Hoʻopilikino ʻia ʻo SiC Seed Crystal Substrates Dia 205/203/208 4H-N Type no nā kamaʻilio Optical
Nā palena ʻenehana
Wafer anoano silikoni | |
Polytype | 4H |
Ua hewa ka hoʻonohonoho ʻana o ka ʻili | 4° i ka<11-20>±0.5º |
Kū'ē | hoʻopilikino |
Anawaena | 205±0.5mm |
mānoanoa | 600±50μm |
ʻoʻoleʻa | CMP, Ra≤0.2nm |
Micropipe Density | ≤1 ea/cm2 |
Nā ʻōpala | ≤5, Ka nui Length≤2 * Anawaena |
Nā ʻāpana lihi/indents | ʻAʻohe |
Hoailona laser mua | ʻAʻohe |
Nā ʻōpala | ≤2, Ka huina Length≤Diameter |
Nā ʻāpana lihi/indents | ʻAʻohe |
Nā wahi polytype | ʻAʻohe |
Hōʻailona laser hope | 1mm (mai ka lihi luna) |
Kaulana | Chamfer |
Hoʻopili ʻana | ʻO ka pīkī wafer nui |
Nā ʻano nui
1. Hoʻokumu Crystal a me ka Hana Uila
· Crystallographic Stability: 100% 4H-SiC polytype dominance, zero multicrystalline inclusions (e laʻa, 6H/15R), me ka XRD kulu ʻana i ka laula piha i ka hapalua kiʻekiʻe (FWHM) ≤32.7 arcsec.
· Ke Kaʻa Kaʻa Kiʻekiʻe: Electron mobility o 5,400 cm²/V·s (4H-SiC) a me ka neʻe ʻana o ka lua o 380 cm²/V·s, e hiki ai i nā hoʻolālā hāmeʻa kiʻekiʻe.
· Paʻa Paʻa: E kū i ka 1 MeV neutron irradiation me ka paepae pōʻino hoʻoneʻe o 1 × 10¹⁵ n/cm², kūpono no ka aerospace a me nā noi nuklea.
2. Na Waiwai a me Mechanical
· Kūikawā Thermal Conductivity: 4.9 W/cm·K (4H-SiC), pākolu o ke kilika, kākoʻo i ka hana ma luna o 200°C.
· Ka Hoʻonui Hoʻonui Haʻahaʻa Haʻahaʻa: CTE o 4.0 × 10⁻⁶ / K (25-1000 ° C), e hōʻoia ana i ka hoʻopili ʻana me ka pahu silicon-based a me ka hōʻemi ʻana i ke kaumaha wela.
3. ʻO ka hoʻomalu hewa a me ka pololei o ka hana ʻana
· Mikopipe Density: <0.3 cm⁻² (8-inihi wafers), dislocation density <1,000 cm⁻² (hōʻoia ma o KOH etching).
· Kūlana o ka ʻili: CMP-polled a hiki i ka Ra <0.2 nm, e hālāwai ana i nā koi ʻana o EUV lithography-grade flatness.
Nā noi nui
Domaine | Nā hiʻohiʻona noiʻi | Nā Pono ʻenehana |
Nā Kūkākūkā Optical | Nā lasers 100G/400G, nā modules hybrid photonics silika | Hiki i nā substrate hua InP ke hiki i ka bandgap pololei (1.34 eV) a me Si-based heteroepitaxy, e hōʻemi ana i ka nalowale o ka hoʻopili ʻana. |
Nā Kaʻa ʻEhuka Hou | 800V nā mea hoʻohuli kiʻekiʻe-volt, nā mea hoʻoili ma luna o ka moku (OBC) | ʻO nā substrate 4H-SiC kū i ka> 1,200 V, e hōʻemi ana i nā poho conduction e 50% a me ka nui o ka ʻōnaehana e 40%. |
5G kamaʻilio | Nā hāmeʻa RF hawewe-milimeter (PA/LNA), nā mea hoʻonui mana o ke kahua kahua | ʻO nā substrate Semi-insulating SiC (resistivity>10⁵ Ω·cm) hiki ke hoʻohui i ka passive kiʻekiʻe (60 GHz+). |
Lako Hana Hana | ʻO nā mea ʻike wela kiʻekiʻe, nā mea hoʻololi o kēia manawa, nā mākaʻikaʻi nuklea reactor | Hāʻawi nā substrate hua InSb (0.17 eV bandgap) i ka sensitivity magnetic a hiki i 300%@10 T. |
Nā Pōmaikaʻi Nui
Hāʻawi ka SiC (silicon carbide) i ka hana hoʻokō like ʻole me 4.9 W/cm·K thermal conductivity, 2-4 MV/cm breakdown field strength, a me 3.2 eV wide bandgap, hiki i ka mana kiʻekiʻe, kiʻekiʻe-frequency, a me ka wela wela. E hōʻike ana i ka ʻeleʻele micropipe ʻole a me <1,000 cm⁻² dislocation density, ʻo kēia mau substrates e hōʻoia i ka hilinaʻi i nā kūlana koʻikoʻi. Kākoʻo kā lākou mau mea kemika a me CVD-compatible surfaces (Ra <0.2 nm) i ka ulu heteroepitaxial holomua (e laʻa, SiC-on-Si) no nā ʻōnaehana optoelectronics a me EV.
Nā lawelawe XKH:
1. Hana ʻia i hana ʻia
· Nā ʻano wafer maʻalahi: 2–12-ʻīniha wafer me nā ʻoki pōʻai, ʻehā, a i ʻole ke ʻano maʻamau (± 0.01 mm ka hoʻomanawanui).
· Hoʻoponopono Doping: Naikokene pololei (N) a me ka alumini (Al) doping ma o CVD, e loaʻa ana nā pae resistivity mai 10⁻³ a i 10⁶ Ω·cm.
2. Nā ʻenehana kaʻina hana kiʻekiʻeʻ
· Heteroepitaxy: SiC-on-Si (kūpono me 8-inch silicon laina) a me SiC-on-Diamond (thermal conductivity >2,000 W/m·K).
· Hoʻopau Defect: Hydrogen etching a me annealing e hōʻemi i ka micropipe/density defects, hoʻomaikaʻi i ka hua wafer i>95%.
3. Nā Pūnaehana Hoʻoponopono Ponoʻ
· Ka Ho'āʻo Hope-a-End: Raman spectroscopy (polytype verification), XRD (crystallinity), a me SEM (defect analysis).
· Nā palapala hōʻoia: Kūlike me AEC-Q101 (automotive), JEDEC (JEDEC-033), a me MIL-PRF-38534 (koa-grade).
4. Kākoʻo Kākoʻo Pūnaeweleʻ
· Ka nui o ka hana ʻana: Ka hoʻopuka ʻana i kēlā me kēia mahina > 10,000 wafers (60% 8-ʻīniha), me 48-hola hoʻopuka pilikia.
· Pūnaehana Logistics: Hoʻopili ʻia ma ʻEulopa, ʻAmelika ʻĀkau, a me ʻAsia-Pākīpika ma o ka ukana ea/kai me ka hoʻopaʻa ʻana i ka wela.
5. Hoʻomohala hui ʻenehanaʻ
· Nā Labs R&D Hui: E hui pū ma ka hoʻopili ʻana i ka ʻōnaewele ʻo SiC power module (e laʻa, ka hoʻohui pū ʻana o DBC substrate).
· Laikini IP: Hāʻawi i ka laikini ʻenehana ulu epitaxial GaN-on-SiC RF e hōʻemi i nā kumukūʻai R&D.
Hōʻuluʻulu manaʻo
ʻO SiC (silicon carbide) nā kumulāʻau kristal, ma ke ʻano he mea hoʻolālā, ke hoʻololi hou nei i nā kaulahao ʻoihana honua ma o ka ulu ʻana i ka ulu aniani, ka mana kīnā, a me ka hoʻohui heterogeneous. Ma ka hoʻomau mau ʻana i ka hoʻemi ʻana i ka wafer defect, ka hoʻonui ʻana i ka hana 8-inch, a me ka hoʻonui ʻana i nā platform heteroepitaxial (e laʻa, SiC-on-Diamond), hāʻawi ʻo XKH i nā hopena hilinaʻi kiʻekiʻe, kumukūʻai kūpono no ka optoelectronics, ka ikehu hou, a me ka hana holomua. ʻO kā mākou kūpaʻa i ka hana hou e hōʻoia i nā mea kūʻai aku e alakaʻi i ka neutrality kalapona a me nā ʻōnaehana naʻauao, e alakaʻi ana i ka wā e hiki mai ana o ka wide-bandgap semiconductor kaiaola.


