Kahua Hoʻopaʻa Ea SiC Precision Ultra

Kiʻi i hōʻike ʻia ma ke kahua ʻo Ultra-Precision SiC Air-Bearing

Wehewehe Pōkole:

Me ka ulu mau ʻana o ka ʻoihana semiconductor, koi nā lako hana a me nā mea nānā i ka hana kiʻekiʻe aʻe. Ma muli o ka ʻike loea i ka kaohi neʻe a me ke kūlana nanometer-level, ua hoʻomohala mākou i kahi kahua ea ultra-precision dual-axis planar H-type.

E leka uila mai iā mākou

Nā hiʻohiʻona

Kiʻikuhi kikoʻī

ʻIke laulā

Hana ʻia me kahi ʻano keramika silicon carbide (SiC) i hoʻonui ʻia i nā mea palena ʻole a me ka ʻenehana ea i uku ʻia, hāʻawi ke kahua i ka pololei kupaianaha, ka paʻakikī, a me ka pane ikaika. He kūpono loa ia no:

Ka hana ʻana a me ka nānā ʻana o ka semiconductor
Hana ʻana o Micro/nano a me ka metrology
ʻO ka ʻoki lele a me ka hoʻowali ʻana i ka unahi nanometer
Ka nānā ʻana i ka pololei wikiwiki

Nā Hiʻohiʻona Koʻikoʻi

Alanui alakaʻi ea SiCno ka paʻakikī kiʻekiʻe loa a me ka pololei
Nā dinamika kiʻekiʻe: ka wikiwiki a hiki i ka 1 m/s, ka wikiwiki a hiki i ka 4 g, ka noho wikiwiki ʻana
ʻO ke axis Y gantry pālua-hoʻokelehōʻoia i ka hiki ke hoʻouka kiʻekiʻe a me ke kūpaʻa
Nā koho encoder: ka grating optical a i ʻole ka interferometer laser
Ka pololei o ke kūlana: ±0.15 μm;hiki ke hana hou ʻia: ±75 nm
Hoʻonohonoho ʻia ke ala uweano ka hoʻolālā maʻemaʻe a me ka hilinaʻi lōʻihi
Nā hoʻonohonoho hiki ke hoʻopilikino ʻiano nā pono kikoʻī o ka noi

Hoʻolālā Kūpono Loa & Hoʻolālā Direct-Drive, ʻAʻohe Hoʻokaʻaʻike

ʻŌnaehana Keramika SiC: ~5× ka ʻoʻoleʻa o ka alumini metala a me ~5× ka hoʻonui wela haʻahaʻa, e hōʻoiaʻiʻo ana i ke kūpaʻa wikiwiki kiʻekiʻe a me ka paʻa wela.
ʻO ka ea-bearing i uku ʻia: Hoʻonui ka hoʻolālā ponoʻī i ka paʻakikī, ka hiki ke ukana, a me ke kūpaʻa o ka neʻe.
Hana Hoʻoikaika: Kākoʻo i ka wikiwiki o 1 m/s a me ka wikiwiki o 4 g, kūpono no nā kaʻina hana kiʻekiʻe.
Hoʻohui maʻalahiHoʻohālikelike ʻia me nā ʻōnaehana hoʻokaʻawale haʻalulu, nā pae wili, nā modula tilt, a me nā kahua lawelawe wafer.
Hoʻokele UeaʻO ke radius kulou i kāohi ʻia e hōʻemi i ke kaumaha no ke ola lawelawe lōʻihi.

Motika Linear ʻAʻohe KoʻokoʻoNeʻe mālie me ka ʻole o ka ikaika cogging.
Hoʻokele Multi-Motor: Hoʻomaikaʻi ke kau ʻana o ka motika ukana i ka pololei, ka palahalaha, a me ka pololei kihi.
Hoʻokaʻawale Wela: Ua hoʻokaʻawale ʻia nā motika mai ke kahua; koho ka hoʻoluʻu ea a wai paha no nā pōʻaiapuni hana kiʻekiʻe.

Nā kikoʻī

Hoʻohālike	400-400	500-500	600-600
Nā koʻi	X (scan) / Y (ʻanuʻu)	X (scan) / Y (ʻanuʻu)	X (scan) / Y (ʻanuʻu)
Huakaʻi (mm)	400 / 400	500 / 500	600 / 600
Pololei (μm)	±0.15	±0.2	±0.2
Ka hana hou ʻana (nm)	±75	±100	±100
Hoʻonā (nm)	0.3	0.3	0.3
Ka wikiwiki kiʻekiʻe (m/s)	1	1	1
Hoʻolalelale (g)	4	4	4
Pololei (μm)	±0.2	±0.3	±0.4
Paʻa (nm)	±5	±5	±5
Ukana Nui (kg)	20	20	20
Pitch/Roll/Yaw (arc-sec)	±1	±1	±1

Nā Kūlana Hoʻāʻo:

Lako ea: maʻemaʻe, maloʻo; kiko hau ≤ 0°F; kānana ʻāpana ≤ 0.25 μm; a i ʻole 99.99% naikokene.
Ua ana ʻia ka pololei he 25 mm ma luna o ke kikowaena kahua ma 20±1 °C, 40–60% RH.

Nā noi

ʻO ka lithography semiconductor, ka nānā ʻana, a me ka lawelawe ʻana i ka wafer
Hana ʻana o Micro/nano a me ka metrology pololei
Hana ʻana i nā optics kiʻekiʻe a me ka interferometry
Aerospace a me ka noiʻi ʻepekema holomua

Nā nīnau i nīnau pinepine ʻia - Ke Kahua Hāpai Ea Silicon Carbide

1. He aha ke kahua ea?

Hoʻohana kahi kahua ea-e hoʻohana ana i kahi ʻili lahilahi o ka ea i hoʻopaʻa ʻia ma waena o ke kahua a me ke alakaʻi e hoʻolakoʻaʻohe friction, ʻaʻohe ʻaʻahu, a me ka neʻe ʻoluʻolu loaʻAʻole e like me nā bearings mechanical maʻamau, hoʻopau ia i ka paheʻe ʻana, hāʻawi i ka pololei o ka pae nanometer, a kākoʻo i ka hilinaʻi lōʻihi.

2. No ke aha e hoʻohana ai i ka silicon carbide (SiC) no ke kūkulu ʻana o ke kahua?

ʻOʻoleʻa kiʻekiʻe: ~5× o ke kola alumini, e hoʻēmi ana i ka deformation i ka wā o ka neʻe ʻana o ka dynamic.
Hoʻonui wela haʻahaʻa: ~5× haʻahaʻa ma mua o ka alumini, e mālama ana i ka pololei ma lalo o nā loli o ka mahana.
MāmāʻO ka nui haʻahaʻa i hoʻohālikelike ʻia me ke kila, e hiki ai ke hana wikiwiki a me ka wikiwiki kiʻekiʻe.
Paʻa maikaʻi loaʻOi aku ka damping a me ka paʻakikī no ke kau ʻana i ka pololei loa.

3. Pono anei ke kahua i ka lubrication a i ʻole ka mālama ʻana?

ʻAʻole pono ka lubrication kuʻuna no ka mea aiaʻaʻohe pili mīkiniʻO ka mālama ʻana i ʻōlelo ʻia e komo pū ana me:

Hoʻolakoea i hoʻopaʻa ʻia a maloʻo a i ʻole ka naikokene
Nānā manawa o nā kānana a me nā mea hoʻomaloʻo
Ke nānā ʻana i nā kaula a me nā ʻōnaehana hoʻoluʻu

4. He aha nā koi no ka hoʻolako ʻana i ka ea?

Kiko o ka hau: ≤ 0 °F (≈ –18 °C)
Kānana ʻāpana: ≤ 0.25 μm
Ea maʻemaʻe, maloʻo a i ʻole 99.99% naikokene maʻemaʻe
Kaomi paʻa me ka liʻiliʻi o ka loli

E pili ana iā mākou

He loea ʻo XKH i ka hoʻomohala ʻenehana kiʻekiʻe, ka hana ʻana, a me ke kūʻai aku ʻana i ke aniani optical kūikawā a me nā mea kristal hou. Lawelawe kā mākou huahana i nā mea uila optical, nā mea uila mea kūʻai aku, a me ka pūʻali koa. Hāʻawi mākou i nā ʻāpana optical Sapphire, nā uhi lens kelepona paʻalima, Ceramics, LT, Silicon Carbide SIC, Quartz, a me nā wafers kristal semiconductor. Me ka ʻike loea a me nā lako hana kiʻekiʻe, ʻoi aku mākou i ka hana ʻana i nā huahana maʻamau ʻole, me ka manaʻo e lilo i alakaʻi i nā mea optoelectronic ʻoihana ʻenehana kiʻekiʻe.