ʻO ka paipu keramika Silicon carbide ka mea hoʻoulu ʻia ʻo Silicon carbide keramika e hoʻolako i ka hana hana sintering wela kiʻekiʻe
Nā hiʻohiʻona nui:
1. Pā keramika silikona carbide
- Paʻakikī kiʻekiʻe a me ke kūpaʻa ʻana i ka ʻaʻahu: kokoke ka paʻakikī i ka daimana, a hiki ke kū i ka ʻaʻahu mechanical i ka hana wafer no ka manawa lōʻihi.
- Ke alakaʻi wela kiʻekiʻe a me ke koina hoʻonui wela haʻahaʻa: hoʻolaha wela wikiwiki a me ke kūpaʻa dimensional, e pale ana i ka deformation i hoʻokumu ʻia e ke kaumaha wela.
- Ka palahalaha kiʻekiʻe a me ka hoʻopau ʻana o ka ʻili: Aia ka palahalaha o ka ʻili a hiki i ka pae micron, e hōʻoiaʻiʻo ana i ka pilina piha ma waena o ka wafer a me ka disk, e hōʻemi ana i ka haumia a me ka pōʻino.
Paʻa kemika: Ke kūpaʻa ikaika i ka pala, kūpono no nā kaʻina hana hoʻomaʻemaʻe pulu a me ke kālai ʻana i ka hana semiconductor.
2. Paipu keramika silikona carbide
- Ke kūpaʻa wela kiʻekiʻe: Hiki ke hana ma kahi mahana kiʻekiʻe ma luna o 1600°C no ka manawa lōʻihi, kūpono no ke kaʻina hana semiconductor kiʻekiʻe.
ʻO ke kūpaʻa maikaʻi loa i ka pala: kūpaʻa i nā waikawa, alkalis a me nā ʻano mea hoʻoheheʻe kemika like ʻole, kūpono no nā ʻano hana kaʻina hana ʻino.
- Paʻakikī kiʻekiʻe a me ke kūpaʻa ʻana i ka ʻaʻahu: kū'ē i ka ʻinoʻino o nā ʻāpana a me ka ʻaʻahu mechanical, hoʻolōʻihi i ke ola lawelawe.
- Ke alakaʻi wela kiʻekiʻe a me ke koina haʻahaʻa o ka hoʻonui wela: ka hoʻokele wikiwiki o ka wela a me ke kūpaʻa dimensional, e hōʻemi ana i ka deformation a i ʻole ka haki ʻana i hoʻokumu ʻia e ke kaumaha wela.
Palena Huahana：
Ka palena o ka pā keramika silikona carbide:
| (Waiwai waiwai) | (ʻĀpana) | (ssic) | |
| (ʻIke SiC) | (Wt)% | >99 | |
| (Ka nui o ka palaoa maʻamau) | maikonona | 4-10 | |
| (Ka nui) | kg/dm3 | >3.14 | |
| (Porosity ʻike ʻia) | Vo1% | <0.5 | |
| (Paʻakikī Vickers) | HV 0.5 | GPa | 28 |
| *() Ikaika kūlou* (ʻekolu helu) | 20ºC | MPa | 450 |
| (Ka ikaika kaomi) | 20ºC | MPa | 3900 |
| (Modulus Elastic) | 20ºC | GPa | 420 |
| (Paʻakikī o ka haki) | MPa/m'% | 3.5 | |
| (Ka hoʻokele wela) | 20°ºC | W/(m*K) | 160 |
| (Ke kū'ē ʻana) | 20°ºC | ʻOhm.cm | 106-108 |
(Ka helu hoʻonui wela) | a(RT**...80ºC) | K-1*10-6 | 4.3 |
(Mahana hana kiʻekiʻe loa) | oºC | 1700 | |
ʻO ke ana hoʻohālikelike o ka paipu seramika silikona carbide:
| Nā Mea | Papa Kuhikuhi |
| α-SIC | 99% minuke |
| Ka Porosity i ʻike ʻia | 16% ka palena kiʻekiʻe |
| Ka nui o ka nui | 2.7g/cm3 minuke |
| Ikaika Kulou ma ke Ana Wela Kiʻekiʻe | 100 Mpa min |
| Ka helu o ka hoʻonui wela | K-1 4.7x10 -6 |
| Ka helu o ka Conductivity Thermal (1400ºC) | 24 W/mk |
| Mahana Hana Loa | 1650ºC |
Nā noi nui:
1. Pā keramika silikona carbide
- ʻO ka ʻoki ʻana a me ka hoʻopili ʻana i ka wafer: lawelawe ma ke ʻano he kahua hāpai e hōʻoia i ka pololei a me ke kūpaʻa i ka wā e ʻoki ana a me ka hoʻopili ʻana.
- Ke kaʻina hana Lithography: Hoʻopaʻa ʻia ka wafer i loko o ka mīkini lithography e hōʻoia i ke kūlana kiʻekiʻe i ka wā e hōʻike ʻia ai.
- Hoʻopili Kemika Mekanika (CMP): hana ma ke ʻano he kahua kākoʻo no nā pads hoʻopili, e hāʻawi ana i ke kaomi like a me ka hoʻolaha wela.
2. Paipu keramika silikona carbide
- Paipu umu wela kiʻekiʻe: hoʻohana ʻia no nā lako wela kiʻekiʻe e like me ka umu hoʻolaha a me ka umu oxidation e lawe i nā wafers no ka mālama ʻana i ke kaʻina hana wela kiʻekiʻe.
- Ke kaʻina hana CVD/PVD: Ma ke ʻano he paipu hali i loko o ke keʻena hopena, kū i nā mahana kiʻekiʻe a me nā kinoea ʻino.
- Nā mea pono o nā lako semiconductor: no nā mea hoʻololi wela, nā paipu kinoea, a pēlā aku, e hoʻomaikaʻi i ka pono o ka hoʻokele wela o nā lako.
Hāʻawi ʻo XKH i kahi laulā piha o nā lawelawe maʻamau no nā pā keramika silicon carbide, nā kīʻaha omo a me nā paipu keramika silicon carbide. Hiki ke hoʻopilikino ʻia nā pā keramika Silicon carbide a me nā kīʻaha omo, XKH e like me nā koi o nā mea kūʻai aku o nā nui like ʻole, nā ʻano a me ka ʻili ʻino, a kākoʻo i ka mālama ʻana i ka uhi kūikawā, hoʻonui i ke kūpaʻa ʻana i ka ʻaʻahu a me ke kūpaʻa ʻana i ka pala; No nā paipu keramika silicon carbide, hiki iā XKH ke hoʻopilikino i nā ʻano anawaena o loko, ke anawaena o waho, ka lōʻihi a me ke ʻano paʻakikī (e like me ka paipu i hoʻohālikelike ʻia a i ʻole ka paipu porous), a hāʻawi i ka polishing, ka uhi anti-oxidation a me nā kaʻina hana mālama ʻili ʻē aʻe. Hōʻoia ʻo XKH e hiki i nā mea kūʻai aku ke hoʻohana pono i nā pono hana o nā huahana keramika silicon carbide e hoʻokō i nā koi koi o nā kahua hana kiʻekiʻe e like me semiconductors, leds a me photovoltaics.
Kiʻikuhi kikoʻī
