156mm 159mm 6 iniha Sapphire Wafer no ka mea lawe C-Plane DSP TTV
Hōʻike
| 'ikamu | 6-inihi C-plane(0001) Sapphire Wafers | |
| Na Mea Kilika | 99,999%, Maʻemaʻe Kiʻekiʻe, Monocrystalline Al2O3 | |
| Papa | Prime, Epi-Makaukau | |
| Kūlana ʻili | mokulele C(0001) | |
| C-plane off-angle i ka M-axis 0.2 +/- 0.1° | ||
| Anawaena | 100.0 mm +/- 0.1 mm | |
| mānoanoa | 650 μm +/- 25 μm | |
| Kūlana Pāha mua | C-plane(00-01) +/- 0.2° | |
| ʻaoʻao hoʻokahi i poli | ʻIli i mua | Epi-polished, Ra < 0.2 nm (na AFM) |
| (SSP) | Ili hope | ʻĀina maikaʻi, Ra = 0.8 μm a 1.2 μm |
| ʻaoʻao ʻelua i hoʻoliʻi ʻia | ʻIli i mua | Epi-polished, Ra < 0.2 nm (na AFM) |
| (DSP) | Ili hope | Epi-polished, Ra < 0.2 nm (na AFM) |
| TTV | < 20 μm | |
| PAHU | < 20 μm | |
| WARP | < 20 μm | |
| Hoʻomaʻemaʻe / Packaging | ʻO ka papa 100 ka hoʻomaʻemaʻe ʻana i ka lumi hoʻomaʻemaʻe a me ka ʻūhā ʻūhā, | |
| 25 mau ʻāpana i hoʻokahi pahu cassette a i ʻole ʻāpana ʻāpana hoʻokahi. | ||
ʻO ke ʻano Kylopoulos (KY method) ke hoʻohana ʻia nei e nā hui he nui ma Kina e hana i nā kristal sapphire no ka hoʻohana ʻana i nā ʻoihana uila a me nā optics.
Ma kēia kaʻina hana, hoʻoheheʻe ʻia ka alumini oxide kiʻekiʻe i loko o kahi pahu i nā mahana ma luna o 2100 degere Celsius.ʻO ka maʻamau, hana ʻia ka crucible me ka tungsten a i ʻole molybdenum.Hoʻokomo ʻia kahi aniani hua ʻano pololei i loko o ka alumina hehee.Huki mālie ʻia ke aniani hua i luna a hiki ke hoʻololi ʻia i ka manawa like.Ma ke kaohi pono ʻana i ka gradient wela, ka huki huki a me ka helu hoʻomaha, hiki ke hana ʻia kahi ingot nui, hoʻokahi-crystal, kokoke cylindrical ingot mai ka heheʻe.
Ma hope o ka ulu ʻana o nā ingots sapphire kristal hoʻokahi, wili ʻia lākou i loko o nā koʻokoʻo cylindrical, a laila ʻoki ʻia i ka mānoanoa pukaaniani i makemake ʻia a hoʻonani ʻia a hiki i ka hopena o ka ʻili i makemake ʻia.
Kiʻi kikoʻī
