa i nā mea lawe i uhi ʻia ʻo SiC ke alakaʻi wela kiʻekiʻe a me nā waiwai hoʻolaha wela maikaʻi loa.

ʻO nā mea lawe wafer Pure Chemical Vapor Deposition Silicon Carbide (CVD SiC) no ka hana ʻana i ka Metal Organic Chemical Vapor Deposition (MOCVD) wela kiʻekiʻe.

ʻOi aku ka maikaʻi o nā mea lawe wafer CVD SiC maʻemaʻe ma mua o nā mea lawe wafer maʻamau i hoʻohana ʻia i kēia kaʻina hana, he graphite a uhi ʻia me kahi papa o CVD SiC. ʻAʻole hiki i kēia mau mea lawe graphite i uhi ʻia ke kū i nā mahana kiʻekiʻe (1100 a 1200 degere Celsius) e pono ai no ka waiho ʻana o GaN o nā kukui polū a me ke keʻokeʻo ʻōlinolino kiʻekiʻe o kēia lā. ʻO nā mahana kiʻekiʻe ke kumu o ka uhi ʻana e hoʻomohala i nā lua liʻiliʻi ma o ia mau mea e hoʻopau ai nā kemika hana i ka graphite ma lalo. A laila e ʻōpala nā ʻāpana graphite a hoʻohaumia i ka GaN, e hoʻololi ai i ka mea lawe wafer i uhi ʻia.

ʻO 99.999% a ʻoi aku paha ka maʻemaʻe o CVD SiC a he kiʻekiʻe kona conductivity thermal a me ke kūpaʻa ʻana i ka haʻalulu thermal. No laila, hiki iā ia ke kū i nā mahana kiʻekiʻe a me nā wahi ʻino o ka hana ʻana o nā LED ʻālohilohi kiʻekiʻe. He mea monolithic paʻa ia e hiki ai i ka density theoretical, hana i nā ʻāpana liʻiliʻi, a hōʻike i ke kūpaʻa kiʻekiʻe loa i ka corrosion a me ka erosion. Hiki i ka mea ke hoʻololi i ka opacity a me ka conductivity me ka ʻole o ka hoʻokomo ʻana i nā haumia metala. ʻO ka maʻamau, he 17 ʻīniha ke anawaena o nā mea lawe wafer a hiki ke paʻa i 40 mau wafers 2-4 ʻīniha.

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