50.8mm 2 iniha GaN ma ka sapphire Epi-layer wafer
Ka hoʻohana ʻana i ka pepa epitaxial gallium nitride GaN
Ma muli o ka hana o ka gallium nitride, gallium nitride epitaxial chips i kūpono no ka mana kiʻekiʻe, ke alapine kiʻekiʻe, a me nā noi uila haʻahaʻa.
Hōʻike ʻia ma:
1) Paipai kiʻekiʻe: Hoʻonui ka bandgap kiʻekiʻe i ke kiʻekiʻe o ka volta o nā mea gallium nitride a hiki ke hoʻopuka i ka mana kiʻekiʻe aʻe ma mua o nā mea gallium arsenide, kahi kūpono loa no nā kahua kahua kamaʻilio 5G, radar pūʻali a me nā māla ʻē aʻe;
2) ʻO ka hoʻololi kiʻekiʻe kiʻekiʻe: ʻo ke kūpaʻa o ka gallium nitride hoʻololi i ka mana uila he 3 mau kauoha o ka nui ma lalo o nā mea silika, hiki ke hōʻemi nui i ka nalowale o ka hoʻololi;
3) ʻO ka conductivity thermal kiʻekiʻe: ʻo ka conductivity thermal kiʻekiʻe o ka gallium nitride e loaʻa iā ia ka hana hoʻoheheʻe wela maikaʻi loa, kūpono no ka hana ʻana i ka mana kiʻekiʻe, ka wela kiʻekiʻe a me nā ʻano hana ʻē aʻe;
4) Hoʻohaʻahaʻa i ka ikaika o ke kahua uila: ʻOiai ʻo ka haʻihaʻi ʻana o ka ikaika o ka gallium nitride kokoke i ka silicon nitride, ma muli o ke kaʻina semiconductor, nā mea lattice mismatch a me nā kumu ʻē aʻe, ʻo ka hoʻomanawanui ʻana o ka gallium nitride mea maʻamau ma kahi o 1000V, a me ka ʻO ka uila hoʻohana palekana ma lalo o 650V.
| 'ikamu | GaN-TCU-C50 | GaN-TCN-C50 | GaN-TCP-C50 |
| Anana | e 50.8mm ± 0.1mm | ||
| mānoanoa | 4.5±0.5 um | 4.5±0.5um | |
| Kūlana | C-plane(0001) ±0.5° | ||
| ʻAno hoʻokele | ʻAno N (Hoʻopau ʻole ʻia) | ʻAno N (Si-doped) | ʻAno P (Mg-doped) |
| Palekana (3O0K) | < 0.5 Q・cm | < 0.05 Q・cm | ~ 10 Q・cm |
| Kaʻa lawe | < 5x1017knm-3 | > 1x1018knm-3 | > 6x1016 knm-3 |
| Ka neʻe ʻana | ~ 300 knm2/Vs | ~ 200 knm2/Vs | ~ 10 knm2/Vs |
| Paʻaʻawaʻawa | Ma lalo o 5x108knm-2(heluhelu ʻia e nā FWHM o XRD) | ||
| Kapili lepo | ʻO GaN ma Sapphire (Maʻamau: Koho SSP: DSP) | ||
| Wahi Ili Hiki ke hoohanaia | > 90% | ||
| Pūʻolo | Hoʻopili ʻia i loko o kahi lumi lumi maʻemaʻe papa 100, i nā cassette o 25pcs a i ʻole nā pahu wafer hoʻokahi, ma lalo o kahi lewa nitrogen. | ||
* Hiki ke hoʻopilikino ʻia ka mānoanoa ʻē aʻe
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