Hana noiʻi Wafer 4H-N/6H-N SiC Dummy grade Dia150mm Silicon carbide substrate
ʻO ke kikoʻī o ka substrate silicon carbide (SiC) 6 ʻīniha ke anawaena
| Papa | ʻOle MPD | Hana ʻana | Papa Noiʻi | Papa Dummy |
| Anawaena | 150.0mm ± 0.25mm | |||
| Mānoanoa | 4H-N | 350um±25um | ||
| 4H-SI | 500um±25um | |||
| Hoʻonohonoho Wafer | Ma ke axis:<0001>±0.5° no 4H-SI | |||
| Pālahalaha mua | {10-10}±5.0° | |||
| Ka Lōʻihi Palahalaha Mua | 47.5mm ± 2.5mm | |||
| Hoʻokaʻawale ʻia ka lihi | 3mm | |||
| TTV/Kakaka/Warp | ≤15um/≤40um/≤60um | |||
| Ka nui o ka micropipe | ≤1cm-2 | ≤5cm-2 | ≤15cm-2 | ≤50cm-2 |
| Kū'ē 4H-N 4H-SI | 0.015~0.028Ω!cm | |||
| ≥1E5Ω!cm | ||||
| ʻOʻoleʻa | ʻO Ra Polani ≤1nm CMP Ra≤0.5nm | |||
| #Nā māwae e ke kukui ikaika loa | ʻAʻohe | 1 i ʻae ʻia, ≤2mm | Ka lōʻihi o ka huina ≤10mm, ka lōʻihi hoʻokahi ≤2mm | |
| *Nā papa Hex e ke kukui ikaika kiʻekiʻe | ʻĀpana hōʻuluʻulu ≤1% | ʻĀpana hōʻuluʻulu ≤ 2% | ʻĀpana hōʻuluʻulu ≤ 5% | |
| *Nā wahi Polytype e ke kukui ikaika kiʻekiʻe | ʻAʻohe | ʻĀpana hōʻuluʻulu ≤ 2% | ʻĀpana hōʻuluʻulu ≤ 5% | |
| *&Nā ʻōpala e ke kukui ikaika kiʻekiʻe | 3 mau ʻōpala i 1 x ke anawaena wafer ka lōʻihi hōʻuluʻulu | 5 mau ʻōpala i 1 x ke anawaena wafer ka lōʻihi hōʻuluʻulu | 5 mau ʻōpala i ka lōʻihi o ka lōʻihi o ka wafer | |
| ʻĀpana lihi | ʻAʻohe | 3 i ʻae ʻia, ≤0.5mm kēlā me kēia | 5 i ʻae ʻia, ≤1mm kēlā me kēia | |
| Ka haumia ʻana e ka mālamalama ikaika kiʻekiʻe | ʻAʻohe
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Kūʻai aku a me ka lawelawe mea kūʻai aku
Ke kūʻai ʻana i nā mea hana
ʻO ke keʻena kūʻai mea hana ke kuleana e hōʻiliʻili i nā mea maka a pau e pono ai no ka hana ʻana i kāu huahana. Loaʻa mau ka hiki ke hahai piha ʻia o nā huahana a me nā mea hana a pau, me ke kālailai kemika a me ke kino.
Kūlana
I ka wā a ma hope o ka hana ʻana a i ʻole ka mīkini ʻana o kāu huahana, pili ka ʻoihana hoʻomalu maikaʻi i ka hōʻoia ʻana ua hoʻokō a ʻoi aku paha nā mea āpau a me nā ʻae ʻana i kāu kikoʻī.
lawelawe
Haʻaheo mākou i ka loaʻa ʻana o nā limahana ʻenekinia kūʻai aku me nā makahiki he 5 ma ka ʻoihana semiconductor. Ua aʻo ʻia lākou e pane i nā nīnau loea a me ka hāʻawi ʻana i nā ʻōlelo kūʻai kūpono no kāu mau pono.
Aia mākou ma kou ʻaoʻao i kēlā me kēia manawa ke loaʻa iā ʻoe ka pilikia, a hoʻoponopono iā ia i loko o 10 mau hola.



