6'īniha 150mm Silicon Carbide SiC Wafers ʻano 4H-N no ka noiʻi hana MOS a i ʻole SBD a me ka papa Dummy
Nā Kahua Noi
He kuleana koʻikoʻi ka substrate kristal hoʻokahi silicon carbide 6-'īniha i nā ʻoihana he nui. ʻO ka mea mua, hoʻohana nui ʻia ia i ka ʻoihana semiconductor no ka hana ʻana i nā mea uila mana kiʻekiʻe e like me nā transistors mana, nā kaapuni i hoʻohui ʻia, a me nā modula mana. ʻO kona conductivity thermal kiʻekiʻe a me ke kūpaʻa wela kiʻekiʻe e hiki ai ke hoʻokuʻu maikaʻi i ka wela, e hopena ana i ka hoʻomaikaʻi ʻana i ka pono a me ka hilinaʻi. ʻO ka lua, he mea nui nā wafers silicon carbide i nā kahua noiʻi no ka hoʻomohala ʻana i nā mea hou a me nā mea hana. Eia kekahi, loaʻa i ka wafer silicon carbide nā noi nui ma ke kahua o optoelectronics, me ka hana ʻana o nā LED a me nā diodes laser.
Nā kikoʻī huahana
ʻO ke anawaena o ka substrate kristal hoʻokahi silicon carbide 6-'īniha he 6 'īniha (ma kahi o 152.4 mm). ʻO ka ʻoʻoleʻa o ka ʻili he Ra < 0.5 nm, a ʻo ka mānoanoa he 600 ± 25 μm. Hiki ke hoʻopilikino ʻia ka substrate me ke conductivity ʻano-N a i ʻole P, ma muli o nā koi o ka mea kūʻai. Eia kekahi, hōʻike ia i ke kūpaʻa mechanical kūikawā, hiki ke kū i ke kaomi a me ka haʻalulu.
| Anawaena | 150±2.0mm（6 ʻīniha） | ||||
| Mānoanoa | 350 μm±25μm | ||||
| Hoʻonohonoho | Ma ke axis: <0001>±0.5° | Ma waho o ke axis：4.0° i ka ʻaoʻao o 1120±0.5° | |||
| Polytype | 4H | ||||
| Ke kū'ē'ē (Ω·cm) | 4H-N | 0.015~0.028 Ω·cm/0.015~0.025ohm·cm | |||
| 4/6H-SI | >1E5 | ||||
| Ke kuhikuhi pālahalaha mua | {10-10}±5.0° | ||||
| Ka lōʻihi pālahalaha mua (mm) | 47.5 mm±2.5 mm | ||||
| Ka lihi | Chamfer | ||||
| TTV/Kakaka/Warp (um) | ≤15 /≤40 /≤60 | ||||
| AFM Front (Si-face) | Polani Ra≤1 nm | ||||
| CMP Ra≤0.5 nm | |||||
| LTV | ≤3μm (10mm * 10mm) | ≤5μm (10mm * 10mm) | ≤10μm (10mm * 10mm) | ||
| TTV | ≤5μm | ≤10μm | ≤15μm | ||
| ʻIli ʻalani/nā lua/nā māwae/haumia/nā ʻila/nā kaha | ʻAʻohe | ʻAʻohe | ʻAʻohe | ||
| nā indents | ʻAʻohe | ʻAʻohe | ʻAʻohe | ||
ʻO ka substrate kristal hoʻokahi silicon carbide 6-'īniha he mea hana kiʻekiʻe i hoʻohana nui ʻia i nā ʻoihana semiconductor, noiʻi, a me optoelectronics. Hāʻawi ia i ka conductivity thermal maikaʻi loa, ke kūpaʻa mechanical, a me ke kūpaʻa wela kiʻekiʻe, e kūpono ana no ka hana ʻana i nā mea uila mana kiʻekiʻe a me ka noiʻi mea hou. Hāʻawi mākou i nā kikoʻī like ʻole a me nā koho hoʻopilikino e hoʻokō i nā koi like ʻole o nā mea kūʻai aku.E kāhea mai iā mākou no nā kikoʻī hou aku e pili ana i nā wafers carbide silicon!
Kiʻikuhi kikoʻī
