ʻO 4 ʻīniha SiC Wafers 6H Semi-Insulating SiC Substrates prime, research, a me dummy grade

Wehewehe Pōkole:

Hoʻokumu ʻia ka substrate silicon carbide semi-insulated ma ka ʻoki ʻana, wili ʻana, poli ʻana, hoʻomaʻemaʻe a me nā ʻenehana hana ʻē aʻe ma hope o ka ulu ʻana o ka kristal silicon carbide semi-insulated. Hoʻoulu ʻia kahi papa a i ʻole ka papa kristal multilayer ma luna o ka substrate e hoʻokō ana i nā koi maikaʻi e like me ka epitaxy, a laila hana ʻia ka mea microwave RF ma ka hoʻohui ʻana i ka hoʻolālā kaapuni a me ka hoʻopili ʻana. Loaʻa ma ke ʻano he 2inch 3inch 4incgh 6inch 8 iniha ʻoihana, noiʻi a me ka hoʻāʻo ʻana i ka papa semi-insulated silicon carbide single crystal substrates.

E leka uila mai iā mākou

Nā hiʻohiʻona

Nā kikoʻī huahana

Papa			Papa Hana MPD ʻOle (Pae Z)			Papa Hana Maʻamau (Pae P)		Papa Hoʻopunipuni (Papa D)
Anawaena			99.5 mm~100.0 mm
	4H-SI		500 μm±20 μm			500 μm±25 μm
Hoʻonohonoho Wafer			ʻO ke axis ma waho: 4.0° i ka ʻaoʻao <1120> ±0.5° no 4H-N, Ma ke axis: <0001>±0.5° no 4H-SI
	4H-SI		≤1 kenimika^-2			≤5 kenimika^-2		≤15 kenimika^-2
	4H-SI		≥1E9 Ω·cm					≥1E5 Ω·cm
Kūlana Pālahalaha Mua		{10-10} ±5.0°
Ka Lōʻihi Palahalaha Mua		32.5 mm±2.0 mm
Ka Lōʻihi Pālahalaha Lua		18.0 mm±2.0 mm
Kūlana Pālahalaha Lua		Ke alo Silicon i luna: 90° CW. mai Prime flat ±5.0°
Hoʻokaʻawale ʻana i ka lihi		3 mm
LTV/TTV/Kakaka/Warp		≤3 μm/≤5 μm/≤15 μm/≤30 μm						≤10 μm / ≤15 μm / ≤25 μm / ≤40 μm
ʻOʻoleʻa			Maka C				Pōlani		Ra≤1 nm
			Maka Si	CMP	Ra≤0.2 nm					Ra≤0.5 nm
Nā Māwae Lihi e ka Mālamalama Ikaika Kiʻekiʻe		ʻAʻohe						Ka lōʻihi huina ≤ 10 mm, hoʻokahi lōʻihi≤2 mm
Nā Papa Hex Ma o ke Kukui Ikaika Kiʻekiʻe		ʻĀpana hōʻuluʻulu ≤0.05%						ʻĀpana hōʻuluʻulu ≤0.1%
Nā wahi Polytype e ka mālamalama ikaika kiʻekiʻe		ʻAʻohe						ʻĀpana hōʻuluʻulu ≤3%
Nā Hoʻokomo Kalapona ʻIke		ʻĀpana hōʻuluʻulu ≤0.05%						ʻĀpana hōʻuluʻulu ≤3%
Nā ʻōpala ʻili Silicon e ka mālamalama ikaika kiʻekiʻe		ʻAʻohe						Ka lōʻihi huina ≤1＊ke anawaena wafer
Kiʻekiʻe nā ʻāpana lihi ma o ka mālamalama ikaika		ʻAʻohe mea i ʻae ʻia ≥0.2 mm ka laulā a me ka hohonu						5 i ʻae ʻia, ≤1 mm kēlā me kēia
Ka haumia ʻana o ka ʻili Silicon ma o ka ikaika kiʻekiʻe		ʻAʻohe
Ka hoʻopili ʻana		Kaseta Wafer Multi-wafer a i ʻole ka ipu Wafer hoʻokahi