4inch 6inch Lithium niobate hoʻokahi kiʻiʻoniʻoni LNOI wafer
ʻO ke kaʻina hana hoʻomākaukau o nā mea LNOI ua māhele nui ʻia i nā ʻanuʻu ʻehā
(1) Ua hoʻokomo ʻia ʻo ia i loko o ka mea X-cut lithium niobate i kekahi ikehu, a hoʻokomo ʻia i loko o ka papa kīnā ma kahi hohonu ma lalo o ka papa honua o ka lithium niobate;
(2) Hoʻopaʻa ʻia ka mea i hoʻokomo ʻia i ka lithium niobate i kahi substrate silicon me kahi papa oxide e hana i kahi ʻano hoʻopaʻa;
(3) Ua hoʻopili ʻia ka hale hoʻopaʻa i mea e ulu ai nā hemahema i hoʻokomo ʻia e He ion implantation a hōʻuluʻulu e hana i nā māwae. ʻO ka hope, ua hoʻokaʻawale ʻia ka lithium niobate ma ka ʻaoʻao hemahema e hana i nā ʻāpana lithium niobate koena a me nā wafers LNOI.
Nā noi a me nā pono o ka wafer LNOI
1--Lithium niobate piezoelectric films (LNOI) loaʻa i ka piezoelectric coefficient kiʻekiʻe a me ka dielectric mau, hiki ke hoʻololi i ka ikehu mechanical i ka ikehu uila a i ʻole ka ikehu uila i ka ikehu mechanical. No laila, hoʻohana nui ʻia ia ma ke kahua o nā mea ʻike, e like me nā mea ʻike kaomi, nā mea ʻike wikiwiki, nā ʻike wela a pēlā aku. Eia kekahi, hiki ke hoʻohana ʻia ke kiʻi piezoelectric lithium niobate i nā mea acoustic a me nā mea vibration, e like me ka piezoelectric ceramic transducer complex piezoelectric ceramic filter.
2-ʻO ka paʻa o ka lithium niobate piezoelectric film kekahi o kāna mau pono. Ma muli o kona kūpaʻa ʻana o ke aniani a me ka inertness kemika, hiki ke hana i ke kiʻi piezoelectric lithium niobate piezoelectric i ke kiʻekiʻe kiʻekiʻe, ka haʻahaʻa kiʻekiʻe, ka waikawa ikaika, ka alkali ikaika a me nā wahi paʻakikī ʻē aʻe, me ke kūpaʻa maikaʻi a me ka paʻa.
ʻO 3-Lithium niobate piezoelectric kiʻiʻoniʻoni he mea piezoelectric hou me ka hana maikaʻi loa a me ke kūpaʻa, a loaʻa kahi manaʻo ākea ākea. Me ka hoʻomau mau ʻana o ka ʻepekema a me ka ʻenehana, e hoʻohana ʻia ke kiʻi piezoelectric lithium niobate piezoelectric i nā kūlanakauhale ʻē aʻe, e lawe mai ana i ka ʻoluʻolu a me ka hana hou i ke ola o nā kānaka.