4H-N/6H-N SiC Wafer Reasearch hana Dummy grade Dia150mm Silicon carbide substrate
6 'īniha anawaena silikon carbide (SiC) substrate kiko'ī
Papa | Zero MPD | Hana ʻia | Papa noiʻi | Papa Dummy |
Anawaena | 150.0mm±0.25mm | |||
mānoanoa | 4H-N | 350um±25um | ||
4H-SI | 500um±25um | |||
Kūlana Wafer | Ma ke axis:<0001>±0.5° no 4H-SI | |||
Papa Papahana | {10-10}±5.0° | |||
Ka lōʻihi pālahalaha | 47.5mm±2.5mm | |||
Hoʻokuʻu lihi | 3mm | |||
TTV/Bow/Warp | ≤15um/≤40um/≤60um | |||
Micropipe Density | ≤1cm-2 | ≤5cm-2 | ≤15cm-2 | ≤50cm-2 |
Kū'ē 4H-N 4H-SI | 0.015~0.028Ω!cm | |||
≥1E5Ω!cm | ||||
ʻoʻoleʻa | Polani Ra ≤1nm CMP Ra≤0.5nm | |||
# Nā māwae e ke kukui ikaika kiʻekiʻe | ʻAʻohe | 1 ʻae ʻia, ≤2mm | ʻO ka lōʻihi kumulative ≤10mm, hoʻokahi lōʻihi≤2mm | |
* Nā papa Hex ma ke kukui ikaika kiʻekiʻe | ʻĀpana hui ≤1% | ʻĀpana hui ≤ 2% | ʻĀpana hui ≤ 5% | |
* Nā wahi polytype me ke kukui ikaika kiʻekiʻe | ʻAʻohe | ʻĀpana hui ≤ 2% | ʻĀpana hui ≤ 5% | |
*&E ʻoki ʻia e ke kukui ikaika loa | 3 ʻōpala i ka 1 x wafer anawaena kumulative lōʻihi | 5 ʻōpala i ka 1 x wafer anawaena kumulative lōʻihi | 5 mau ʻōpala i ka 1 x wafer anawaena huila lōʻihi | |
ʻāpana lihi | ʻAʻohe | 3 ʻae ʻia, ≤0.5mm kēlā me kēia | 5 ʻae ʻia, ≤1mm kēlā me kēia | |
ʻO ka hoʻohaumia ʻana e ke kukui ikaika kiʻekiʻe | ʻAʻohe
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Kūʻai a me nā mea kūʻai aku
Kūʻai Mea
Na ke keʻena kūʻai waiwai ke kuleana e hōʻiliʻili i nā mea maka a pau e pono ai e hana i kāu huahana. Loaʻa mau ka traceability o nā huahana a me nā mea a pau, me ka nānā ʻana i nā kemika a me ke kino.
ʻAno maikaʻi
I ka wā a ma hope o ka hana ʻana a i ʻole ka mīkini ʻana i kāu huahana, pili ka ʻoihana hoʻokele maikaʻi i ka hōʻoia ʻana i nā mea āpau a me nā ʻae ʻana e hui a ʻoi aku paha i kāu kikoʻī.
lawelawe
Haʻaheo mākou iā mākou iho i ka loaʻa ʻana o nā limahana ʻenehana kūʻai aku me ka ʻoi aku o 5 mau makahiki ʻike i ka ʻoihana semiconductor. Hoʻomaʻamaʻa ʻia lākou e pane i nā nīnau loea a me ka hāʻawi ʻana i nā huaʻōlelo kūpono no kāu mau pono.
Aia mākou ma kou ʻaoʻao i kēlā me kēia manawa ke loaʻa iā ʻoe ka pilikia, a hoʻoholo i loko o 10 mau hola.