4 iniha SiC Wafers 6H Semi-Insulating SiC Substrates prime, noiʻi, a me ka papa dummy

4 ʻīniha SiC Wafers 6H Semi-Insulating SiC Substrates prime, noiʻi, a me ka papa dummy kiʻi ʻike ʻia.

ʻO ka wehewehe pōkole:

Hoʻokumu ʻia ka substrate silicon carbide semi-insulated e ka ʻokiʻoki, ka ʻoki ʻana, ka polishing, ka hoʻomaʻemaʻe a me nā ʻenehana hana ʻē aʻe ma hope o ka ulu ʻana o ka semi-insulated silicon carbide crystal. Hoʻoulu ʻia kahi ʻāpana a i ʻole multilayer crystal layer ma luna o ka substrate e hoʻokō i nā koi o ka maikaʻi e like me ka epitaxy, a laila hana ʻia ka mīkini RF microwave ma o ka hoʻohui ʻana i ka hoʻolālā kaapuni a me ka ʻeke. Loaʻa e like me 2inch 3inch 4incgh 6inch 8 iniha ʻoihana, noiʻi a me ka hoʻāʻo ʻana i ka semi-insulated silicon carbide one crystal substrates.

E hoʻouna i ka leka uila iā mākou

Huahana Huahana

Papa			ʻAʻohe papa hana MPD (Z Grade)			Papa Hana Maʻamau (P Grade)		Papa Dummy (Ka Papa D)
Anawaena			99.5 mm~100.0 mm
	4H-SI		500 μm±20 μm			500 μm±25 μm
Kūlana Wafer			Ke koʻi waho: 4.0° i< 1120 > ± 0.5° no 4H-N, Ma ke axis: <0001>±0.5° no 4H-SI
	4H-SI		≤1cm^-2			≤5 knm^-2		≤15 knm^-2
	4H-SI		≥1E9 Ω·cm					≥1E5 Ω·cm
Kūlana Pāha mua		{10-10} ±5.0°
Ka lōʻihi pālahalaha		32.5 mm±2.0 mm
Ka lōʻihi pālahalaha lua		18.0 mm±2.0 mm
Kūlana Pāpā lua		ʻO ke alo silika i luna: 90° CW. mai Prime flat ±5.0°
Hoʻokuʻu Edge		3 mm
LTV/TTV/Bow/Warp		≤3 μm/≤5 μm/≤15 μm/≤30 μm						≤10 μm / ≤15 μm / ≤25 μm / ≤40 μm
ʻoʻoleʻa			C maka				Pōlani		Ra≤1 nm
			ʻO ka maka	CMP	Ra≤0.2 nm					Ra≤0.5 nm
Nā Māwae ʻO Edge Ma ka Māmā ʻO ke Kiʻekiʻe		ʻAʻohe						ʻO ka lōʻihi huila ≤ 10 mm, hoʻokahi lōʻihi≤2 mm
Nā Papa Hex Ma ka Māmā Kiʻekiʻe		ʻĀpana hui ≤0.05%						ʻĀpana hui ≤0.1%
Nā ʻāpana Polytype Ma ka Māmā Kiʻekiʻe		ʻAʻohe						ʻĀpana huila≤3%
Hoʻokomo ʻia ʻo Carbon Visual		ʻĀpana hui ≤0.05%						ʻĀpana hui ≤3%
ʻO ka ʻili o ka ʻili silikoni e ka māmā ikaika loa		ʻAʻohe						Huina lōʻihi≤1＊wafer anawaena
Kiʻekiʻe ʻo Edge Chips e ka māmā ikaika		ʻAʻole ʻae ʻia ≥0.2 mm laula a me ka hohonu						5 ʻae ʻia, ≤1 mm kēlā me kēia
ʻO ka hoʻohaumia ʻana o ka ʻili Silicon e ka ikaika kiʻekiʻe		ʻAʻohe
Hoʻopili ʻia		ʻO ka pahu wafer nui a i ʻole ka pahu wafer hoʻokahi